公开(公告)号：US20160049579A1

公开(公告)日：2016-02-18

申请号：US14827902

申请日：2015-08-17

Applicant: Akira SHIMOFUKU ,  Atsushi TAKEUCHI ,  Osamu MACHIDA

Inventor： Akira SHIMOFUKU ,  Atsushi TAKEUCHI ,  Osamu MACHIDA

IPC: H01L41/332 ,  H01L41/08 ,  H01L41/25 ,  B41J2/14

CPC classification number: H01L41/332 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1629 ,  B41J2/164 ,  B41J2/1645 ,  H01L41/0805 ,  H01L41/1876 ,  H01L41/25 ,  H01L41/318 ,  H01L41/331

Abstract: A method of fabricating an electromechanical transducer film includes applying a precursor solution on a support substrate, heating the substrate at a first temperature to form a ceramic thin-film in amorphous state, applying a sol-gel solution onto the ceramic thin-film, and heating the ceramic thin-film at a second temperature to form an electromechanical transducer thin-film in amorphous state. The method further includes heating the ceramic and transducer thin-films at a third temperature to thermally decompose an organic substance in the sol-gel solution and form a unitary thin-film, processing the unitary thin-film to form a patterned unitary thin-film, modifying an area on which the patterned film is not formed, discharging the sol-gel solution onto a surface of the patterned film by a liquid discharge head to apply the sol-gel solution to the surface of the patterned film, and heating the patterned film at a fourth temperature to crystallize the patterned film.

Abstract translation: 制造机电换能器膜的方法包括将前体溶液施加在支撑基板上，在第一温度下加热基板以形成非晶状态的陶瓷薄膜，将溶胶 - 凝胶溶液施加到陶瓷薄膜上，以及 在第二温度下加热陶瓷薄膜以形成非晶态的机电换能器薄膜。 该方法还包括在第三温度下加热陶瓷和换能器薄膜以热分解溶胶 - 凝胶溶液中的有机物质并形成整体薄膜，处理整体薄膜以形成图案化单一薄膜 对未形成图案化膜的区域进行修饰，通过液体排出头将溶胶 - 凝胶溶液排出到图案化膜的表面上，将溶胶 - 凝胶溶液涂布到图案化膜的表面，并加热图案化膜 膜在第四温度下结晶图案化膜。

公开(公告)号：US20170210132A1

公开(公告)日：2017-07-27

申请号：US15405714

申请日：2017-01-13

Applicant: Osamu MACHIDA ,  Masahiro ISHIMORI ,  Atsushi TAKEUCHI ,  Shuya ABE

Inventor： Osamu MACHIDA ,  Masahiro ISHIMORI ,  Atsushi TAKEUCHI ,  Shuya ABE

IPC: B41J2/14 ,  H01L41/29 ,  H01L41/331 ,  H01L41/08 ,  H01L41/09

CPC classification number: B41J2/14233 ,  B41J2/1612 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1645 ,  B41J2/1646 ,  H01L41/0805 ,  H01L41/098 ,  H01L41/1876 ,  H01L41/29 ,  H01L41/318 ,  H01L41/331

Abstract: An electromechanical transducer element includes a first electrode; an electromechanical transducer film stacked on one surface of the first electrode; a second electrode stacked on the electromechanical transducer film; and wiring formed on the second electrode. In an at least one cross section, each of a boundary, on a second electrode side, of the electromechanical transducer film and a boundary, on a side opposite to the electromechanical transducer film, of the second electrode is a curved shape protruding away from the first electrode. In the at least one cross section, each of a film thickness of the electromechanical transducer film and a film thickness of the second electrode becomes thinner toward end portions from a maximum height portion.

