公开(公告)号：US12261014B2

公开(公告)日：2025-03-25

申请号：US17859399

申请日：2022-07-07

Applicant: JEOL Ltd.

Inventor： Motohiro Nakamura ,  Takeyuki Kobayashi

IPC: H01J37/14 ,  H01J37/28

Abstract: There is provided a scanning electron microscope which has a sample chamber capable of being evacuated to a low vacuum. The scanning electron microscope includes an electron gun for emitting an electron beam, an objective lens for focusing the emitted beam onto a sample, and a sample chamber in which the sample is housed. The objective lens includes an inner polepiece, an outer polepiece disposed outside the inner polepiece and facing the sample chamber, at least one through-hole extending through the inner and outer polepieces, and at least one cover member that closes off the through-hole. An opening is formed between the inner polepiece and the outer polepiece. The objective lens causes leakage of magnetic field from the opening toward the sample. The sample chamber has a degree of vacuum lower than that in an inner space that forms an electron beam path inside the inner polepiece.

公开(公告)号：US20230014270A1

公开(公告)日：2023-01-19

申请号：US17859399

申请日：2022-07-07

Applicant: JEOL Ltd.

Inventor： Motohiro Nakamura ,  Takeyuki Kobayashi

IPC: H01J37/14 ,  H01J37/28

Abstract: There is provided a scanning electron microscope which has a sample chamber capable of being evacuated to a low vacuum. The scanning electron microscope includes an electron gun for emitting an electron beam, an objective lens for focusing the emitted beam onto a sample, and a sample chamber in which the sample is housed. The objective lens includes an inner polepiece, an outer polepiece disposed outside the inner polepiece and facing the sample chamber, at least one through-hole extending through the inner and outer polepieces, and at least one cover member that closes off the through-hole. An opening is formed between the inner polepiece and the outer polepiece. The objective lens causes leakage of magnetic field from the opening toward the sample. The sample chamber has a degree of vacuum lower than that in an inner space that forms an electron beam path inside the inner polepiece.