公开(公告)号：US20190326087A1

公开(公告)日：2019-10-24

申请号：US16451571

申请日：2019-06-25

Applicant: Matsusada Precision, Inc.

Inventor： Kazuya Kumamoto ,  Sadayoshi Matsuda

IPC: H01J37/21 ,  H01J37/28 ,  H01J37/244 ,  H01J37/141 ,  H01J37/20

Abstract: A charged particle beam device includes: a charged particle source; an acceleration electric power source connected to the charged particle source for accelerating a charged particle beam emitted by the acceleration electric power source; and an objective lens for focusing the charged particle beam onto a sample, the objective lens including: a central magnetic pole having a central axis coinciding with an ideal optical axis of the charged particle beam; an upper magnetic pole; a cylindrical side-surface magnetic pole; and a disk-shaped lower magnetic pole, the central magnetic pole having an upper portion on a side of the sample and a column-shaped lower portion, the upper magnetic pole having a circular opening at a center thereof and being in a shape of a disk that is tapered to a center thereof and that is thinner at a position closer to a center of gravity of the central magnetic pole.

公开(公告)号：US20190103247A1

公开(公告)日：2019-04-04

申请号：US16165396

申请日：2018-10-19

Applicant: Matsusada Precision, Inc.

Inventor： Kazuya Kumamoto ,  Sadayoshi Matsuda

IPC: H01J37/21 ,  H01J37/28 ,  H01J37/20 ,  H01J37/244 ,  H01J37/141

CPC classification number: H01J37/21 ,  H01J37/141 ,  H01J37/20 ,  H01J37/244 ,  H01J37/28

Abstract: A charged particle beam device includes: a charged particle source an acceleration electric power source connected to the charged particle source for accelerating a charged particle beam emitted by the acceleration electric power source; and an objective lens for focusing the charged particle beam onto a sample, the objective lens including: a central magnetic pole having a central axis coinciding with an ideal optical axis of the charged particle beam; an upper magnetic pole; a cylindrical side-surface magnetic pole; and a disk-shaped lower magnetic pole, the central magnetic pole having an upper portion on a side of the sample and a column-shaped lower portion, the upper magnetic pole having a circular opening at a center thereof and being in a shape of a disk that is tapered to a center thereof and that is thinner at a position closer to a center of gravity of the central magnetic pole.

公开(公告)号：US10153129B2

公开(公告)日：2018-12-11

申请号：US15547219

申请日：2015-12-03

Applicant: Matsusada Precision, Inc.

Inventor： Kazuya Kumamoto ,  Sadayoshi Matsuda

IPC: H01J37/21 ,  H01J37/141 ,  H01J37/20 ,  H01J37/28 ,  H01J37/244

Abstract: A charged particle beam device includes: a charged particle source; an acceleration electric power source connected to the charged particle source for accelerating a charged particle beam emitted by the acceleration electric power source; and an objective lens for focusing the charged particle beam onto a sample, the objective lens including: a central magnetic pole having a central axis coinciding with an ideal optical axis of the charged particle beam; an upper magnetic pole; a cylindrical side-surface magnetic pole; and a disk-shaped lower magnetic pole, the central magnetic pole having an upper portion on a side of the sample and a column-shaped lower portion, the upper magnetic pole having a circular opening at a center thereof and being in a shape of a disk that is tapered to a center thereof and that is thinner at a position closer to a center of gravity of the central magnetic pole.

公开(公告)号：US20180033588A1

公开(公告)日：2018-02-01

申请号：US15547219

申请日：2015-12-03

Applicant: Matsusada Precision, Inc.

