Abstract:
A method for forming a pressure sensor includes forming a base of a sapphire material, the base including a cavity formed therein; forming a sapphire membrane on top of the base and over the cavity; forming a lower electrode on top of the membrane; forming a piezoelectric material layer on an upper surface of the lower electrode, the piezoelectric material layer being formed of aluminum nitride (AIN); and forming at least one upper electrode on an upper surface of the piezoelectric material layer.
Abstract:
A pressure sensor assembly includes a pressure sensor having a pressure sensing transducer connected to a plurality of electrode pins via a plurality of electrode pads disposed on the transducer, an inner casing configured to hold the pressure sensing transducer including a plurality of inner casing electrode pin channels having the electrode pins disposed therein. The pressure sensor further includes an outer casing holding the inner casing therein having a capsule header with a plurality of capsule header electrode pin channels defined therein which can include a ceramic seal disposed therein such that the capsule header electrode pin channels engage the electrode pins in an insulating sealed relationship. The outer casing further includes an isolator plate including an isolator plate fluid port defined therein and a pressure isolator disposed on the isolator plate and configured to deflect in response to a change in ambient pressure. The pressure sensor includes a pressure transmitting fluid disposed in the fluid volume.
Abstract:
A pressure sensor assembly includes a pressure sensor having a pressure sensing transducer connected to a plurality of electrode pins via a plurality of electrode pads disposed on the transducer, an inner casing configured to hold the pressure sensing transducer including a plurality of inner casing electrode pin channels having the electrode pins disposed therein. The pressure sensor further includes an outer casing holding the inner casing therein having a capsule header with a plurality of capsule header electrode pin channels defined therein which can include a ceramic seal disposed therein such that the capsule header electrode pin channels engage the electrode pins in an insulating sealed relationship. The outer casing further includes an isolator plate including an isolator plate fluid port defined therein and a pressure isolator disposed on the isolator plate and configured to deflect in response to a change in ambient pressure. The pressure sensor includes a pressure transmitting fluid disposed in the fluid volume.
Abstract:
A differential pressure sensor includes a body having a first end, a second end, and a wall. The first end and second end include isolator diaphragms connected to external first and second process fluid inlets. A MEMS pressure sensor including a pressure sensing diaphragm inside the cylinder has first and second sides coupled to the first and second isolator diaphragms by first and second fill fluid volumes. Sensor elements on the diaphragm are configured to provide, via associated sensor circuitry, an indication of deflection due to pressure differences between the first and second fill volumes. Electrical and fill fluid connections to the differential pressure sensor are made through radial connections in the wall of the body.
Abstract:
A differential pressure sensor includes a body having a first end, a second end, and a wall. The first end and second end include isolator diaphragms connected to external first and second process fluid inlets. A MEMS pressure sensor including a pressure sensing diaphragm inside the cylinder has first and second sides coupled to the first and second isolator diaphragms by first and second fill fluid volumes. Sensor elements on the diaphragm are configured to provide, via associated sensor circuitry, an indication of deflection due to pressure differences between the first and second fill volumes. Electrical and fill fluid connections to the differential pressure sensor are made through radial connections in the wall of the body.
Abstract:
A method for forming a pressure sensor includes forming a base of a sapphire material, the base including a cavity formed therein; forming a sapphire membrane on top of the base and over the cavity; forming a lower electrode on top of the membrane; forming a piezoelectric material layer on an upper surface of the lower electrode, the piezoelectric material layer being formed of aluminum nitride (AIN); and forming at least one upper electrode on an upper surface of the piezoelectric material layer.