公开(公告)号：US20230127466A1

公开(公告)日：2023-04-27

申请号：US17908744

申请日：2021-02-25

Applicant: NATIONAL INSTITUTE FOR MATERIALS SCIENCE

Inventor： Akiko Nakamura ,  Yoshiharu Murase ,  Hideaki Nishikawa ,  Taro Yakabe ,  Naoya Miyauchi

IPC: H01J37/20 ,  H01J37/28 ,  H01J37/26 ,  H01J37/244

Abstract: The device for observing permeation and diffusion path of observation target gas includes: a scanning electron microscope 15; an observation target ion detecting unit 20; an observation target gas supply unit 19; a diaphragm-type sample holder 12, to which the sample is mounted in attachable/detachable state, as a diaphragm dividing between the analysis chamber 11 and the observation target gas pipe 14; and a control unit 50. The control unit acquires a SEM image and at the same time detects the observation target gas, which diffuses within the sample and is discharged to the surface of the sample, by electron stimulated desorption, in a state where stress is applied to the sample due to differential pressure generated between the analysis chamber and the observation target gas pipe by supplying the observation target gas, and obtains an ESD image of the observation target ions.