公开(公告)号：US20130050346A1

公开(公告)日：2013-02-28

申请号：US13596128

申请日：2012-08-28

Applicant: Atsushi TAKEUCHI ,  Osamu MACHIDA ,  Ryo TASHIRO ,  Masahiro YAGI ,  Dongsik JANG ,  Yoshinori BANDOH

Inventor： Atsushi TAKEUCHI ,  Osamu MACHIDA ,  Ryo TASHIRO ,  Masahiro YAGI ,  Dongsik JANG ,  Yoshinori BANDOH

IPC: B41J2/04 ,  B05D5/12 ,  H02N11/00

CPC classification number: B41J2/14233 ,  B41J2/1714 ,  B41J2/185

Abstract: An applying liquid is applied to a first electrode by ejecting from a nozzle the applying liquid including a raw material for forming an elecromechanical transducer film, and a film of the applying liquid applied onto the first electrode is dried. The dried film is thermally decomposed and crystallized. At this time, a voltage is applied to an accompanying droplet collecting electrode for collecting a small accompanying droplet accompanying a chief droplet. The accompanying droplet is electrostatically attracted and collected by the accompanying droplet collecting electrode before reaching the first electrode. At this time, the voltage is applied to the accompanying droplet collecting electrode by the voltage applying part after a predetermined period of time has elapsed from when a droplet of the applying liquid has been ejected from the nozzle.

Abstract translation: 通过从喷嘴喷射包括用于形成机电换能器膜的原料的涂布液并将施加在第一电极上的涂布液的膜干燥，将涂布液施加到第一电极。 干燥的膜被热分解并结晶。 此时，将电压施加到伴随的液滴收集电极，用于收集伴随主液滴的小附带液滴。 附着的液滴在到达第一电极之前由附带的液滴收集电极静电吸引和收集。 此时，从施加液体的液滴从喷嘴喷射出经过规定时间后，电压施加到伴随的液滴收集电极。

公开(公告)号：US20170306471A1

公开(公告)日：2017-10-26

申请号：US15491354

申请日：2017-04-19

Applicant: Shuya ABE ,  Osamu MACHIDA ,  Masahiro ISHIMORI ,  Takuma HIRABAYASHI

Inventor： Shuya ABE ,  Osamu MACHIDA ,  Masahiro ISHIMORI ,  Takuma HIRABAYASHI

IPC: C23C14/16 ,  B41J2/14 ,  B41J2/16

Abstract: There is provided a method of producing an electromechanical transducer that includes a plurality of electromechanical transducer elements on a substrate. The method includes forming a plurality of individual electrodes corresponding to the plurality of electromechanical transducer elements on the substrate, forming an insulation film to cover the plurality of individual electrodes on the substrate, forming a conductive film on the insulation film, forming a plurality of openings to expose the plurality of individual electrodes in each of the insulation film and the conductive film, and forming a plurality of electromechanical transducer films on the plurality of individual electrodes exposed in the plurality of openings.

公开(公告)号：US20120306545A1

公开(公告)日：2012-12-06

申请号：US13482384

申请日：2012-05-29

Applicant: Osamu MACHIDA ,  Shinji Sato

Inventor： Osamu MACHIDA ,  Shinji Sato

IPC: H03K3/00

CPC classification number: H02M3/1588 ,  H02M1/08 ,  Y02B70/1466

Abstract: A gate driver turns on/off a switching element Q1 by applying a control signal from a controller to a gate of the switching element. The switching element has the gate, a drain, and a source and contains a wide-bandgap semiconductor. The gate driver includes a parallel circuit that includes a first capacitor C1 and a first resistor R1 and is connected between the controller and the gate of the switching element and a short-circuit unit S4 that is connected between the gate and source of the switching element and short-circuits the gate and source of the switching element after a delay from an OFF pulse of the control signal.

Abstract translation: 栅极驱动器通过将来自控制器的控制信号施加到开关元件的栅极来打开/关闭开关元件Q1。 开关元件具有栅极，漏极和源极，并且包含宽带隙半导体。 栅极驱动器包括并联电路，其包括第一电容器C1和第一电阻器R1，并且连接在控制器和开关元件的栅极之间，并且连接在开关元件的栅极和源极之间的短路单元S4 并且在从控制信号的OFF脉冲延迟之后使开关元件的栅极和源极短路。

