公开(公告)号：US11962973B2

公开(公告)日：2024-04-16

申请号：US18165014

申请日：2023-02-06

Applicant: Infineon Technologies AG

Inventor： Christian Bretthauer ,  David Tumpold ,  Pradyumna Mishra ,  Daniel Neumaier

IPC: H04R17/02 ,  B81B7/04 ,  G01H11/08 ,  G01P1/02 ,  G01P15/08 ,  G01P15/09 ,  G01P15/18 ,  H04R1/04 ,  H04R1/28 ,  H10N30/30 ,  H10N30/87 ,  H04R7/18 ,  H04R17/10

CPC classification number: H04R17/02 ,  B81B7/04 ,  G01H11/08 ,  G01P15/0802 ,  G01P15/09 ,  G01P15/18 ,  H04R1/28 ,  H10N30/302 ,  H10N30/308 ,  H10N30/87 ,  B81B2201/0235 ,  B81B2201/0257 ,  B81B2203/0127 ,  G01P1/023 ,  G01P2015/084 ,  H04R1/04 ,  H04R7/18 ,  H04R17/10 ,  H04R2201/003

Abstract: A combined MicroElectroMechanical structure (MEMS) includes a first piezoelectric membrane having one or more first electrodes, the first piezoelectric membrane being affixed between a first holder and a second holder; and a second piezoelectric membrane having an inertial mass and one or more second electrodes, the second piezoelectric membrane being affixed between the second holder and a third holder.

公开(公告)号：US11611835B2

公开(公告)日：2023-03-21

申请号：US16896665

申请日：2020-06-09

Applicant: Infineon Technologies AG

Inventor： Christian Bretthauer ,  Pradyumna Mishra ,  Daniel Neumaier ,  David Tumpold

IPC: G01P15/08 ,  G01P15/09 ,  H01L41/047 ,  H01L41/113 ,  G01P15/18 ,  G01H11/08 ,  G01P1/02 ,  H04R17/02 ,  B81B7/04 ,  H04R1/28 ,  H04R1/04 ,  H04R7/18 ,  H04R17/10

Abstract: A MicroElectroMechanical Structure (MEMS) accelerometer includes a piezoelectric membrane including at least one electrode and an inertial mass, the piezoelectric membrane being affixed to a holder; and a circuit for evaluating sums and differences of signals associated with the at least one electrode to determine a three-dimensional acceleration direction, wherein the at least one electrode includes a segmented electrode, and wherein the segmented electrode includes four segmentation zones.

公开(公告)号：US20210229980A1

公开(公告)日：2021-07-29

申请号：US16773079

申请日：2020-01-27

Applicant: Infineon Technologies AG

Inventor： Dietmar Straeussnigg ,  Daniel Neumaier

IPC: B81B7/00 ,  H04R19/04 ,  H03M3/00

Abstract: A method of operating a microelectromechanical system (MEMS) includes, in a first operational mode, converting an analog output of the MEMS into a first internal data stream and a first external data stream having a first sampling rate; transitioning from the first operational mode to a second operation mode without restarting the MEMS; and in the second operational mode, converting the analog output of the MEMS into a second internal data stream having a second sampling rate different from the first sampling rate, and performing a sampling rate conversion of the second internal data stream to generate a second external data stream.

公开(公告)号：US11910154B2

公开(公告)日：2024-02-20

申请号：US17658546

申请日：2022-04-08

Applicant: Infineon Technologies AG

Inventor： Daniel Neumaier ,  Niccoló De Milleri

IPC: H04R1/28 ,  B81B3/00 ,  H04R1/04 ,  H04R19/04

CPC classification number: H04R1/2846 ,  B81B3/0059 ,  H04R1/04 ,  H04R19/04 ,  B81B2201/0257 ,  B81B2203/0127 ,  B81B2203/0315 ,  H04R2201/003

Abstract: A MEMS device includes a package for providing an inner volume, a MEMS microphone arranged in the inner volume, a sound port through the package to the inner volume, and a passive acoustic attenuation filter acoustically coupled to the sound port.

公开(公告)号：US11693021B2

公开(公告)日：2023-07-04

申请号：US17354412

申请日：2021-06-22

Applicant: Infineon Technologies AG

Inventor： Somu Goswami ,  Christian Bretthauer ,  Matthias Friedrich Herrmann ,  Gunar Lorenz ,  Pradyumna Mishra ,  Daniel Neumaier ,  David Tumpold

IPC: G01P15/08 ,  G01P15/09 ,  G01P15/18 ,  G01H11/08 ,  H10N30/30 ,  B81B3/00 ,  H04R17/02 ,  H04R1/28 ,  H04R1/04 ,  H04R7/18 ,  H04R17/10

CPC classification number: G01P15/0802 ,  G01H11/08 ,  G01P15/09 ,  G01P15/18 ,  H04R1/28 ,  H04R17/02 ,  H10N30/302 ,  H10N30/308 ,  B81B3/0021 ,  B81B2201/0235 ,  B81B2201/0257 ,  B81B2203/0127 ,  G01P2015/084 ,  H04R1/04 ,  H04R7/18 ,  H04R17/10 ,  H04R2201/003

Abstract: A MEMS vibration sensor includes a piezoelectric membrane including a segmented electrode affixed to a holder; and an inertial mass affixed to the piezoelectric membrane, wherein the segmented electrode includes four segmentation zones, wherein, in an X-direction, a signal from a first segmentation zone is equal to a signal from a third segmentation zone, a signal from a second segmentation zone is equal to a signal from a fourth segmentation zone, and the signal from the first segmentation zone and the signal from the second segmentation zone have opposite signs, and wherein, in a Y-direction, a signal from the first segmentation zone is equal to the signal from the second segmentation zone, the signal from the third segmentation zone is equal to the signal from the fourth segmentation zone, and the signal from first segmentation zone and the signal from the third segmentation zone have opposite signs.

