公开(公告)号：US20220185673A1

公开(公告)日：2022-06-16

申请号：US17593470

申请日：2020-03-05

Applicant: Tokyo Electron Limited

Inventor： Ryota IFUKU ,  Takashi MATSUMOTO ,  Akira FUJIO ,  Shin KONO

IPC: C01B32/186 ,  G01N21/21 ,  G01N21/88 ,  G01J4/04

Abstract: A method for detecting abnormal growth of graphene includes: measuring, through spectroscopic ellipsometry, a reflection spectrum of a measurement object having a graphene film formed through CVD on a substrate; creating a film structure model, calculating polarization parameters, and matching calculated values of the polarization parameters to measured values through fitting; and detecting abnormal growth of the graphene based on a value of goodness of fit obtained when fitting the polarization parameters.

公开(公告)号：US20220155242A1

公开(公告)日：2022-05-19

申请号：US17439160

申请日：2020-02-26

Applicant: Tokyo Electron Limited

Inventor： Ryota IFUKU ,  Takashi MATSUMOTO ,  Akira FUJIO ,  Kousaku SAITO

IPC: G01N21/956 ,  C01B32/186 ,  C01B32/18

Abstract: A method of detecting an abnormal growth of graphene includes: preparing an inspection target having a graphene film formed on a substrate by CVD; receiving light from the graphene film by using a dark field optical system; and inspecting the received light, thereby detecting the abnormal growth of the graphene.