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公开(公告)号:US09535308B2
公开(公告)日:2017-01-03
申请号:US14036964
申请日:2013-09-25
Applicant: Oracle International Corporation
Inventor: Guoliang Li , Ashok V. Krishnamoorthy , Xuezhe Zheng , Ying L. Luo , John E. Cunningham
CPC classification number: G02F1/2257 , G02B6/1225 , G02F2001/212 , G02F2202/32
Abstract: A photonic integrated circuit (PIC) is described. This PIC includes a semiconductor-barrier layer-semiconductor diode in an optical waveguide that conveys an optical signal, where the barrier layer is an oxide or a high-k material. Moreover, semiconductor layers in the semiconductor-barrier layer-semiconductor diode may include geometric features (such as a periodic pattern of holes or trenches) that create a lattice-shifted photonic crystal optical waveguide having a group velocity of light that is lower than the group velocity of light in the first semiconductor layer and the second semiconductor layer without the geometric features. The optical waveguide is included in an optical modulator, such as a Mach-Zehnder interferometer (MZI).
Abstract translation: 描述了一种光子集成电路(PIC)。 该PIC包括传输光信号的光波导中的半导体阻挡层 - 半导体二极管,其中阻挡层是氧化物或高k材料。 此外,半导体阻挡层 - 半导体二极管中的半导体层可以包括几何特征(例如空穴或沟槽的周期性图案),其产生具有低于组的光速的光子晶体光子晶体光波导 第一半导体层和第二半导体层中的光的速度没有几何特征。 光波导包括在诸如Mach-Zehnder干涉仪(MZI)的光学调制器中。
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公开(公告)号:US09519163B2
公开(公告)日:2016-12-13
申请号:US14034950
申请日:2013-09-24
Applicant: Oracle International Corporation
Inventor: Xuezhe Zheng , Jin Yao , Guoliang Li , Ying L. Luo , John E. Cunningham , Ashok V. Krishnamoorthy
CPC classification number: G02F1/025 , G02B6/124 , G02B6/24 , G02B6/29395 , G02F2001/0154 , G02F2201/302
Abstract: A photonic integrated circuit (PIC) is described. This PIC includes a grating coupler for surface-normal coupling that has an alternating pattern of grating teeth and grating trenches, where the grating trenches are filled with an electro-optical material. By applying an electric potential to the grating teeth, the index of refraction of the electro-optical material can be modified.
Abstract translation: 描述了一种光子集成电路(PIC)。 该PIC包括用于表面法线耦合的光栅耦合器,其具有光栅齿和光栅沟槽的交替图案,其中光栅沟槽用电光材料填充。 通过对光栅齿施加电位,可以改变电光材料的折射率。
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公开(公告)号:US20130301981A1
公开(公告)日:2013-11-14
申请号:US13890140
申请日:2013-05-08
Applicant: ORACLE INTERNATIONAL CORPORATION
Inventor: Guoliang Li , Xuezhe Zheng , Ashok V. Krishnamoorthy
CPC classification number: G02B6/136 , G02B6/12004 , G02B6/12007 , G02B6/122 , G02B6/125
Abstract: An optical device is described. This optical device includes multiple components, such as a ring resonator, an optical waveguide and a grating coupler, having a common etch depth (which is associated with a single etch step or operation during fabrication). Moreover, these components may be implemented in a semiconductor layer in a silicon-on-insulator technology. By using a common etch depth, the optical device may provide: compact active devices, multimode ultralow-loss optical waveguides, high-speed ring resonator modulators with ultralow power consumption, and compact low-loss interlayer couplers for multilayer-routed optical links. Furthermore, the single etch step may help reduce or eliminate optical transition loss, and thus may facilitate high yield and low manufacturing costs.
Abstract translation: 描述光学装置。 该光学器件包括具有公共蚀刻深度(其与单个蚀刻步骤或制造期间的操作相关联)的多个部件,例如环形谐振器,光学波导和光栅耦合器。 此外,这些组件可以在绝缘体上硅技术中的半导体层中实现。 通过使用普通的蚀刻深度,光学器件可以提供:紧凑的有源器件,多模超低损耗光波导,具有超低功耗的高速环形谐振器调制器和用于多层路由光链路的紧凑型低损耗层间耦合器。 此外,单个蚀刻步骤可以有助于减少或消除光学转变损耗,因此可以促进高产率和低制造成本。
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公开(公告)号:US20190353846A1
公开(公告)日:2019-11-21
申请号:US16522544
申请日:2019-07-25
Inventor: Gary A. Evans , Jerome K. Butler , Jay B. Kirk , Ruo-Hua He , Jin Yao , Guoliang Li , Xuezhe Zheng , Ashok V. Krishnamoorthy
Abstract: The present invention includes an optical waveguide with a grating and a method of making the same for increasing the effectiveness of the grating. In one example, the grating is at least partially covered by a liner layer disposed on at least a portion of a grating; and a cover layer disposed on the liner layer, wherein a first material selected for the core and ridges and a second material selected for the liner layer are selected to provide a difference in the index of refraction between the first and second material that is sufficient to provide a contrast therebetween.