公开(公告)号：US11125627B2

公开(公告)日：2021-09-21

申请号：US15909618

申请日：2018-03-01

Applicant: Infineon Technologies AG

Inventor： Christian Jenkner ,  Daniel Neumaier

IPC: G01K7/01 ,  G01K15/00 ,  G01L11/02 ,  G01K1/20 ,  H03F3/45 ,  H04R1/04

Abstract: In accordance with an embodiment, a device includes an interface configured for obtaining at least one measurement signal from a temperature sensor. In a first time interval the at least one measurement signal comprises information about a temperature-dependent voltage difference between a first temperature-dependent voltage at a first diode of the temperature sensor and a second temperature-dependent voltage at a second diode of the temperature sensor. In a second time interval the at least one measurement signal comprises information about a measurement value of a temperature-dependent voltage at a temperature-dependent electrical component of the temperature sensor.

公开(公告)号：US11187607B2

公开(公告)日：2021-11-30

申请号：US16293052

申请日：2019-03-05

Applicant: Infineon Technologies AG

Inventor： Daniel Neumaier ,  Christian Jenkner

IPC: G01L27/00 ,  G01L9/12

Abstract: An apparatus for calibrating a pressure sensing device having a pressure sensor and a temperature compensation device includes: a chamber for applying a variable temperature and a variable pressure to the pressure sensing device; a temperature regulation device for regulating the temperature in the chamber designed such that the temperature in the chamber respectively increases in a strictly monotonous manner or falls in a strictly monotonous manner during one or more time intervals; a pressure regulation device for regulating the pressure in the chamber designed such that the pressure in the chamber respectively monotonously increases or respectively monotonously falls in at least one of the time intervals during a plurality of sub-intervals of the one-time interval; a reference pressure sensor for sensing the pressure in the chamber during the time interval(s); and a data record generation device for generating corresponding data records.

公开(公告)号：US20210235200A1

公开(公告)日：2021-07-29

申请号：US16871546

申请日：2020-05-11

Applicant: Infineon Technologies AG

Inventor： Dietmar Straeussnigg ,  Daniel Neumaier

IPC: H04R19/04 ,  H04R3/00

Abstract: A method of operating a microelectromechanical system (MEMS) includes, in a first operational mode, converting an analog output of the MEMS into a first internal data stream and a first external data stream having a first sampling rate; transitioning from the first operational mode to a second operation mode without restarting the MEMS; and in the second operational mode, converting the analog output of the MEMS into a second internal data stream having a second sampling rate different from the first sampling rate, and performing a sampling rate conversion of the second internal data stream to generate a second external data stream.

公开(公告)号：US10691188B2

公开(公告)日：2020-06-23

申请号：US15892164

申请日：2018-02-08

Applicant: Infineon Technologies AG

Inventor： Andreas Wiesbauer ,  Daniel Neumaier ,  Christian Jenkner

IPC: G06F1/26 ,  G06F1/3203 ,  H04R19/00

Abstract: Examples of the present disclosure provide an electronic device in a package, the electronic device comprising a first circuit having a temperature sensitive behavior and a second circuit being switchable between a first operating mode and at least one second operating mode. A power consumption of the second circuit in the first operating mode is higher than a power consumption of the second circuit in the second operating mode. The electronic device comprises a controller configured to switch the second circuit into the first operating mode during a first time interval and into the second operating mode during a second time interval. The controller is further configured to cause an additional power consumption in the electronic device during the second time interval to reduce or compensate a difference between an overall power consumption of the electronic device during the first time interval and the second time interval.

公开(公告)号：US20180252594A1

公开(公告)日：2018-09-06

申请号：US15909618

申请日：2018-03-01

Applicant: Infineon Technologies AG

Inventor： Christian Jenkner ,  Daniel Neumaier

IPC: G01K7/01 ,  H04R1/04 ,  H03F3/45 ,  G01K1/20

CPC classification number: G01K7/01 ,  G01K1/20 ,  G01K15/00 ,  G01K15/005 ,  G01L11/02 ,  H03F3/45085 ,  H04R1/04

Abstract: In accordance with an embodiment, a device includes an interface configured for obtaining at least one measurement signal from a temperature sensor. In a first time interval the at least one measurement signal comprises information about a temperature-dependent voltage difference between a first temperature-dependent voltage at a first diode of the temperature sensor and a second temperature-dependent voltage at a second diode of the temperature sensor. In a second time interval the at least one measurement signal comprises information about a measurement value of a temperature-dependent voltage at a temperature-dependent electrical component of the temperature sensor.