公开(公告)号：US11248962B2

公开(公告)日：2022-02-15

申请号：US17142635

申请日：2021-01-06

Applicant: JASCO CORPORATION

Inventor： Kento Aizawa ,  Yoshiko Kubo ,  Erika Taira ,  Yuji Higuchi

IPC: G01J3/45 ,  G01N21/359 ,  G02B21/00 ,  G01N21/65 ,  G01N21/27 ,  G01N21/3563

Abstract: A method of analyzing foreign matter in a sample includes: measuring an optical spectrum for each of a plurality of measurement points of a measurement region on the sample by a microscopic spectroscope; calculating a feature value of each measured spectrum by a computer; determining whether each of the measurement points is on the foreign matter or not based on each feature value; retaining the spectrum of the measurement point that is determined to be on the foreign matter, and deleting the spectrum of the measurement point that is not determined to be on the foreign matter or storing the same to a storage unit; and executing multivariate analysis of the spectra of the plurality of the measurement points that are determined to be on the foreign matter or classifying the same with AI search.

公开(公告)号：US12031864B2

公开(公告)日：2024-07-09

申请号：US17980641

申请日：2022-11-04

Applicant: JASCO CORPORATION

Inventor： Kenichi Akao ,  Yuji Higuchi ,  Tsubasa Asatsuma

IPC: G01J3/02 ,  G01J3/453

CPC classification number: G01J3/0264 ,  G01J3/021 ,  G01J3/027 ,  G01J3/4535

Abstract: A spectrometer capable of providing information, to a measurer, necessary for determining whether a sample set to the spectrometer is a sample expected by the measurer or not before a main measurement includes a data processor and a display. The data processor calculates a preliminary spectral information of the sample based on at least n of a latest detected signal and a BKG information retained in advance, calculates and updates the preliminary spectral information based on at least n of the latest detected signal and the BKG information again, and repeats these calculations and updates. The display shows the preliminary spectral information that is calculated and updated in the preview display. The data processor starts integration of N (N>n) of the detected signal during a preview display of the preliminary spectral information, and acquires a spectral information of the sample.