-
公开(公告)号:US20240324997A1
公开(公告)日:2024-10-03
申请号:US18619391
申请日:2024-03-28
Applicant: SEIKO EPSON CORPORATION
Inventor: Keita KUBO , Chikara KOJIMA , Hikaru IWAI , Eiji OSAWA
CPC classification number: A61B8/4494 , A61B8/4444 , G01S7/52079 , G01S15/8925
Abstract: An ultrasonic probe includes: an ultrasonic device configured to transmit an ultrasonic wave; and an acoustic sheet provided at a transmission surface of the ultrasonic wave of the ultrasonic device. The acoustic sheet includes an acoustic lens configured to guide the ultrasonic wave output from the transmission surface in a predetermined direction, a base material covering at least a part of the acoustic lens and having a difference in acoustic impedance from a measurement target less than a predetermined threshold, and a first fixing portion provided at least at a first surface of the base material and configured to detachably fix the acoustic sheet to the measurement target, the first surface being configured to face the measurement target.
-
公开(公告)号:US20240278286A1
公开(公告)日:2024-08-22
申请号:US18439778
申请日:2024-02-13
Applicant: SEIKO EPSON CORPORATION
Inventor: Chikara KOJIMA , Keita KUBO , Katsuhiro IMAI , Hironori SUZUKI
Abstract: An ultrasonic device includes a vibration plate having a first surface and a second surface opposite to the first surface, an acoustic matching layer that is provided on the first surface and is brought into contact with an object, a piezoelectric element provided on the second surface, and a prevention portion that is disposed in a manner of surrounding the piezoelectric element, and prevents vibration of the vibration plate. When a thickness of the acoustic matching layer is defined as t, a sound velocity of ultrasonic waves is defined as V, and a center frequency of ultrasonic waves transmitted from the first surface is defined as f, t≤V/f is satisfied.
-
3.
公开(公告)号:US20240147866A1
公开(公告)日:2024-05-02
申请号:US18402907
申请日:2024-01-03
Applicant: SEIKO EPSON CORPORATION
Inventor: Koji OHASHI , Chikara KOJIMA , Hiroshi MATSUDA , Hironori SUZUKI , Shuichi TANAKA
CPC classification number: H10N30/88 , B06B1/0622 , B06B1/0629 , H10N30/87 , H10N30/875 , H10N39/00
Abstract: A mounting structure includes: a first substrate that has a first surface on which a functional element is provided; a wiring portion that is provided at a position, which is different from a position of the functional element on the first surface, and is conductively connected to the functional element; a second substrate that has a second surface that is opposite to the first surface; and a conduction portion that is provided on the second surface, is connected to the wiring portion, and is conductively connected the functional element. The shortest distance between the functional element and the second substrate is longer than the longest distance between the second substrate and a position where the wiring portion is connected to the conduction portion.
-
公开(公告)号:US20230111845A1
公开(公告)日:2023-04-13
申请号:US18045536
申请日:2022-10-11
Applicant: SEIKO EPSON CORPORATION
Inventor: Keita KUBO , Chikara KOJIMA , Tomohide ONOGI , Mitsuru MIYASAKA
Abstract: A fluid device includes: a flow path through which a fluid flows; and an ultrasonic wave application device including an ultrasonic element that transmits an ultrasonic wave, in which the flow path has, as flow path wall surfaces, an ultrasonic wave application surface that applies, to the fluid, the ultrasonic wave transmitted from the ultrasonic element, and a reflection surface that reflects the ultrasonic wave applied to the fluid from the ultrasonic wave application surface, and the reflection surface has a concave curved surface shape.
-
公开(公告)号:US20230076028A1
公开(公告)日:2023-03-09
申请号:US17929820
申请日:2022-09-06
Applicant: SEIKO EPSON CORPORATION
Inventor: Keita KUBO , Chikara KOJIMA , Tomohide ONOGI , Mitsuru MIYASAKA
IPC: F15D1/00
Abstract: A fluidic device includes a channel in which a fluid flows, and an ultrasonic element generating standing wave in the fluid within the channel by applying ultrasonic wave to the fluid, wherein the channel has a first portion formed using a resin material having a first reflectance of ultrasonic wave propagating in the fluid less than a predetermined value and a second portion having a second reflectance of ultrasonic wave propagating in the fluid equal to or more than the predetermined value, and the second portion is placed on two different surfaces along a flow direction of the fluid within the channel.
-
公开(公告)号:US20200303618A1
公开(公告)日:2020-09-24
申请号:US16823449
申请日:2020-03-19
Applicant: SEIKO EPSON CORPORATION
Inventor: Chikara KOJIMA , Eiji OSAWA , Koji OHASHI , Kanechika KIYOSE , Tomohiro SAYAMA , Hironori SUZUKI , Katsuhiro IMAI , Yasuyuki MATSUMOTO , Takahiro KAMIJO
Abstract: An MEMS device includes: a first member; a second member forming a sealed space with the first member therebetween; and a third member disposed between the first member and the second member and joined to the first member and the second member, in which the third member has lower rigidity than rigidity of the first member and the second member, and the third member is provided with a communication portion that establishes communication between the sealed space and an external space.