公开(公告)号：US20120236084A1

公开(公告)日：2012-09-20

申请号：US13416055

申请日：2012-03-09

Applicant: Yasuhiro WATANABE ,  Osamu MACHIDA ,  Akira SHIMOFUKU ,  Ryoh TASHIRO

Inventor： Yasuhiro WATANABE ,  Osamu MACHIDA ,  Akira SHIMOFUKU ,  Ryoh TASHIRO

IPC: B41J2/045 ,  H01L41/22 ,  H01L41/047

CPC classification number: B41J2/14233 ,  H01L41/0973 ,  H01L41/317 ,  H01L41/33

Abstract: Disclosed is a method of producing a piezoelectric actuator including a first electrode film forming process; a monomolecular film forming process; a pattering process of removing a monomolecular film having a rectangular shape; an application process of applying a precursor solution to the first electrode film exposed in the rectangular shape; a piezoelectric film forming process of converting the applied precursor solution into a piezoelectric film; and a second electrode film forming process. Materials of the precursor solution, the first electrode film, and the monomolecular film are adjusted so that the first electrode film is lyophilic and the monomolecular film is lyophobic to the precursor solution. The piezoelectric film forming process includes a drying and thermally decomposing process of drying and thermally decomposing the precursor solution; and a crystallizing process of crystallizing a thermally decomposed piezoelectric material.

Abstract translation: 公开了一种制造包括第一电极膜形成工艺的压电致动器的方法; 单分子成膜工艺; 去除具有矩形形状的单分子膜的图案化方法; 将前体溶液施加到以矩形形状暴露的第一电极膜的施加方法; 将所施加的前体溶液转化成压电膜的压电膜形成方法; 和第二电极膜形成工艺。 调节前体溶液，第一电极膜和单分子膜的材料，使得第一电极膜是亲液性的，并且单分子膜与前体溶液疏液。 压电薄膜形成方法包括干燥和热分解前体溶液的热分解过程; 以及结晶热分解压电材料的结晶过程。

公开(公告)号：US20110233615A1

公开(公告)日：2011-09-29

申请号：US13042519

申请日：2011-03-08

Applicant: Osamu MACHIDA

Inventor： Osamu MACHIDA

IPC: H01L29/778

CPC classification number: H01L29/7787 ,  H01L29/2003 ,  H01L29/7391 ,  H01L29/872

Abstract: To provide a semiconductor device in which a rectifying element capable of reducing a leak current in reverse bias when a high voltage is applied and reducing a forward voltage drop Vf and a transistor element are integrally formed on a single substrate.A semiconductor device has a transistor element and a rectifying element on a single substrate. The transistor element has an active layer formed on the substrate and three electrodes (source electrode, drain electrode, and gate electrode) disposed on the active layer. The rectifying element has an anode electrode disposed on the active layer, a cathode electrode which is the drain electrode, and a first auxiliary electrode between the anode electrode and cathode electrode.

Abstract translation: 提供一种半导体器件，其中，当施加高电压时能够减小反向偏压中的漏电流并且减小正向压降Vf和晶体管元件的整流元件整体形成在单个衬底上。 半导体器件在单个衬底上具有晶体管元件和整流元件。 晶体管元件具有形成在基板上的有源层和设置在有源层上的三个电极（源电极，漏电极和栅电极）。 整流元件具有设置在有源层上的阳极电极，作为漏电极的阴极电极和位于阳极电极和阴极电极之间的第一辅助电极。

公开(公告)号：US20160221033A1

公开(公告)日：2016-08-04

申请号：US15094256

申请日：2016-04-08

Applicant: Yoshikazu AKIYAMA ,  Akira SHIMOFUKU ,  Atsushi TAKEUCHI ,  Osamu MACHIDA

Inventor： Yoshikazu AKIYAMA ,  Akira SHIMOFUKU ,  Atsushi TAKEUCHI ,  Osamu MACHIDA

IPC: B05D1/32 ,  H01L21/02 ,  H01L41/317 ,  H01L49/02 ,  B05D1/02 ,  B05D3/00

CPC classification number: B05D1/322 ,  B05D1/02 ,  B05D3/007 ,  H01L21/02623 ,  H01L27/11568 ,  H01L27/20 ,  H01L28/40 ,  H01L41/0973 ,  H01L41/113 ,  H01L41/1132 ,  H01L41/1876 ,  H01L41/317 ,  H01L41/319 ,  H01L41/332 ,  H05K1/16 ,  H05K3/1241

Abstract: An electronic device includes a substrate; and a plurality of thin-film elements formed on the substrate. Further, the thin-film element includes a thin-film section having a function selected from a group including piezoelectric effect, inverse piezoelectric effect, charge storage, semiconductivity, and conductivity, and the plurality of thin-film elements includes the thin-film sections having two or more different functions.

