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    HIGH TEMPERATURE CAPACITIVE PRESSURE SENSOR FABRICATED WITH VIA-FILLED SAPPHIRE WAFERS
    1.
    发明申请
    HIGH TEMPERATURE CAPACITIVE PRESSURE SENSOR FABRICATED WITH VIA-FILLED SAPPHIRE WAFERS 审中-公开

    公开(公告)号：US20200088599A1

    公开(公告)日：2020-03-19

    申请号：US16133944

    申请日：2018-09-18

    Applicant: Rosemount Aerospace Inc.

    Inventor： Weibin Zhang

    IPC: G01L19/00 ,  G01L19/04 ,  G01L9/00

    Abstract: A high temperature capacitive pressure sensor includes a first sapphire wafer having a first exterior wafer surface and a first interior wafer surface, a recess extending into the first sapphire wafer, a second sapphire wafer having a second exterior wafer surface and a second interior wafer surface, a first hole extending through the first sapphire wafer, a second hole extending through the first sapphire wafer or the second sapphire wafer, a first via that solidly fills the first hole, the first via including a first interior via surface aligned with the first interior wafer surface, a second via that solidly fills the second hole, the second via including a second interior via surface aligned with the interior wafer surface of the sapphire wafer within which the second via extends, a first electrode deposited on the first interior wafer surface covering and contacting the first interior via surface.

    Open diaphragm harsh environment pressure sensor
    3.
    发明授权
    Open diaphragm harsh environment pressure sensor 有权

    公开(公告)号：US10101234B2

    公开(公告)日：2018-10-16

    申请号：US15041243

    申请日：2016-02-11

    Applicant: Rosemount Aerospace Inc.

    Inventor： David P. Potasek ,  Charles Little ,  Weibin Zhang

    IPC: G01L9/00 ,  G01L19/06 ,  G01L19/14

    Abstract: A pressure sensor comprising a housing, a diaphragm wafer, and an isolator configured to absorb lateral stress. The diaphragm wafer includes a fully exposed diaphragm, a fluid contact surface, a sensing element, and a support portion, where the support portion and the contact surface define a cavity. The isolator extends laterally from the support portion to the housing. The pressure sensor is easily drainable, eliminating the buildup of particulates, and the diaphragm can be directly wire-bonded to printed circuit boards, eliminating the need for extensive electrical feedthrough.

    Pseudo differential pressure sensing bridge configuration
    4.
    发明授权
    Pseudo differential pressure sensing bridge configuration 有权

    公开(公告)号：US09759621B2

    公开(公告)日：2017-09-12

    申请号：US15001970

    申请日：2016-01-20

    Applicant: Rosemount Aerospace Inc.

    Inventor： Weibin Zhang

    IPC: G01L13/02 ,  G01L9/06 ,  G01L9/00 ,  G01L13/00

    Abstract: Apparatus and associated methods relate to generating a signal indicative of a differential pressure using a first absolute pressure sensor and a second absolute pressure sensor, each having a positive relation transducer configured to generate an electrical signal that increases in response to increasing pressure and a negative relation transducer configured to generate an electrical signal that decreases in response to increasing pressure. The first and second positive relation transducers of the first and second absolute pressure sensors, respectively, are electrically connected as a first leg of a Wheatstone bridge at a first output node. The first and second negative relation transducers of the first and second absolute pressure sensors, respectively, are electrically connected as a second leg of a Wheatstone bridge at a second output node. Both positive and both negative relation transducers are connected to a first and a second bias node of the Wheatstone bridge, respectively.

    PSEUDO DIFFERENTIAL PRESSURE SENSING BRIDGE CONFIGURATION
    5.
    发明申请
    PSEUDO DIFFERENTIAL PRESSURE SENSING BRIDGE CONFIGURATION 有权

    公开(公告)号：US20170205299A1

    公开(公告)日：2017-07-20

    申请号：US15001970

    申请日：2016-01-20

    Applicant: Rosemount Aerospace Inc.

    Inventor： Weibin Zhang

    IPC: G01L9/00

    CPC classification number: G01L9/0052 ,  G01L9/0055 ,  G01L9/06 ,  G01L13/00 ,  G01L13/025 ,  G01L15/00

    Abstract: Apparatus and associated methods relate to generating a signal indicative of a differential pressure using a first absolute pressure sensor and a second absolute pressure sensor, each having a positive relation transducer configured to generate an electrical signal that increases in response to increasing pressure and a negative relation transducer configured to generate an electrical signal that decreases in response to increasing pressure. The first and second positive relation transducers of the first and second absolute pressure sensors, respectively, are electrically connected as a first leg of a Wheatstone bridge at a first output node. The first and second negative relation transducers of the first and second absolute pressure sensors, respectively, are electrically connected as a second leg of a Wheatstone bridge at a second output node. Both positive and both negative relation transducers are connected to a first and a second bias node of the Wheatstone bridge, respectively.