-
公开(公告)号:US20190162577A1
公开(公告)日:2019-05-30
申请号:US16203908
申请日:2018-11-29
Applicant: Seiko Epson Corporation
Inventor: Chikara KOJIMA
IPC: G01F23/296
Abstract: A liquid surface sensor includes a hollow member having a first opening end and a second opening end, and a sensor unit provided so as to close the first opening end of the hollow member. The sensor unit includes a vibration plate, and a piezoelectric element which is provided on the vibration plate and is formed by laminating a first electrode film, a piezoelectric film, and a second electrode film in a thickness direction of the vibration plate.
-
8.
公开(公告)号:US20180326455A1
公开(公告)日:2018-11-15
申请号:US15973852
申请日:2018-05-08
Applicant: Seiko Epson Corporation
Inventor: Koji OHASHI , Chikara KOJIMA , Hiroshi MATSUDA , Hironori SUZUKI , Shuichi TANAKA
IPC: B06B1/06 , H01L41/047 , H01L41/053 , H01L41/08 , H01L41/23 , H01L41/29 , G01N29/24 , A61B8/14 , A61B8/00
CPC classification number: B06B1/0629 , H01L2224/10
Abstract: A mounting structure includes a first substrate that has a first surface on which a functional element is provided, a wiring that is provided at a position which is different from a position of the functional element on the first surface, and is connected to the functional element, a second substrate that has a second surface facing the first surface, and a conductor that is provided on the second surface, and is connected to the wiring and the functional element, in which the shortest distance between the functional element and the second substrate is longer than a distance between a position where the wiring is connected to the conductor, and the second substrate.
-
公开(公告)号:US20180277742A1
公开(公告)日:2018-09-27
申请号:US15920829
申请日:2018-03-14
Applicant: Seiko Epson Corporation
Inventor: Takayuki YONEMURA , Chikara KOJIMA , Xiaoxing WANG , Tetsuya ISSHIKI , Yasuhiro ITAYAMA
IPC: H01L41/187 , H01L41/04 , H01L41/047 , H01L41/09 , C01G25/00 , A61B8/00 , A61B8/14 , B41J2/14 , B41J2/16 , G01N29/24
CPC classification number: H01L41/1876 , A61B8/14 , A61B8/4427 , A61B8/4444 , A61B8/4483 , A61B8/461 , B06B1/0666 , B06B1/0692 , B41J2/14201 , B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1634 , B41J2/1635 , B41J2/1642 , B41J2/1645 , B41J2/1646 , B41J2002/14258 , B41J2202/03 , C01G25/006 , C01P2002/34 , C01P2006/40 , G01N29/245 , H01L41/042 , H01L41/0475 , H01L41/0973
Abstract: A piezoelectric element has a diaphragm, a first electrode on the diaphragm, a piezoelectric layer on the first electrode, and a second electrode on the piezoelectric layer. The piezoelectric layer is a stack of multiple piezoelectric films and is made of a perovskite composite oxide containing lead, zirconium, and titanium and represented by the general formula ABO3, with the molar ratio of the A-site to the B-site (A/B) in the perovskite composite oxide being 1.14 or more and 1.22 or less. In current-time curve measurement, the activation energy calculated from relaxation current using an Arrhenius plot is 0.6 [eV] or less. The relaxation current is the amount of current at the time at which a downward trend in current turns upward.
-
10.
公开(公告)号:US20170252778A1
公开(公告)日:2017-09-07
申请号:US15437910
申请日:2017-02-21
Applicant: Seiko Epson Corporation
Inventor: Chikara KOJIMA
IPC: B06B1/06 , H01L41/25 , H01L41/053 , H01L41/293 , H01L41/09 , H01L41/047
CPC classification number: B06B1/0629 , H01L27/20 , H01L41/0475 , H01L41/0533 , H01L41/09 , H01L41/0973 , H01L41/25 , H01L41/293
Abstract: An ultrasonic element array includes a first piezoelectric element, a second piezoelectric element, a third piezoelectric element, and a fourth piezoelectric element each having a piezoelectric material sandwiched by a first electrode and a second electrode, a first wire connecting the second electrode of the first piezoelectric element and the second electrode of the second piezoelectric element, a second wire connecting the second electrode of the third piezoelectric element and the second electrode of the fourth piezoelectric element, a third wire connecting to the second wire over the first wire, and an insulating film located between the first wire and the third wire, wherein the insulating film has an inorganic insulating film made of an inorganic material and an organic insulating film made of an organic material, and the inorganic insulating film covers the piezoelectric elements.
-
-
-
-
-
-
-
-
-