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公开(公告)号:US10371898B2
公开(公告)日:2019-08-06
申请号:US14479039
申请日:2014-09-05
Inventor: Gary A. Evans , Jerome K. Butler , Jay B. Kirk , Ruo-Hua He , Jin Yao , Guoliang Li , Xuezhe Zheng , Ashok V. Krishnamoorthy
IPC: G02B6/34 , G02B6/132 , G02B6/136 , G02B6/036 , G02B6/12 , G02B6/122 , H01S3/063 , H01S5/12 , H01S5/125 , H01S5/187
Abstract: The present invention includes an optical waveguide with a grating and a method of making the same for increasing the effectiveness of the grating. In one example, the grating is at least partially covered by a liner layer disposed on at least a portion of a grating; and a cover layer disposed on the liner layer, wherein a first material selected for the core and ridges and a second material selected for the liner layer are selected to provide a difference in the index of refraction between the first and second material that is sufficient to provide a contrast therebetween.
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公开(公告)号:US09310562B2
公开(公告)日:2016-04-12
申请号:US14203876
申请日:2014-03-11
Applicant: Oracle International Corporation
Inventor: Xuezhe Zheng , Guoliang Li , Ying L. Luo , Ashok V. Krishnamoorthy
CPC classification number: G02B6/29341 , G02B6/2852 , G02F1/3132 , H04J14/00
Abstract: In an optical device, a ring resonator, having a resonance wavelength, optically couples an optical signal that includes a wavelength from an input optical waveguide to an output optical waveguide. A monitoring mechanism in the optical device, which is optically coupled to the output optical waveguide, monitors an output optical signal on the output optical waveguide. For example, the monitoring mechanism may dither a temperature of the ring resonator at a frequency using a heater, and the output optical signal may be monitored by determining amplitude and phase information of the output optical signal at the frequency and twice the frequency. Moreover, control logic in the optical device adjusts the resonance wavelength based on the monitored output optical signal, where the adjustment is made without monitoring an input optical signal on the input optical waveguide.
Abstract translation: 在光学装置中,具有谐振波长的环形谐振器将包括来自输入光波导的波长的光信号光耦合到输出光波导。 光学装置中的光耦合到输出光波导的监视机构监视输出光波导上的输出光信号。 例如,监视机构可以使用加热器将环形谐振器的温度以一定的频率进行抖动,并且可以通过确定频率和频率两倍的输出光信号的幅度和相位信息来监视输出光信号。 此外,光学装置中的控制逻辑基于所监视的输出光信号来调节谐振波长,其中在不监视输入光波导上的输入光信号的情况下进行调整。
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公开(公告)号:US09250403B2
公开(公告)日:2016-02-02
申请号:US14047910
申请日:2013-10-07
Applicant: Oracle International Corporation
Inventor: Hiren D. Thacker , Frankie Y. Liu , Robert David Hopkins, II , Jon Lexau , Xuezhe Zheng , Guoliang Li , Ivan Shubin , Ronald Ho , John E. Cunningham , Ashok V. Krishnamoorthy
IPC: G02B6/12 , G02B6/42 , H01L25/065 , H01L23/00 , H05K3/36
CPC classification number: G02B6/4274 , H01L24/13 , H01L24/14 , H01L24/16 , H01L24/32 , H01L24/72 , H01L24/73 , H01L24/81 , H01L24/92 , H01L25/0652 , H01L25/0655 , H01L2224/0401 , H01L2224/13147 , H01L2224/1403 , H01L2224/16145 , H01L2224/16225 , H01L2224/32225 , H01L2224/72 , H01L2224/73204 , H01L2224/73253 , H01L2224/81203 , H01L2224/81815 , H01L2224/92125 , H01L2225/06513 , H01L2225/06517 , H01L2225/06534 , H01L2225/06589 , H01L2924/14 , H01L2924/15192 , H01L2924/15311 , H01L2924/157 , H01L2924/15787 , H01L2924/15788 , H01L2924/37001 , H05K3/36 , H05K2201/10484 , H01L2924/00
Abstract: A chip package includes an optical integrated circuit (such as a hybrid integrated circuit) and an integrated circuit that are adjacent to each in the chip package. The integrated circuit includes electrical circuits, such as memory or a processor, and the optical integrated circuit communicates optical signals with very high bandwidth. Moreover, a front surface of the integrated circuit is electrically coupled to a front surface of the optical integrated circuit by a top surface of the interposer, where the top surface faces the front surface of the integrated circuit and the front surface of the optical integrated circuit. Furthermore, the integrated circuit and the optical integrated circuit may be on a same side of the interposer. By integrating the optical integrated circuit and the integrated circuit in close proximity, the chip package may facilitate improved performance compared to chip packages with electrical interconnects.