Abstract translation: 电子装置包括：基板; 以及形成在所述基板上的多个薄膜元件。 此外，薄膜元件包括具有选自包括压电效应，反压电效应，电荷存储，半导电性和导电性的组的功能的薄膜部分，并且多个薄膜元件包括薄膜部分 具有两个或多个不同的功能。

公开(公告)号：US20150307403A1

公开(公告)日：2015-10-29

申请号：US14689138

申请日：2015-04-17

Applicant: Atsushi TAKEUCHI ,  Osamu MACHIDA ,  Akira SHIMOFUKU

Inventor： Atsushi TAKEUCHI ,  Osamu MACHIDA ,  Akira SHIMOFUKU

IPC: C04B35/472 ,  G01P15/02 ,  G01C19/5607 ,  C01G25/00 ,  H01L41/08 ,  F04B19/00 ,  F16K99/00 ,  F16K31/02 ,  G02B26/08 ,  H01L41/187

CPC classification number: C04B35/472 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/164 ,  C23C18/1216 ,  C23C18/1254 ,  C23C18/1283 ,  F04B19/006 ,  F04B43/046 ,  F16K99/0015 ,  F16K99/0048 ,  F16K2099/0092 ,  G02B26/0858 ,  H01L41/1876 ,  H01L41/318 ,  H01L41/331

Abstract: A precursor sol-gel solution is provided that has been subjected to a partial hydrolysis process and is used for forming an oxide dielectric film having a perovskite structure represented by the general formula ABO3. The precursor sol-gel solution is subjected to a stabilization process for controlling a viscosity change resulting from the partial hydrolysis process to be less than or equal to 50%, and water contained in the precursor sol-gel solution is controlled to be greater than or equal to 0.50 times and less than or equal to 10 times by molar ratio with respect to a B site atom contained in the precursor sol-gel solution.

Abstract translation: 提供已经进行部分水解处理的前体溶胶 - 凝胶溶液，并用于形成具有由通式ABO 3表示的钙钛矿结构的氧化物电介质膜。 将前体溶胶 - 凝胶溶液进行稳定化处理，以将由部分水解过程产生的粘度变化控制在小于或等于50％，并且将前体溶胶 - 凝胶溶液中包含的水控制为大于或等于 相对于前体溶胶 - 凝胶溶液中所含的B位原子，为摩尔比的0.50倍以上且小于等于10倍。

公开(公告)号：US20140210913A1

公开(公告)日：2014-07-31

申请号：US14243177

申请日：2014-04-02

Applicant: Akira SHIMOFUKU ,  Osamu MACHIDA ,  Ryoh TASHIRO ,  Yasuhiro WATANABE

Inventor： Akira SHIMOFUKU ,  Osamu MACHIDA ,  Ryoh TASHIRO ,  Yasuhiro WATANABE

IPC: B41J2/14 ,  H01L41/047

CPC classification number: B41J2/14201 ,  B41J2/161 ,  B41J2/164 ,  H01L41/047 ,  H01L41/318 ,  H01L41/331

Abstract: Disclosed is an electromechanical transducer film forming method including a surface modification process; an application process; and processes of drying, thermally decomposing, and crystallizing sol-gel solution applied to a portion of a surface of a first electrode. An electromechanical transducer film is formed on a desired pattern area on the surface of the first electrode by repeating the above processes. In the application process, each of dots of the sol-gel solution applied by the inkjet method drops onto both a first area inside the desired pattern area and a second area outside the desired pattern area. The first area is a hydrophilic area on the surface of the first electrode, and the second area is a hydrophobic area on the surface of the first electrode. The hydrophilic area and the hydrophobic area have been modified by the surface modification process.

Abstract translation: 公开了一种包括表面改性工艺的机电换能器成膜方法; 申请流程; 以及施加到第一电极的表面的一部分上的溶胶 - 凝胶溶液的干燥，热分解和结晶过程。 通过重复上述过程，在第一电极的表面上的期望图案区域上形成机电换能器膜。 在涂布过程中，通过喷墨法施加的溶胶 - 凝胶溶液的每个点落在期望图案区域内的第一区域和期望图案区域外的第二区域上。 第一区域是第一电极表面上的亲水区域，第二区域是第一电极表面上的疏水区域。 亲水区域和疏水区域已经通过表面改性过程进行了修饰。