公开(公告)号：US20250044346A1

公开(公告)日：2025-02-06

申请号：US18762988

申请日：2024-07-03

Applicant: MPI CORPORATION

Inventor： ANDREJ RUMIANTSEV ,  Ching-Ling PAI ,  LIN-LIN CHIH

IPC: G01R31/28 ,  G01R35/00

Abstract: To determine whether the current temperature of a probe assembly is stable for the calibration at the auxiliary site, a wafer probe station verifies a measured air standard dataset with a predetermined signal range or verifying an estimated measurement time range with a predetermined time window. To determine whether adjusting the current temperature of a probe assembly at the wafer site is necessary, a wafer probe station verifies a measured air standard dataset with a predetermined signal range or verifying an estimated measurement time range with a predetermined time window. To determine whether the current temperature of a probe assembly is ready for testing a semiconductor device, a wafer probe station verifies a measured air standard dataset with a predetermined signal range.

公开(公告)号：US20250044349A1

公开(公告)日：2025-02-06

申请号：US18762919

申请日：2024-07-03

Applicant: MPI CORPORATION

Inventor： ANDREJ RUMIANTSEV ,  Ching-Ling PAI ,  LIN-LIN CHIH

IPC: G01R31/28 ,  G01R1/073 ,  G01R35/00

Abstract: To determine whether the current temperature of a probe assembly is stable for the calibration at the auxiliary site, a wafer probe station verifies a measured air standard dataset with a predetermined signal range or verifying an estimated measurement time range with a predetermined time window. To determine whether adjusting the current temperature of a probe assembly at the wafer site is necessary, a wafer probe station verifies a measured air standard dataset with a predetermined signal range or verifying an estimated measurement time range with a predetermined time window. To determine whether the current temperature of a probe assembly is ready for testing a semiconductor device, a wafer probe station verifies a measured air standard dataset with a predetermined signal range.