公开(公告)号：US10823753B2

公开(公告)日：2020-11-03

申请号：US16220875

申请日：2018-12-14

Applicant: Rosemount Aerospace Inc.

Inventor： Greg Allen Seidel ,  Mark Sherwood Miller ,  Kimiko Childress ,  Michael Paul Nesnidal

IPC: G01P13/02 ,  G01P5/165 ,  B64D43/00

Abstract: An air data probe includes a probe head, a port within the probe head in fluid communication with external airflow, and a pneumatic pressure sensor mounted within the port.

公开(公告)号：US20160327445A1

公开(公告)日：2016-11-10

申请号：US14707485

申请日：2015-05-08

Applicant: ROSEMOUNT AEROSPACE INC.

Inventor： Weibin Zhang ,  Anita Fink ,  Kimiko Childress ,  Odd Harald Steen Eriksen

IPC: G01L9/00 ,  H01L41/297 ,  H01L41/187 ,  H01L41/332 ,  H01L41/337 ,  H01L41/113 ,  H01L41/27 ,  H01L41/314

CPC classification number: G01L9/008 ,  G01L9/0045 ,  G01L9/08 ,  H01L41/0477 ,  H01L41/081 ,  H01L41/1132 ,  H01L41/1138 ,  H01L41/187 ,  H01L41/27 ,  H01L41/29 ,  H01L41/297 ,  H01L41/314 ,  H01L41/332 ,  H01L41/337

Abstract: A method for forming a pressure sensor includes forming a base of a sapphire material, the base including a cavity formed therein; forming a sapphire membrane on top of the base and over the cavity; forming a lower electrode on top of the membrane; forming a piezoelectric material layer on an upper surface of the lower electrode, the piezoelectric material layer being formed of aluminum nitride (AIN); and forming at least one upper electrode on an upper surface of the piezoelectric material layer.

Abstract translation: 形成压力传感器的方法包括形成蓝宝石材料的基底，所述基底包括形成在其中的空腔; 在基座的顶部和空腔上形成蓝宝石膜; 在膜的顶部形成下电极; 在所述下电极的上表面上形成压电材料层，所述压电材料层由氮化铝（AIN）形成; 以及在所述压电材料层的上表面上形成至少一个上电极。

公开(公告)号：US09835511B2

公开(公告)日：2017-12-05

申请号：US14707485

申请日：2015-05-08

Applicant: ROSEMOUNT AEROSPACE INC.

Inventor： Weibin Zhang ,  Anita Fink ,  Kimiko Childress ,  Odd Harald Steen Eriksen

IPC: G01L9/00 ,  G01L9/08 ,  H01L41/113 ,  H01L41/187 ,  H01L41/314 ,  H01L41/27 ,  H01L41/297 ,  H01L41/332 ,  H01L41/337

CPC classification number: G01L9/008 ,  G01L9/0045 ,  G01L9/08 ,  H01L41/0477 ,  H01L41/081 ,  H01L41/1132 ,  H01L41/1138 ,  H01L41/187 ,  H01L41/27 ,  H01L41/29 ,  H01L41/297 ,  H01L41/314 ,  H01L41/332 ,  H01L41/337

Abstract: A method for forming a pressure sensor includes forming a base of a sapphire material, the base including a cavity formed therein; forming a sapphire membrane on top of the base and over the cavity; forming a lower electrode on top of the membrane; forming a piezoelectric material layer on an upper surface of the lower electrode, the piezoelectric material layer being formed of aluminum nitride (AIN); and forming at least one upper electrode on an upper surface of the piezoelectric material layer.