公开(公告)号：US20220406561A1

公开(公告)日：2022-12-22

申请号：US17825261

申请日：2022-05-26

Applicant: Integrated Dynamic Electron Solutions, Inc.

Inventor： Ruth Shewmon BLOOM ,  Bryan Walter REED ,  Daniel Joseph MASIEL ,  Sang Tae PARK

IPC: H01J37/24 ,  H01J37/28 ,  H01J37/29 ,  H01J37/147

Abstract: A device may include an electron source, a detector, and a deflector. The electron source may be directed toward a sample area. The detector may receive an electron signal or an electron-induced signal. A deflector may be positioned between the electron source and the sample. The deflector may modulate an intensity of the electron source directed to the sample area according to an electron dose waveform having a continuously variable temporal profile.

公开(公告)号：US20230411112A1

公开(公告)日：2023-12-21

申请号：US18201536

申请日：2023-05-24

Applicant: Integrated Dynamic Electron Solutions, Inc.

Inventor： Ruth Shewmon BLOOM ,  Bryan Walter REED ,  Daniel Joseph MASIEL ,  Sang Tae PARK

IPC: H01J37/24 ,  H01J37/29 ,  H01J37/28 ,  H01J37/147

CPC classification number: H01J37/243 ,  H01J37/292 ,  H01J37/28 ,  H01J37/147

Abstract: A device may include an electron source, a detector, and a deflector. The electron source may be directed toward a sample area. The detector may receive an electron signal or an electron-induced signal. A deflector may be positioned between the electron source and the sample. The deflector may modulate an intensity of the electron source directed to the sample area according to an electron dose waveform having a continuously variable temporal profile.

公开(公告)号：US20220336185A1

公开(公告)日：2022-10-20

申请号：US17688339

申请日：2022-03-07

Applicant: Integrated Dynamic Electron Solutions, Inc.

Inventor： Ruth Shewmon BLOOM ,  Bryan Walter REED ,  Daniel Joseph MASIEL ,  Sang Tae PARK

IPC: H01J37/24 ,  H01J37/147 ,  H01J37/28 ,  H01J37/29

Abstract: A device may include an electron source, a detector, and a deflector. The electron source may be directed toward a sample area. The detector may receive an electron signal or an electron-induced signal. A deflector may be positioned between the electron source and the sample. The deflector may modulate an intensity of the electron source directed to the sample area according to an electron dose waveform having a continuously variable temporal profile.