公开(公告)号：US20160096185A1

公开(公告)日：2016-04-07

申请号：US14719066

申请日：2015-05-21

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hamamoto NOBUO ,  Miyazaki HIROSHI

IPC: B05B5/08 ,  H01L51/00 ,  B05B12/08 ,  B05B5/025 ,  B05B15/06

CPC classification number: H01L51/0003 ,  B05B5/0255 ,  B05B5/035 ,  B05B5/057 ,  B05B13/0264 ,  B05C5/00 ,  B05C9/00 ,  B05C13/00 ,  H01L51/0006

Abstract: A thin film fabricating apparatus includes: an electrode bath which contains a thin film-forming material; a plurality of needle electrodes disposed in the electrode bath; a plurality of ring electrodes disposed on the electrode bath at positions corresponding to the needle electrodes; and a substrate stand disposed opposite to the needle electrodes and the ring electrodes, where the substrate stand holds the substrate, on which a thin film is to be formed.

Abstract translation: 薄膜制造装置包括：含有薄膜形成材料的电极槽; 设置在电极槽中的多个针电极; 多个环形电极，其设置在与所述针状电极对应的位置处的所述电极槽上; 以及与针状电极和环形电极相对设置的基板台，其中基板支架保持要在其上形成薄膜的基板。