公开(公告)号：US20230221268A1

公开(公告)日：2023-07-13

申请号：US17928991

申请日：2021-04-28

Applicant: NATIONAL INSTITUTE FOR MATERIALS SCIENCE

Inventor： Akiko Nakamura ,  Yoshiharu Murase ,  Naoya Miyauchi ,  Taro Yakabe

IPC: G01N23/2251 ,  G01N23/2204 ,  G01N1/44

CPC classification number: G01N23/2251 ,  G01N23/2204 ,  G01N1/44

Abstract: The observation device comprises: a scanning electron microscope for detecting secondary electrons generated by irradiating the sample with an electron beam within the analysis chamber; a sample holder having a cell for housing the observation target gas, an open window of the cell, and a sample mounting part to which the sample can be mounted so as to block the open window; and an observation target ion detecting unit for irradiating the front surface of the sample with an electron beam in a state where the observation target gas in the cell contacts the back surface of the sample and detecting observation target ions derived from the observation target gas generated by the electron beam. In a state where the observation target gas is housed in the cell and the sample is mounted to the sample mounting part of the sample holder, the entire hydrogen cell can be sealed.

公开(公告)号：US20230127466A1

公开(公告)日：2023-04-27

申请号：US17908744

申请日：2021-02-25

Applicant: NATIONAL INSTITUTE FOR MATERIALS SCIENCE

Inventor： Akiko Nakamura ,  Yoshiharu Murase ,  Hideaki Nishikawa ,  Taro Yakabe ,  Naoya Miyauchi

IPC: H01J37/20 ,  H01J37/28 ,  H01J37/26 ,  H01J37/244

Abstract: The device for observing permeation and diffusion path of observation target gas includes: a scanning electron microscope 15; an observation target ion detecting unit 20; an observation target gas supply unit 19; a diaphragm-type sample holder 12, to which the sample is mounted in attachable/detachable state, as a diaphragm dividing between the analysis chamber 11 and the observation target gas pipe 14; and a control unit 50. The control unit acquires a SEM image and at the same time detects the observation target gas, which diffuses within the sample and is discharged to the surface of the sample, by electron stimulated desorption, in a state where stress is applied to the sample due to differential pressure generated between the analysis chamber and the observation target gas pipe by supplying the observation target gas, and obtains an ESD image of the observation target ions.