公开(公告)号：US20250044346A1

公开(公告)日：2025-02-06

申请号：US18762988

申请日：2024-07-03

Applicant: MPI CORPORATION

Inventor： ANDREJ RUMIANTSEV ,  Ching-Ling PAI ,  LIN-LIN CHIH

IPC: G01R31/28 ,  G01R35/00

Abstract: To determine whether the current temperature of a probe assembly is stable for the calibration at the auxiliary site, a wafer probe station verifies a measured air standard dataset with a predetermined signal range or verifying an estimated measurement time range with a predetermined time window. To determine whether adjusting the current temperature of a probe assembly at the wafer site is necessary, a wafer probe station verifies a measured air standard dataset with a predetermined signal range or verifying an estimated measurement time range with a predetermined time window. To determine whether the current temperature of a probe assembly is ready for testing a semiconductor device, a wafer probe station verifies a measured air standard dataset with a predetermined signal range.

公开(公告)号：US20250044349A1

公开(公告)日：2025-02-06

申请号：US18762919

申请日：2024-07-03

Applicant: MPI CORPORATION

Inventor： ANDREJ RUMIANTSEV ,  Ching-Ling PAI ,  LIN-LIN CHIH

IPC: G01R31/28 ,  G01R1/073 ,  G01R35/00

Abstract: To determine whether the current temperature of a probe assembly is stable for the calibration at the auxiliary site, a wafer probe station verifies a measured air standard dataset with a predetermined signal range or verifying an estimated measurement time range with a predetermined time window. To determine whether adjusting the current temperature of a probe assembly at the wafer site is necessary, a wafer probe station verifies a measured air standard dataset with a predetermined signal range or verifying an estimated measurement time range with a predetermined time window. To determine whether the current temperature of a probe assembly is ready for testing a semiconductor device, a wafer probe station verifies a measured air standard dataset with a predetermined signal range.

公开(公告)号：US20250044350A1

公开(公告)日：2025-02-06

申请号：US18781351

申请日：2024-07-23

Applicant: MPI CORPORATION

Inventor： Andrej Rumiantsev ,  Lin-Lin CHIH ,  Ching-Ling PAI

IPC: G01R31/28 ,  G01R1/067 ,  H01L23/544

Abstract: A method of determining probing parameters for a probe system to test a DUT includes defining a SD-OD relation dataset according to the probe type of the probing assembly of the probe system and the contact pad type of the DUT, and providing the controller a skate distance value, for which the probe tip is set to skate after contacting the contact pad, or an overdrive value, for which the probing assembly and the DUT are set to be relatively moved after the probe tip contacts the contact pad, and a probe target position or a present probe position, to obtain both the skate distance value and the overdrive value and a position for positioning the probing assembly and the DUT to each other, thereby conveniently and quickly obtaining the required probing parameters for operating the probe system to test the DUT for great and consistent testing performance.