    CAPACITIVE PRESSURE SENSORS FOR HIGH TEMPERATURE APPLICATIONS
    6.
    发明申请
    CAPACITIVE PRESSURE SENSORS FOR HIGH TEMPERATURE APPLICATIONS 审中-公开
    用于高温应用的电容式压力传感器

    公开(公告)号：US20150276512A1

    公开(公告)日：2015-10-01

    申请号：US14185156

    申请日：2014-02-20

    Applicant: Rosemount Aerospace Inc.

    Inventor： Weibin Zhang ,  Anita Fink ,  Saeed Fahimi ,  Kimiko J. Childress

    IPC: G01L1/14

    CPC classification number: G01L1/14 ,  G01L9/0047 ,  G01L9/0075 ,  G01L19/0076 ,  G01L19/0618

    Abstract: A capacitive pressure sensor includes a substrate wafer and a diaphragm wafer. The substrate wafer defines a substrate recess with a first recess. The diaphragm wafer defines a diaphragm recess with a second recess. The diaphragm wafer is bonded to the substrate wafer such that the substrate and diaphragm recesses form a height differentiated pressure chamber.

    Abstract translation: 电容式压力传感器包括衬底晶片和膜片晶片。 衬底晶片限定具有第一凹部的衬底凹部。 隔膜晶片限定具有第二凹槽的隔膜凹部。 膜片晶片与衬底晶片结合，使得衬底和隔膜凹槽形成高度差异化压力室。

    Symmetric MEMS piezoelectric accelerometer for lateral noise
    7.
    发明授权
    Symmetric MEMS piezoelectric accelerometer for lateral noise 有权

    公开(公告)号：US10060943B2

    公开(公告)日：2018-08-28

    申请号：US15074567

    申请日：2016-03-18

    Applicant: Rosemount Aerospace Inc.

    Inventor： Weibin Zhang

    IPC: G01P15/09

    CPC classification number: G01P15/0922

    Abstract: Apparatus and associated methods relate to maximizing a signal to noise ratio of an accelerometer by inhibiting signals arising from movements of a proofmass in directions perpendicular to a direction of intended sensitivity. The direction of intended sensitivity of the accelerometer is along an axis of the proofmass. The accelerometer is rendered substantially insensitive to lateral accelerations of the proofmass by making the accelerometer axially symmetric. Two axially-asymmetric acceleration sensing devices are axially engaged in such a manner as to render the coupled sensing devices substantially axially-symmetric. In some embodiments, each acceleration sensor has an axially-thin membrane portion extending from a proofmass portion. The two acceleration sensors can be engaged in an antiparallel fashion at projecting ends of the proofmass portions. An engagement surface will be located about halfway between the axially-thin membrane portions of the two acceleration sensors, thereby causing mechanical symmetry about the engagement surface.

    Pseudo differential pressure sensing bridge configuration
    9.
    发明授权
    Pseudo differential pressure sensing bridge configuration 有权

    公开(公告)号：US09804048B2

    公开(公告)日：2017-10-31

    申请号：US15001970

    申请日：2016-01-20

    Applicant: Rosemount Aerospace Inc.

    Inventor： Weibin Zhang

    IPC: G01L13/02 ,  G01L9/06 ,  G01L9/00 ,  G01L13/00

    CPC classification number: G01L9/0052 ,  G01L9/0055 ,  G01L9/06 ,  G01L13/00 ,  G01L13/025 ,  G01L15/00

    Abstract: Apparatus and associated methods relate to generating a signal indicative of a differential pressure using a first absolute pressure sensor and a second absolute pressure sensor, each having a positive relation transducer configured to generate an electrical signal that increases in response to increasing pressure and a negative relation transducer configured to generate an electrical signal that decreases in response to increasing pressure. The first and second positive relation transducers of the first and second absolute pressure sensors, respectively, are electrically connected as a first leg of a Wheatstone bridge at a first output node. The first and second negative relation transducers of the first and second absolute pressure sensors, respectively, are electrically connected as a second leg of a Wheatstone bridge at a second output node. Both positive and both negative relation transducers are connected to a first and a second bias node of the Wheatstone bridge, respectively.

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