公开(公告)号：US20180277738A1

公开(公告)日：2018-09-27

申请号：US15935539

申请日：2018-03-26

Applicant: Seiko Epson Corporation

Inventor： Koji OHASHI ,  Takahiro KAMIJO ,  Katsuhiro IMAI ,  Takumi YAMAOKA ,  Chikara KOJIMA

IPC: H01L41/047 ,  H01L41/053 ,  H01L41/187 ,  H01L41/09 ,  H01L41/29 ,  B06B1/02 ,  B06B1/06 ,  G01N29/24 ,  A61B8/12 ,  A61B8/06

CPC classification number: H01L41/0475 ,  A61B8/06 ,  A61B8/12 ,  B06B1/0215 ,  B06B1/0622 ,  B06B1/067 ,  B06B2201/76 ,  B41J2/14201 ,  G01N29/245 ,  H01L41/047 ,  H01L41/0477 ,  H01L41/0533 ,  H01L41/09 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/29

Abstract: A piezoelectric element has a first electrode layer, a piezoelectric layer on the first electrode layer, a second electrode layer on the piezoelectric layer, a third electrode layer on part of the second electrode layer and including third metal, and an insulating layer covering at least a part of the piezoelectric layer not provided with the second electrode layer and having an aperture exposing a part of the second electrode layer. The second electrode layer has a first layer including first metal and a second layer including second metal on the first layer. The second layer is exposed in the aperture. A difference in standard redox potential between the second metal and the third metal is smaller than a difference in standard redox potential between the first metal and the third metal.

公开(公告)号：US20200168784A1

公开(公告)日：2020-05-28

申请号：US16690553

申请日：2019-11-21

Applicant: SEIKO EPSON CORPORATION

Inventor： Chikara KOJIMA ,  Koji OHASHI ,  Hironori SUZUKI ,  Kanechika KIYOSE ,  Katsuhiro IMAI ,  Yasuyuki MATSUMOTO ,  Takahiro KAMIJO

IPC: H01L41/047 ,  B06B1/02 ,  B06B1/06 ,  H01L41/04 ,  H01L41/08

Abstract: A piezoelectric device includes a substrate having opening portions, a vibrating plate provided to overlap with the substrate and having a plurality of vibrating regions overlapping with the opening portions in a plan view as seen from a thickness direction of the substrate, piezoelectric elements provided in the vibrating regions, and bypass wires provided outside of the vibrating regions of the vibrating plate and electrically coupled to the plurality of piezoelectric elements, wherein slits penetrating the bypass wires in the thickness direction are provided in the bypass wires.

公开(公告)号：US20240278286A1

公开(公告)日：2024-08-22

申请号：US18439778

申请日：2024-02-13

Applicant: SEIKO EPSON CORPORATION

Inventor： Chikara KOJIMA ,  Keita KUBO ,  Katsuhiro IMAI ,  Hironori SUZUKI

IPC: B06B1/06 ,  G10K11/02

CPC classification number: B06B1/067 ,  G10K11/02

Abstract: An ultrasonic device includes a vibration plate having a first surface and a second surface opposite to the first surface, an acoustic matching layer that is provided on the first surface and is brought into contact with an object, a piezoelectric element provided on the second surface, and a prevention portion that is disposed in a manner of surrounding the piezoelectric element, and prevents vibration of the vibration plate. When a thickness of the acoustic matching layer is defined as t, a sound velocity of ultrasonic waves is defined as V, and a center frequency of ultrasonic waves transmitted from the first surface is defined as f, t≤V/f is satisfied.

公开(公告)号：US20200303618A1

公开(公告)日：2020-09-24

申请号：US16823449

申请日：2020-03-19

Applicant: SEIKO EPSON CORPORATION

Inventor： Chikara KOJIMA ,  Eiji OSAWA ,  Koji OHASHI ,  Kanechika KIYOSE ,  Tomohiro SAYAMA ,  Hironori SUZUKI ,  Katsuhiro IMAI ,  Yasuyuki MATSUMOTO ,  Takahiro KAMIJO

IPC: H01L41/053 ,  B06B1/02 ,  B06B1/06 ,  B81B7/00 ,  H01L41/04 ,  H01L41/08

Abstract: An MEMS device includes: a first member; a second member forming a sealed space with the first member therebetween; and a third member disposed between the first member and the second member and joined to the first member and the second member, in which the third member has lower rigidity than rigidity of the first member and the second member, and the third member is provided with a communication portion that establishes communication between the sealed space and an external space.