公开(公告)号：US12243758B2

公开(公告)日：2025-03-04

申请号：US17084934

申请日：2020-10-30

Applicant: Tokyo Electron Limited

Inventor： Shota Kaneko ,  Shigemi Oono ,  Norihide Sagara

IPC: G05B19/406 ,  H01L21/67 ,  H04N7/18

Abstract: A monitoring system is for a sealing apparatus that seals a substrate treatment apparatus by a housing and fills a space sealed by the housing with a predetermined gas atmosphere. The monitoring system includes: a laser sensor for a region, which a person can enter in a space between the housing and the substrate treatment apparatus, as a detection region; and a controller that outputs a control signal to the substrate treatment apparatus or the sealing apparatus based on a detection result by the laser sensor or outputs a notification signal based on the detection result.

公开(公告)号：US20180257099A1

公开(公告)日：2018-09-13

申请号：US15905977

申请日：2018-02-27

Applicant: Tokyo Electron Limited

Inventor： Fumihiro Miyazaki ,  Kazuhito Miyazaki ,  Norihide Sagara ,  Wataru Yoshitomi ,  Koutarou Onoue

IPC: B05C5/02 ,  B05D1/26 ,  B05C11/00 ,  B05C13/00

CPC classification number: B05C5/0208 ,  B05C11/00 ,  B05C13/00 ,  B05D1/26 ,  H01L21/6715 ,  H01L21/67259 ,  H01L21/681

Abstract: A droplet ejecting apparatus includes a workpiece table configured to place a workpiece thereon, a droplet ejecting head configured to eject droplets onto the workpiece placed on the workpiece table, a Y-axis linear motor configured to move the workpiece table in a main scanning direction (Y-axis direction), a position detector configured to detect a position of a carriage mark, and a control unit configured to calculate the positional deviation amount in the main scanning direction between a detection position detected by the position detector and a reference position of the carriage mark and correct a droplet ejecting timing of the droplet ejecting head based on the positional deviation amount.

公开(公告)号：US11571706B2

公开(公告)日：2023-02-07

申请号：US15905977

申请日：2018-02-27

Applicant: Tokyo Electron Limited

Inventor： Fumihiro Miyazaki ,  Kazuhito Miyazaki ,  Norihide Sagara ,  Wataru Yoshitomi ,  Koutarou Onoue

IPC: H01L21/67 ,  B41J2/045 ,  B41J25/00 ,  H01L51/00 ,  H01L21/68 ,  B41J29/393 ,  H04N1/00 ,  B05C5/02 ,  B05C13/00 ,  B05C11/10 ,  B05D1/26 ,  B05B12/08

Abstract: A droplet ejecting apparatus includes a workpiece table configured to place a workpiece thereon, a droplet ejecting head configured to eject droplets onto the workpiece placed on the workpiece table, a Y-axis linear motor configured to move the workpiece table in a main scanning direction (Y-axis direction), a position detector configured to detect a position of a carriage mark, and a control unit configured to calculate the positional deviation amount in the main scanning direction between a detection position detected by the position detector and a reference position of the carriage mark and correct a droplet ejecting timing of the droplet ejecting head based on the positional deviation amount.