Abstract:
A thermionic cathode of an embodiment includes a carbon coating applied to an outer surface of the side, the carbon coating comprising a contiguous extended portion surrounding the upper section and spaced apart from said upper section by a gap having 1 μm or more and 10 μm or less in width and having a difference of 1 μm or less in the width between a maximum value and a minimum value in a periphery of the electron emitting surface.
Abstract:
An electron source is made from mixed-metal carbide materials of high refractory nature. Producing field-enhanced thermionic emission, i.e., thermal-field or extended Schottky emission, from these materials entails the use of a certain low work function crystallographic direction, such as, for example, (100), (210), and (310). These materials do not naturally facet because of their refractory nature. The disclosed electron source made from transition metal carbide material is especially useful when installed in a scanning electron microscope (SEM) performing advanced imaging applications that require a high brightness, high beam current source.
Abstract:
An electron gun cathode (104) is column shaped, and emits electrons by being heated. A holder (103), which covers the bottom and sides of the electron gun cathode, has electrical conductivity and holds the electron gun cathode, and is composed of a material that does not easily react with the electron gun cathode when in a heated state, is provided. The tip of the electron gun cathode (104) protrudes from the holder (103) so as to be exposed, and electrons are emitted from the tip toward the front by applying an electric field to the tip.
Abstract:
Electron emission materials consisting of carbides, borides, and oxides, and related mixtures and compounds, of Group IVB metals Hf, Zr, and Ti, Group IIA metals Be, Mg, Ca, Sr, and Ba, and Group IIIB metals Sc, Y, and lanthanides La through Lu are used in electrodes. The electron emission materials include ternary Group IVB-IIIB, IVB-IIA, and IIIB-IIA oxides and quaternary Group IVB-IIIB-IIA oxides. These electron emission materials are typically contained in a refractory metal matrix formed of tungsten, molybdenum, tantalum, rhenium, and their alloys, but may also be used by themselves. These materials and electrodes have high melting points, low vapor pressures, low work functions, high electrical and thermal conductivity, and high thermionic electron emission and field emission properties.
Abstract:
Various examples are provided related to electrodes for high temperature electrochemical corrosion sensing. In one example, a high temperature sensor electrode includes a quartz tube; a copper chloride and sodium chloride mixture sealed in the quartz tube; and an electrode wire in the mixture, the electrode wire including an electrode connection extending through a seal of the quartz tube. In another example, a method for electrochemical testing includes immersing electrodes of a high temperature electrochemical sensor in a corrosive medium, the electrodes comprising a high temperature sensor electrode; and obtaining one or more electrochemical measurement via the electrodes immersed in the corrosive medium. The electrodes can also include a working electrode and/or a counter electrode.
Abstract:
An improved cathode comprises a cone-shaped emitter with a carbon-based coating applied to the emitter cone surface, in which there is a narrow annular gap between the emitter body and the carbon coating. The gap prevents direct contact between the carbon coating and the crystalline emitting material, thereby preventing damaging interactions and extending the useful lifetime of the cathode.
Abstract:
An electron gun includes an electron emission cathode, a control electrode, and an extractor and the electron emission cathode is made of rare earth hexaboride. A tip of the electron emission cathode is located between the control electrode and the extractor, and the electron emission surface of the electron emission cathode is spherical or flat.
Abstract:
An electron source using an electron emissive material having a composition represented by the nominal atom formula La.sub.x (Nd.sub.y Pr.sub.1-y).sub.1-x B.sub.6 ; x less than 0.5 and greater than 0.2, y less than or equal to 1.0 and greater than or equal to 0.0, is described. The electron source is well suited for use in instruments such as scanning electron microscopes and electron beam exposure systems.