公开(公告)号：US10068746B2

公开(公告)日：2018-09-04

申请号：US15380366

申请日：2016-12-15

Applicant: Seron Technologies Inc.

Inventor： Jeonghoi Koo

IPC: H01J37/09 ,  H01J37/16 ,  H01J37/244 ,  H01J37/06 ,  H01J37/20 ,  H01J37/28

CPC classification number: H01J37/244 ,  H01J37/06 ,  H01J37/20 ,  H01J37/28 ,  H01J2237/026 ,  H01J2237/141 ,  H01J2237/24465 ,  H01J2237/24475 ,  H01J2237/2608

Abstract: The present invention relates to a scanning electron microscope realized to observe a test sample by detecting back-scattered electrons scattered and emitted from a surface of the test sample in the air without a vacuum chamber which is allowed to observe the test sample in a vacuum state the scanning electron microscope can be useful in minimizing dispersion of electrons of the electron beam passing through the shielding film caused due to electron scattering by focusing the electron beam passing through the shielding film on a top surface of the first back-scattered electron detector disposed between the electron gun and the shielding film to pass an electron beam and configured to detect back-scattered electrons scattered from the test sample since the first back-scattered electron detector is provided with the first planar coil having a magnetic field formed thereon.