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公开(公告)号:US20170317281A1
公开(公告)日:2017-11-02
申请号:US15213583
申请日:2016-07-19
Applicant: NATIONAL SUN YAT-SEN UNIVERSITY
Inventor: Ting-Chang Chang , Kuan-Chang Chang , Tsung-Ming Tsai , Chih-Cheng Shih , Chih-Hung Pan
IPC: H01L45/00
Abstract: A resistive random access memory overcomes the low durability of the conventional resistive random access memory. The resistive random access memory includes a first electrode, a second electrode, an enclosing layer and an oxygen-containing resistance changing layer. The first and second electrodes are separate from each other. The enclosing layer forms a first via-hole. The oxygen-containing resistance changing layer is arranged for the first via-hole. The first and second electrodes and the enclosing layer jointly enclose the oxygen-containing resistance changing layer. Each of the first electrode, the second electrode and the enclosing layer is made of an element not containing oxygen.
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公开(公告)号:US09711720B2
公开(公告)日:2017-07-18
申请号:US14734809
申请日:2015-06-09
Applicant: NATIONAL SUN YAT-SEN UNIVERSITY
Inventor: Ting-Chang Chang , Kuan-Chang Chang , Tsung-Ming Tsai , Tian-Jian Chu , Chih-Hung Pan
IPC: H01L45/00
CPC classification number: H01L45/1253 , H01L45/08 , H01L45/1233 , H01L45/145 , H01L45/146
Abstract: A resistive random access memory including a first electrode, a separating medium, a resistance changing layer and a second electrode is disclosed. The first electrode has a mounting face. The separating medium is arranged on the first electrode and forms a through hole. A part of the first electrode is not covered by the separating medium. The separating medium has a first dielectric. The resistance changing layer extends along the part of the first electrode as well as along an inner face and the second face of the separating medium. The resistance changing layer has a second dielectric having a dielectric constant larger than a dielectric constant of the first dielectric by 2 or less. The second electrode is arranged on the resistance changing layer. In this arrangement, the problem of unstable forming voltage of the conventional resistive random access memory can be solved.
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公开(公告)号:US20190341267A1
公开(公告)日:2019-11-07
申请号:US16511396
申请日:2019-07-15
Applicant: NATIONAL SUN YAT-SEN UNIVERSITY
Inventor: Ting-Chang Chang , Kuan-Chang Chang , Chih-Cheng Shih , Chih-Hung Pan
IPC: H01L21/322 , H01L21/26
Abstract: A method for reducing defects of an electronic component using a supercritical fluid includes recrystallizing and rearranging grains in the electronic component by introducing the supercritical fluid doped with H2S together with an electromagnetic wave into a cavity. The cavity has a temperature above a critical temperature of the supercritical fluid and a pressure above a critical pressure of the supercritical fluid.
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公开(公告)号:US09853214B2
公开(公告)日:2017-12-26
申请号:US15393983
申请日:2016-12-29
Applicant: NATIONAL SUN YAT-SEN UNIVERSITY
Inventor: Ting-Chang Chang , Kuan-Chang Chang , Tsung-Ming Tsai , Tian-Jian Chu , Chih-Hung Pan
IPC: H01L45/00
CPC classification number: H01L45/1253 , H01L45/08 , H01L45/1233 , H01L45/145 , H01L45/146
Abstract: A resistive random access memory includes a first electrode, a separating medium, a resistance changing layer and a second electrode. The first electrode has a mounting face. The separating medium has a first face in contact with the mounting face, a second face opposite to the first face, and an inner face extending between the first and second faces. The separating medium forms a through hole extending from the first to second face. A part of the mounting face is not covered by the separating medium. The separating medium has a first dielectric. The resistance changing layer extends along the part of the mounting face as well as the inner and second faces. The resistance changing layer has a second dielectric having a dielectric constant larger than a dielectric constant of the first dielectric by 2 or less. The second electrode is arranged on the resistance changing layer.
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公开(公告)号:US20170025607A1
公开(公告)日:2017-01-26
申请号:US15288418
申请日:2016-10-07
Applicant: NATIONAL SUN YAT-SEN UNIVERSITY
Inventor: Ting-Chang Chang , Kuan-Chang Chang , Tsung-Ming Tsai , Tian-Jian Chu , Chih-Hung Pan
IPC: H01L45/00
CPC classification number: H01L45/1625 , H01L21/02266 , H01L45/08 , H01L45/1233 , H01L45/1253 , H01L45/14 , H01L45/145 , H01L45/146 , H01L45/147 , H01L45/1641
Abstract: A method for producing a resistive random access memory includes preparing a first metal layer and sputtering a resistive switching layer on the first metal layer. Surface treatment is conducted on the resistive switching layer by using a plasma containing mobile ions to dope the mobile ions into the resistive switching layer. The polarity of the mobile ions is opposite to the polarity of oxygen ions. Then, a second metal layer is sputtered on the resistive switching layer.