Inventor： Kazuya Kumamoto ,  Sadayoshi Matsuda

IPC: H01J37/21 ,  H01J37/244 ,  H01J37/141 ,  H01J37/28 ,  H01J37/20

CPC classification number: H01J37/21 ,  H01J37/141 ,  H01J37/20 ,  H01J37/244 ,  H01J37/28

Abstract: A charged particle beam device includes: a charged particle source; an acceleration electric power source connected to the charged particle source for accelerating a charged particle beam emitted by the acceleration electric power source; and an objective lens for focusing the charged particle beam onto a sample, the objective lens including: a central magnetic pole having a central axis coinciding with an ideal optical axis of the charged particle beam; an upper magnetic pole; a cylindrical side-surface magnetic pole; and a disk-shaped lower magnetic pole, the central magnetic pole having an upper portion on a side of the sample and a column-shaped lower portion, the upper magnetic pole having a circular opening at a center thereof and being in a shape of a disk that is tapered to a center thereof and that is thinner at a position closer to a center of gravity of the central magnetic pole.

公开(公告)号：US10541106B2

公开(公告)日：2020-01-21

申请号：US16451571

申请日：2019-06-25

Applicant: Matsusada Precision, Inc.

Inventor： Kazuya Kumamoto ,  Sadayoshi Matsuda

IPC: H01J37/21 ,  H01J37/28 ,  H01J37/20 ,  H01J37/141 ,  H01J37/244

Abstract: A charged particle beam device includes: a charged particle source; an acceleration electric power source connected to the charged particle source for accelerating a charged particle beam emitted by the acceleration electric power source; and an objective lens for focusing the charged particle beam onto a sample, the objective lens including: a central magnetic pole having a central axis coinciding with an ideal optical axis of the charged particle beam; an upper magnetic pole; a cylindrical side-surface magnetic pole; and a disk-shaped lower magnetic pole, the central magnetic pole having an upper portion on a side of the sample and a column-shaped lower portion, the upper magnetic pole having a circular opening at a center thereof and being in a shape of a disk that is tapered to a center thereof and that is thinner at a position closer to a center of gravity of the central magnetic pole.

公开(公告)号：US10438770B2

公开(公告)日：2019-10-08

申请号：US16165396

申请日：2018-10-19

Applicant: Matsusada Precision, Inc.

Inventor： Kazuya Kumamoto ,  Sadayoshi Matsuda

IPC: H01J37/21 ,  H01J37/141 ,  H01J37/20 ,  H01J37/28 ,  H01J37/244

Abstract: A charged particle beam device includes: a charged particle source; an acceleration electric power source connected to the charged particle source for accelerating a charged particle beam emitted by the acceleration electric power source; and an objective lens for focusing the charged particle beam onto a sample, the objective lens including: a central magnetic pole having a central axis coinciding with an ideal optical axis of the charged particle beam; an upper magnetic pole; a cylindrical side-surface magnetic pole; and a disk-shaped lower magnetic pole, the central magnetic pole having an upper portion on a side of the sample and a column-shaped lower portion, the upper magnetic pole having a circular opening at a center thereof and being in a shape of a disk that is tapered to a center thereof and that is thinner at a position closer to a center of gravity of the central magnetic pole.

公开(公告)号：US20180358199A1

公开(公告)日：2018-12-13

申请号：US15780064

申请日：2016-11-29

Applicant: Matsusada Precision, Inc.

Inventor： Kazuya Kumamoto ,  Sadayoshi Matsuda

IPC: H01J37/10 ,  H01J37/22 ,  H01J37/244 ,  H01J37/28

CPC classification number: H01J37/10 ,  H01J37/141 ,  H01J37/22 ,  H01J37/228 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/2445 ,  H01J2237/24475 ,  H01J2237/2448

Abstract: A charged particle beam device includes: a charged particle source configured to emit a charged particle beam; an acceleration electric power source connected to the charged particle source and configured to accelerate the charged particle beam; a second objective lens configured to focus the charged particle beam onto a sample; and a second detector. The second objective lens is positioned on the opposite side of the sample from where the charged particle beam is incident on the sample. The second detector is configured to receive at least one of: an electromagnetic wave that the sample emits upon receiving the charged particle beam, and an electromagnetic wave that the sample reflects upon receiving the charged particle beam. The second detector carries out a detection of the received electromagnetic wave(s).