公开(公告)号：US20160148831A1

公开(公告)日：2016-05-26

申请号：US14944839

申请日：2015-11-18

Applicant: Rudolph Technologies, Inc.

Inventor： James H. Greer ,  Troy Palm

IPC: H01L21/687 ,  H01L21/66 ,  H01L21/683

CPC classification number: H01L22/12 ,  H01L21/67288 ,  H01L21/673 ,  H01L21/67346 ,  H01L21/6838 ,  H01L21/68714 ,  H01L21/68721 ,  H01L21/68728 ,  H01L21/6875

Abstract: A method and apparatus for detecting and handling deformed substrates, thus allowing them to be processed, and for increasing device yield on the substrate is herein disclosed. A sensor detects deformity, then the substrate is flattened, allowing a support to hold it securely.

Abstract translation: 本文公开了一种用于检测和处理变形的基板，从而允许它们被处理以及用于提高基板上的器件产量的方法和装置。 传感器检测到畸形，然后将基板压平，允许支撑件牢固地固定。

公开(公告)号：US20150277239A1

公开(公告)日：2015-10-01

申请号：US14433233

申请日：2013-10-02

Applicant: RUDOLPH TECHNOLOGIES, INC.

Inventor： James H. Greer ,  Michael H. Valois ,  J. Casey Donaher

IPC: G03F7/20

CPC classification number: G03F7/2026 ,  G03F7/2022 ,  G03F7/70066 ,  G03F7/70216 ,  G03F7/707 ,  G03F7/70733

Abstract: An apparatus (1100) for protecting at least a portion of a peripheral region of a photoresist-coated surface of a substrate from light exposure. The apparatus includes two or more movable blades (1102) and a drive assembly (1112, 1114) operably coupled to the movable blades. In response to at least one first drive force generated by the drive assembly, the movable blades translate such that the movable blades are disposed above at least a portion of the peripheral region. In response to at least one second drive force generated by the drive assembly, the movable blades translate such that the movable blades are not disposed above a portion of the peripheral region.

Abstract translation: 一种用于保护基材的光致抗蚀剂涂覆表面的外围区域的至少一部分的光暴露的装置（1100）。 该装置包括可操作地联接到可动叶片的两个或更多个可动刀片（1102）和驱动组件（1112,1114）。 响应于由驱动组件产生的至少一个第一驱动力，可移动刀片平移，使得可动刀片设置在周边区域的至少一部分上方。 响应于由驱动组件产生的至少一个第二驱动力，可移动刀片平移，使得可动刀片不设置在周边区域的一部分上方。

公开(公告)号：US10014228B2

公开(公告)日：2018-07-03

申请号：US14944839

申请日：2015-11-18

Applicant: Rudolph Technologies, Inc.

Inventor： James H. Greer ,  Troy Palm

IPC: H01L21/66 ,  H01L21/683 ,  H01L21/687 ,  H01L21/67 ,  H01L21/673

CPC classification number: H01L22/12 ,  H01L21/67288 ,  H01L21/673 ,  H01L21/67346 ,  H01L21/6838 ,  H01L21/68714 ,  H01L21/68721 ,  H01L21/68728 ,  H01L21/6875

Abstract: A method and apparatus for detecting and handling deformed substrates, thus allowing them to be processed, and for increasing device yield on the substrate is herein disclosed. A sensor detects deformity, then the substrate is flattened, allowing a support to hold it securely.