公开(公告)号：US20230333032A1

公开(公告)日：2023-10-19

申请号：US18028862

申请日：2021-08-19

Applicant: NATIONAL INSTITUTE FOR MATERIALS SCIENCE

Inventor： Akiko Nakamura ,  Taro Yakabe ,  Naoya Miyauchi

IPC: G01N23/2204 ,  G01N23/2251 ,  G01N23/2202 ,  H01J37/20

CPC classification number: G01N23/2204 ,  G01N23/2251 ,  G01N23/2202 ,  H01J37/20 ,  H01J2237/2002

Abstract: The sample holder 30 comprises: a holder body 31 for holding the sample 17; an electrolyte introduction chamber 31b provided with an opening 31c that opens to a measurement region 17a of the sample; a retainer plate 33, which is provided with a through-hole 33a corresponding to the measurement region of the sample, for retaining the sample from the electron source side around the through-hole to sandwich the sample airtightly with the holder body; double sealing members 32 arranged between the surface of the holder body and the sample so as to surround the periphery of the measurement region of the sample; a differential exhaust pipe 35, which opens to a space between the sealing members on the surface of the holder body, for exhaust the space through the opening; and electrodes 19 for electrolysis made up of a bias application electrode 19a and an opposing electrode 36.

公开(公告)号：US20230221268A1

公开(公告)日：2023-07-13

申请号：US17928991

申请日：2021-04-28

Applicant: NATIONAL INSTITUTE FOR MATERIALS SCIENCE

Inventor： Akiko Nakamura ,  Yoshiharu Murase ,  Naoya Miyauchi ,  Taro Yakabe

IPC: G01N23/2251 ,  G01N23/2204 ,  G01N1/44

CPC classification number: G01N23/2251 ,  G01N23/2204 ,  G01N1/44

Abstract: The observation device comprises: a scanning electron microscope for detecting secondary electrons generated by irradiating the sample with an electron beam within the analysis chamber; a sample holder having a cell for housing the observation target gas, an open window of the cell, and a sample mounting part to which the sample can be mounted so as to block the open window; and an observation target ion detecting unit for irradiating the front surface of the sample with an electron beam in a state where the observation target gas in the cell contacts the back surface of the sample and detecting observation target ions derived from the observation target gas generated by the electron beam. In a state where the observation target gas is housed in the cell and the sample is mounted to the sample mounting part of the sample holder, the entire hydrogen cell can be sealed.

公开(公告)号：US20230127466A1

公开(公告)日：2023-04-27

申请号：US17908744

申请日：2021-02-25

Applicant: NATIONAL INSTITUTE FOR MATERIALS SCIENCE

Inventor： Akiko Nakamura ,  Yoshiharu Murase ,  Hideaki Nishikawa ,  Taro Yakabe ,  Naoya Miyauchi

IPC: H01J37/20 ,  H01J37/28 ,  H01J37/26 ,  H01J37/244

Abstract: The device for observing permeation and diffusion path of observation target gas includes: a scanning electron microscope 15; an observation target ion detecting unit 20; an observation target gas supply unit 19; a diaphragm-type sample holder 12, to which the sample is mounted in attachable/detachable state, as a diaphragm dividing between the analysis chamber 11 and the observation target gas pipe 14; and a control unit 50. The control unit acquires a SEM image and at the same time detects the observation target gas, which diffuses within the sample and is discharged to the surface of the sample, by electron stimulated desorption, in a state where stress is applied to the sample due to differential pressure generated between the analysis chamber and the observation target gas pipe by supplying the observation target gas, and obtains an ESD image of the observation target ions.