公开(公告)号：US12278084B2

公开(公告)日：2025-04-15

申请号：US17858436

申请日：2022-07-06

Applicant: JEOL Ltd.

Inventor： Motohiro Nakamura

IPC: H01J37/22 ,  H01J37/21 ,  H01J37/28

Abstract: Provided is an electron microscope for generating a montage image by acquiring images of a plurality of regions in a montage image capturing region set on a specimen, and by connecting the acquired images. The electron microscope includes a specimen surface height calculating unit that calculates a distribution of specimen surface heights in the montage image capturing region by performing curved surface approximation based on the specimen surface heights determined by performing focus adjustment at a plurality of points set in a region including the montage image capturing region, and an image acquiring unit that acquires the images of the plurality of regions based on the calculated distribution of the specimen surface heights.

公开(公告)号：US08742343B2

公开(公告)日：2014-06-03

申请号：US13908345

申请日：2013-06-03

Applicant: Jeol Ltd.

Inventor： Mitsuru Yamada ,  Motohiro Nakamura

IPC: H01J37/26

CPC classification number: H01J37/1471 ,  H01J37/28 ,  H01J2237/1501

Abstract: A method of axially aligning a charged particle beam involves an image data acquisition step and a calculation step. The image data acquisition step consists of obtaining first to third sets of image data by scanning a shielding member placed in the path of the beam with the beam while varying conditions of the excitation currents through first and second alignment coils, respectively. The calculation step consists of calculating the values of the excitation currents through the first and second alignment coils, respectively, for axial alignment of the beam, based on the obtained first to third sets of image data.

Abstract translation: 一种轴向对准带电粒子束的方法包括图像数据获取步骤和计算步骤。 图像数据获取步骤包括通过分别通过第一和第二对准线圈改变激励电流的条件，通过扫描放置在光束的光束路径中的屏蔽构件来获得第一至第三组图像数据。 计算步骤包括基于获得的第一至第三组图像数据计算通过第一和第二对准线圈的激励电流的值，用于光束的轴向对准。

公开(公告)号：US20130320210A1

公开(公告)日：2013-12-05

申请号：US13908345

申请日：2013-06-03

Applicant: JEOL Ltd.

Inventor： Mitsuru Yamada ,  Motohiro Nakamura

IPC: H01J37/147

CPC classification number: H01J37/1471 ,  H01J37/28 ,  H01J2237/1501

Abstract: A method of axially aligning a charged particle beam involves an image data acquisition step and a calculation step. The image data acquisition step consists of obtaining first to third sets of image data by scanning a shielding member placed in the path of the beam with the beam while varying conditions of the excitation currents through first and second alignment coils, respectively. The calculation step consists of calculating the values of the excitation currents through the first and second alignment coils, respectively, for axial alignment of the beam, based on the obtained first to third sets of image data.

Abstract translation: 一种轴向对准带电粒子束的方法包括图像数据获取步骤和计算步骤。 图像数据获取步骤包括通过分别通过第一和第二对准线圈改变激励电流的条件，通过扫描放置在光束的光束路径中的屏蔽构件来获得第一至第三组图像数据。 计算步骤包括基于获得的第一至第三组图像数据计算通过第一和第二对准线圈的激励电流的值，用于光束的轴向对准。

公开(公告)号：US12261014B2

公开(公告)日：2025-03-25

申请号：US17859399

申请日：2022-07-07

Applicant: JEOL Ltd.

Inventor： Motohiro Nakamura ,  Takeyuki Kobayashi

IPC: H01J37/14 ,  H01J37/28

Abstract: There is provided a scanning electron microscope which has a sample chamber capable of being evacuated to a low vacuum. The scanning electron microscope includes an electron gun for emitting an electron beam, an objective lens for focusing the emitted beam onto a sample, and a sample chamber in which the sample is housed. The objective lens includes an inner polepiece, an outer polepiece disposed outside the inner polepiece and facing the sample chamber, at least one through-hole extending through the inner and outer polepieces, and at least one cover member that closes off the through-hole. An opening is formed between the inner polepiece and the outer polepiece. The objective lens causes leakage of magnetic field from the opening toward the sample. The sample chamber has a degree of vacuum lower than that in an inner space that forms an electron beam path inside the inner polepiece.

公开(公告)号：US20230015400A1

公开(公告)日：2023-01-19

申请号：US17858436

申请日：2022-07-06

Applicant: JEOL Ltd.

Inventor： Motohiro Nakamura

IPC: H01J37/22 ,  H01J37/21

Abstract: Provided is an electron microscope for generating a montage image by acquiring images of a plurality of regions in a montage image capturing region set on a specimen, and by connecting the acquired images. The electron microscope includes a specimen surface height calculating unit that calculates a distribution of specimen surface heights in the montage image capturing region by performing curved surface approximation based on the specimen surface heights determined by performing focus adjustment at a plurality of points set in a region including the montage image capturing region, and an image acquiring unit that acquires the images of the plurality of regions based on the calculated distribution of the specimen surface heights.

公开(公告)号：US20230014270A1

公开(公告)日：2023-01-19

申请号：US17859399

申请日：2022-07-07

Applicant: JEOL Ltd.

Inventor： Motohiro Nakamura ,  Takeyuki Kobayashi

IPC: H01J37/14 ,  H01J37/28

Abstract: There is provided a scanning electron microscope which has a sample chamber capable of being evacuated to a low vacuum. The scanning electron microscope includes an electron gun for emitting an electron beam, an objective lens for focusing the emitted beam onto a sample, and a sample chamber in which the sample is housed. The objective lens includes an inner polepiece, an outer polepiece disposed outside the inner polepiece and facing the sample chamber, at least one through-hole extending through the inner and outer polepieces, and at least one cover member that closes off the through-hole. An opening is formed between the inner polepiece and the outer polepiece. The objective lens causes leakage of magnetic field from the opening toward the sample. The sample chamber has a degree of vacuum lower than that in an inner space that forms an electron beam path inside the inner polepiece.