Abstract translation: 芯片封装包括与芯片封装中的每一个相邻的光学集成电路(例如混合集成电路)和集成电路。 集成电路包括诸如存储器或处理器的电路,并且光学集成电路传送具有非常高带宽的光信号。 此外,集成电路的前表面通过插入件的顶表面电耦合到光集成电路的前表面,其中顶表面面向集成电路的前表面和光集成电路的前表面 。 此外,集成电路和光集成电路可以在插入器的同一侧上。 通过将光集成电路和集成电路集成在一起,与具有电互连的芯片封装相比,芯片封装可以有助于提高性能。
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公开(公告)号:US20140268312A1
公开(公告)日:2014-09-18
申请号:US13831541
申请日:2013-03-14
Applicant: ORACLE INTERNATIONAL CORPORATION
Inventor: Xuezhe Zheng , Ashok V. Krishnamoorthy , Ivan Shubin , John E. Cunningham , Guoliang Li , Ying L. Luo
IPC: H01S5/14
CPC classification number: H01S5/1028 , H01S5/02252 , H01S5/1025 , H01S5/141 , H01S5/142 , H01S5/18 , H01S5/4087
Abstract: A hybrid optical source that provides an optical signal having a wavelength is described. This hybrid optical source includes an edge-coupled optical amplifier (such as a III-V semiconductor optical amplifier) aligned to a semiconductor reflector (such as an etched silicon mirror). The semiconductor reflector efficiently couples (i.e., with low optical loss) light out of the optical amplifier in a direction approximately perpendicular to a plane of the optical amplifier. A corresponding optical coupler (such as a diffraction grating or a mirror) fabricated on a silicon-on-insulator chip efficiently couples the light into a sub-micron silicon-on-insulator optical waveguide. The silicon-on-insulator optical waveguide couples the light to additional photonic elements (including a reflector) to complete the hybrid optical source.
Abstract translation: 描述了提供具有波长的光信号的混合光源。 该混合光源包括与半导体反射器(例如蚀刻硅镜)对准的边缘耦合光放大器(例如III-V半导体光放大器)。 半导体反射器在大致垂直于光放大器的平面的方向上有效地耦合(即,具有低光损耗)的光从光放大器中出射。 制造在绝缘体上硅芯片上的对应的光耦合器(例如衍射光栅或反射镜)有效地将光耦合到亚微米上绝缘体上的光波导中。 绝缘体上的光波导将光耦合到附加的光子元件(包括反射器)以完成混合光源。
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公开(公告)号:US09735542B2
公开(公告)日:2017-08-15
申请号:US14062624
申请日:2013-10-24
Applicant: Oracle International Corporation
Inventor: Guoliang Li , Ashok V. Krishnamoorthy , Xuezhe Zheng , Ying Luo
IPC: H01S5/00 , H01S3/10 , H01S3/083 , H01S5/14 , H01S5/10 , H01S5/02 , H01S5/026 , H01S5/028 , H01S5/12
CPC classification number: H01S5/142 , H01S5/021 , H01S5/0261 , H01S5/0265 , H01S5/0287 , H01S5/1032 , H01S5/12
Abstract: An optical source is described. This optical source includes a semiconductor optical amplifier, with a semiconductor other than silicon, which provides a gain medium. In addition, a photonic chip, optically coupled to the semiconductor optical amplifier, includes: an optical waveguide that conveys the optical signal; and a pair of ring-resonator modulators that modulate the optical signal. Furthermore, the pair of ring-resonator modulators is included within an optical cavity in the optical source. For example, the optical cavity may be defined by a reflective coating on one edge of the semiconductor optical amplifier and a reflector on one end of the optical waveguide. Alternatively, the optical cavity may be defined by reflectors on ends of the optical waveguide.
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公开(公告)号:US09618709B2
公开(公告)日:2017-04-11
申请号:US14060136
申请日:2013-10-22
Applicant: Oracle International Corporation
Inventor: Xuezhe Zheng , Ivan Shubin , Ying Luo , Guoliang Li , Ashok V. Krishnamoorthy
CPC classification number: G02B6/4224 , G02B6/00 , G02B6/14
Abstract: A technique for fabricating a hybrid optical source is described. During this fabrication technique, a III-V compound-semiconductor active gain medium is integrated with a silicon-on-insulator (SOI) chip (or wafer) using edge coupling to form a co-planar hybrid optical source. Using a backside etch-assisted cleaving technique, and a temporary transparent substrate with alignment markers, a III-V compound-semiconductor chip with proper edge polish and coating can be integrated with a processed SOI chip (or wafer) with accurate alignment. This fabrication technique may significantly reduce the alignment complexity when fabricating the hybrid optical source, and may enable wafer-scale integration.
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