公开(公告)号：US09362127B2

公开(公告)日：2016-06-07

申请号：US13948208

申请日：2013-07-23

Applicant: Infineon Technologies AG

Inventor： Michael Krenzer ,  Thomas Kunstmann ,  Eva-Maria Hess ,  Manfred Frank

IPC: H01L21/285 ,  H01L21/02 ,  H01L23/532

CPC classification number: H01L21/28506 ,  H01L21/02068 ,  H01L23/53214 ,  H01L23/53228 ,  H01L23/53242 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A method for processing a workpiece may include: providing a workpiece including a first region and a second region; forming a porous metal layer over the first region and the second region; wherein the first region and the second region are configured such that an adhesive force between the second region and the porous metal layer is lower than an adhesive force between the first region and the porous metal layer.

Abstract translation: 一种用于处理工件的方法可以包括：提供包括第一区域和第二区域的工件; 在所述第一区域和所述第二区域上形成多孔金属层; 其中所述第一区域和所述第二区域被构造成使得所述第二区域和所述多孔金属层之间的粘合力低于所述第一区域和所述多孔金属层之间的粘合力。

公开(公告)号：US20140242374A1

公开(公告)日：2014-08-28

申请号：US13774624

申请日：2013-02-22

Applicant: INFINEON TECHNOLOGIES AG

Inventor： Johann Strasser ,  Thomas Kunstmann ,  Manfred Frank ,  Werner Robl ,  Maximilian Krug ,  Simon Faiss ,  Matthias Mueller

IPC: H01L23/14 ,  B05D7/00 ,  C25D7/12 ,  B32B3/26

CPC classification number: H01L23/14 ,  B05D7/52 ,  B32B3/26 ,  C23C18/1644 ,  C23C18/1651 ,  C23C18/32 ,  C23C18/50 ,  C25D7/12 ,  C25D7/123 ,  H01L23/3733 ,  H01L23/49866 ,  H01L23/53238 ,  H01L2924/0002 ,  Y10T428/249956 ,  Y10T428/249957 ,  Y10T428/24997 ,  H01L2924/00

Abstract: Various methods, apparatuses and devices relate to porous metal layers on a substrate which are three-dimensionally coated. In one embodiment, a porous metal layer is deposited over a substrate. The porous metal layer can be three-dimensionally coated with a coating material.

Abstract translation: 各种方法，装置和装置涉及三维涂覆在基底上的多孔金属层。 在一个实施例中，多孔金属层沉积在衬底上。 多孔金属层可以用涂料三维涂覆。