公开(公告)号：US09793091B1

公开(公告)日：2017-10-17

申请号：US15195136

申请日：2016-06-28

Applicant: NGR Inc.

Inventor： Hideaki Teshima ,  Kazufumi Kubota ,  Eiji Sato ,  Shigeyuki Sato ,  Kenichiro Kashiwazaki ,  Yuta Uraike

IPC: H01J37/26 ,  H01J37/22 ,  H01J37/28 ,  H01J37/06 ,  H01J37/147 ,  H01J37/244

CPC classification number: H01J37/222 ,  H01J37/06 ,  H01J37/147 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/0216 ,  H01J2237/2448

Abstract: There is disclosed an image generation apparatus which is capable of generating a clear image by reducing vibration of the image. The image generation apparatus includes an electron-optics column having an electron gun, a deflector, a condenser lens, and an objective lens, a displacement detector for detecting a displacement of an XY stage, a stage-position measuring device for specifying a position of the XY stage based on an output signal of the displacement detector, an accelerometer for detecting vibration of the electron-optics column, an acceleration-signal processing device for processing an output signal of the accelerometer, and a deflection-controlling device for controlling operation of the deflector. The deflection-controlling device adds a first vibration signal outputted from the acceleration-signal processing device to a second vibration signal outputted from the stage-position measuring device to generate a deflection correcting signal, and causes the deflector to correct the deflection of a charged-particle beam based on the deflection correcting signal.