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1.发明授权公开(公告)号：US10741357B2
公开(公告)日：2020-08-11
申请号：US16362924
申请日：2019-03-25
Applicant: JEOL Ltd.
Inventor： Noriyuki Inoue , Toshiaki Suzuki , Yoshiko Takashima
Abstract: A method of observing a liquid specimen in an electron microscope includes: housing the liquid specimen in a space formed by a specimen stage and a lid member; and observing the liquid specimen, wherein the lid member includes a water retaining material, and a supporting member for supporting the water retaining material, and the water retaining material is provided with a through-hole that enables passage of an electron beam with which the liquid specimen is irradiated.
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公开(公告)号：US09916963B2
公开(公告)日：2018-03-13
申请号：US15320912
申请日：2015-06-18
Applicant: JEOL Ltd.
Inventor： Noriyuki Inoue , Yoshiko Takashima
CPC classification number: H01J37/20 , G01N1/36 , H01J37/16 , H01J37/28 , H01J2237/2002 , H01J2237/2007 , H01J2237/2605 , H01J2237/2801
Abstract: A specimen loading method for loading a specimen that contains water into a specimen chamber of a charged particle beam device, includes: a step (S100) of mounting the specimen on a specimen support; a step (S102) of covering a predetermined area of the specimen with a water retention material; a step (S104) of evacuating the specimen chamber in which the specimen having the predetermined area covered with the water retention material is placed; and a step (S106) of exposing the predetermined area covered with the water retention material.
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3.发明申请公开(公告)号：US20190295813A1
公开(公告)日：2019-09-26
申请号：US16362924
申请日：2019-03-25
Applicant: JEOL Ltd.
Inventor： Noriyuki Inoue , Toshiaki Suzuki , Yoshiko Takashima
Abstract: A method of observing a liquid specimen in an electron microscope includes: housing the liquid specimen in a space formed by a specimen stage and a lid member; and observing the liquid specimen, wherein the lid member includes a water retaining material, and a supporting member for supporting the water retaining material, and the water retaining material is provided with a through-hole that enables passage of an electron beam with which the liquid specimen is irradiated.
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公开(公告)号：US20170154753A1
公开(公告)日：2017-06-01
申请号：US15320912
申请日：2015-06-18
Applicant: JEOL Ltd.
Inventor： Noriyuki Inoue , Yoshiko Takashima
CPC classification number: H01J37/20 , G01N1/36 , H01J37/16 , H01J37/28 , H01J2237/2002 , H01J2237/2007 , H01J2237/2605 , H01J2237/2801
Abstract: A specimen loading method for loading a specimen that contains water into a specimen chamber of a charged particle beam device, includes: a step (S100) of mounting the specimen on a specimen support; a step (S102) of covering a predetermined area of the specimen with a water retention material; a step (S104) of evacuating the specimen chamber in which the specimen having the predetermined area covered with the water retention material is placed; and a step (S106) of exposing the predetermined area covered with the water retention material.
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