Abstract translation: 一种制造电阻式随机存取存储器的方法包括:制备第一金属层,并在第一金属层上溅射电阻式开关层。 通过使用含有可移动离子的等离子体将电离层转移到电阻式开关层中,在电阻式开关层上进行表面处理。 移动离子的极性与氧离子的极性相反。 然后,在电阻式开关层上溅射第二金属层。
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公开(公告)号:US10461252B2
公开(公告)日:2019-10-29
申请号:US15213583
申请日:2016-07-19
Applicant: NATIONAL SUN YAT-SEN UNIVERSITY
Inventor: Ting-Chang Chang , Kuan-Chang Chang , Tsung-Ming Tsai , Chih-Cheng Shih , Chih-Hung Pan
Abstract: A resistive random access memory overcomes the low durability of the conventional resistive random access memory. The resistive random access memory includes a first electrode, a second electrode, an enclosing layer and an oxygen-containing resistance changing layer. The first and second electrodes are separate from each other. The enclosing layer forms a first via-hole. The oxygen-containing resistance changing layer is arranged for the first via-hole. The first and second electrodes and the enclosing layer jointly enclose the oxygen-containing resistance changing layer. Each of the first electrode, the second electrode and the enclosing layer is made of an element not containing oxygen.
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公开(公告)号:US20170346004A1
公开(公告)日:2017-11-30
申请号:US15291117
申请日:2016-10-12
Applicant: NATIONAL SUN YAT-SEN UNIVERSITY
Inventor: Ting-Chang Chang , Kuan-Chang Chang , Tsung-Ming Tsai , Chih-Hung Pan , Po-Hsun Chen
IPC: H01L45/00
CPC classification number: H01L45/1253 , H01L45/14
Abstract: A resistive random access memory overcomes the low reliability of the conventional resistive random access memory. The resistive random access memory includes a resistance changing layer and two electrode layers. The two electrode layers are coupled with the resistance changing layer. Each of the two electrode layers includes a doping area containing a heavy element. In such an arrangement, the above deficiency can be overcome.
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公开(公告)号:US09685610B2
公开(公告)日:2017-06-20
申请号:US15288418
申请日:2016-10-07
Applicant: NATIONAL SUN YAT-SEN UNIVERSITY
Inventor: Ting-Chang Chang , Kuan-Chang Chang , Tsung-Ming Tsai , Tian-Jian Chu , Chih-Hung Pan
CPC classification number: H01L45/1625 , H01L21/02266 , H01L45/08 , H01L45/1233 , H01L45/1253 , H01L45/14 , H01L45/145 , H01L45/146 , H01L45/147 , H01L45/1641
Abstract: A method for producing a resistive random access memory includes preparing a first metal layer and sputtering a resistive switching layer on the first metal layer. Surface treatment is conducted on the resistive switching layer by using a plasma containing mobile ions to dope the mobile ions into the resistive switching layer. The polarity of the mobile ions is opposite to the polarity of oxygen ions. Then, a second metal layer is sputtered on the resistive switching layer.
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公开(公告)号:US20170110658A1
公开(公告)日:2017-04-20
申请号:US15393983
申请日:2016-12-29
Applicant: NATIONAL SUN YAT-SEN UNIVERSITY
Inventor: Ting-Chang Chang , Kuan-Chang Chang , Tsung-Ming Tsai , Tian-Jian Chu , Chih-Hung Pan
IPC: H01L45/00
CPC classification number: H01L45/1253 , H01L45/08 , H01L45/1233 , H01L45/145 , H01L45/146
Abstract: A resistive random access memory includes a first electrode, a separating medium, a resistance changing layer and a second electrode. The first electrode has a mounting face. The separating medium has a first face in contact with the mounting face, a second face opposite to the first face, and an inner face extending between the first and second faces. The separating medium forms a through hole extending from the first to second face. A part of the mounting face is not covered by the separating medium. The separating medium has a first dielectric. The resistance changing layer extends along the part of the mounting face as well as the inner and second faces. The resistance changing layer has a second dielectric having a dielectric constant larger than a dielectric constant of the first dielectric by 2 or less. The second electrode is arranged on the resistance changing layer.
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10.
公开(公告)号:US09287501B1
公开(公告)日:2016-03-15
申请号:US14573905
申请日:2014-12-17
Applicant: NATIONAL SUN YAT-SEN UNIVERSITY
Inventor: Ting-Chang Chang , Kuan-Chang Chang , Tsung-Ming Tsai , Chih-Hung Pan
CPC classification number: H01L45/146 , H01L45/08 , H01L45/1233 , H01L45/1253 , H01L45/145 , H01L45/1625
Abstract: A resistive random access memory includes an oxygen-poor layer disposed on a first electrode layer and formed by indium tin oxide, indium oxide, tin dioxide, or zinc oxide. An insulating layer is disposed on the oxygen-poor layer and is formed by silicon dioxide or hafnium oxide. A second electrode layer is disposed on the insulating layer. A method for producing a resistive random access memory includes preparing a first electrode layer. An oxygen-poor layer is then formed on the first electrode layer. The oxygen-poor layer is formed by indium tin oxide, indium oxide, tin dioxide, or zinc oxide. Next, an insulating layer is formed on the oxygen-poor layer. The insulating layer formed by silicon dioxide or hafnium oxide. A second electrode layer is then formed on the insulating layer.
Abstract translation: 电阻随机存取存储器包括设置在第一电极层上并由氧化铟锡,氧化铟,二氧化锡或氧化锌形成的贫氧层。 绝缘层设置在无氧层上并由二氧化硅或氧化铪形成。 第二电极层设置在绝缘层上。 一种制造电阻随机存取存储器的方法包括制备第一电极层。 然后在第一电极层上形成贫氧层。 氧不良层由氧化铟锡,氧化铟,二氧化锡或氧化锌形成。 接下来,在不透氧层上形成绝缘层。 由二氧化硅或氧化铪形成的绝缘层。 然后在绝缘层上形成第二电极层。
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