公开(公告)号：US20190295816A1

公开(公告)日：2019-09-26

申请号：US16360812

申请日：2019-03-21

Applicant: RIKEN

Inventor： Yoh IWASAKI ,  Ken HARADA ,  Keiko SHIMADA

IPC: H01J37/26 ,  H01J37/141 ,  H01J37/147

Abstract: An interference optical system unit includes at least one electromagnetic lens that forms an image of a charged particle beam, at least one charged particle beam biprism, and a support member for the electromagnetic lens and the charged particle beam biprism. The electromagnetic lens, the charged particle beam biprism, the support member, and a space to an image plane of the electromagnetic lens are integrally configured as one unit. The interference optical system unit is disposed to have an optical axis coaxialized with an optical axis of an imaging optical system of an upstream stage that is disposed on an upstream side of the unit in a flow direction of the charged particle beam. A focal length of the electromagnetic lens and a deflection angle of the charged particle beam given by the charged particle beam biprism are controlled to generate an interference fringe of the charged particle beam on the image plane of the electromagnetic lens.

公开(公告)号：US20190196070A1

公开(公告)日：2019-06-27

申请号：US16094839

申请日：2017-04-06

Applicant: RIKEN

Inventor： Ken HARADA ,  Keiko SHIMADA ,  Kodai NIITSU

IPC: G02B5/18 ,  H01J37/244 ,  H01J37/20 ,  H01J37/10 ,  H01J37/26

CPC classification number: G02B5/1876 ,  G01N23/04 ,  G02B5/18 ,  H01J37/10 ,  H01J37/20 ,  H01J37/244 ,  H01J37/26 ,  H01J37/295 ,  H01J2237/2482

Abstract: The density difference of particle beam irradiation with two optical statuses is produced utilizing a diffraction effect, within the same field of vision, such that a diffraction grating manufactured with a material which passes through a particle beam is provided on the upper side of a specimen and on the lower side of the irradiation optical system. Further, a region wider than the opening region of the diffraction grating is irradiated with the particle beam to produce the density difference of the particle beam emitted to the specimen , by superposing the particle beam, Bragg-diffracted with the opening region , and the particle beam, transmitted through the outer peripheral part of the opening region without being diffracted, with each other, and emitting the beam to the specimen .