公开(公告)号：US20180128716A1

公开(公告)日：2018-05-10

申请号：US15808377

申请日：2017-11-09

Applicant: Shimadzu Corporation

Inventor： Hiroshi Seki ,  Yoshihiro Ueno ,  Hiroshi Okuda ,  Hiromu Sakurai

IPC: G01N1/22 ,  B08B15/00

CPC classification number: G01N1/2208 ,  B08B15/00 ,  G01N1/2247 ,  G01N1/40 ,  G01N2001/2223 ,  G01N2001/4038

Abstract: Minute particles in a gas generated in a particle generating unit are charged by a charging unit. A concentrating unit concentrates charged particles in an introduced gas, and a collecting unit absorbs and collects the concentrated charged particles on a sample plate by an electrostatic force. In the concentrating unit, the charged particles are concentrated by decreasing a flow rate of a gas (carrier gas) in which particles are dispersed while maintaining the number of introduced charged particles. When the flow rate of the gas decreases, and spatial density of the particles increases, it is possible to efficiently collect charged particles on the small sample plate in the collecting unit, and to shorten a collection time.

公开(公告)号：US09875873B2

公开(公告)日：2018-01-23

申请号：US15501935

申请日：2014-08-08

Applicant: SHIMADZU CORPORATION

Inventor： Yoshihiro Ueno ,  Hiroshi Seki ,  Hiroshi Okuda

IPC: H01J27/02 ,  H01J49/12 ,  G01N27/62 ,  H01J37/32

CPC classification number: H01J27/024 ,  B03C7/02 ,  G01N15/0266 ,  G01N27/62 ,  G01N27/622 ,  G01N2015/0038 ,  H01J37/32009 ,  H01J37/32082 ,  H01J37/321 ,  H01J37/32357 ,  H01J37/3244 ,  H01J37/32532 ,  H01J49/10 ,  H01J49/12

Abstract: A particle charger is provided with: a filter (28) partitioning the inside of a housing (20) into a first space (29) and second space (30); a particle introducer (22) for introducing a particle into the first space; a gas ion supplier (10) for supplying the first space with a gas ion; a potential gradient creator (26, 27, 31) for creating a potential difference within the housing so as to make the gas ion and a charged particle resulting from a contact of the aforementioned particle with the gas ion move toward the second space; an AC voltage supplier (32, 33) for applying AC voltages having a phase difference to the neighboring electrodes (28a, b) included in the filter; a controller (35) for performing a control for applying, to the plurality of electrodes, predetermined voltages so as to allow the charged particle to pass through a gap between the electrodes while trapping the gas ion by the electrodes; and a charged particle extractor (23, 25, 34) for extracting the charged particle admitted to the second space to the outside of the housing. By this configuration, the occurrence frequency of the multi-charging is suppressed.