公开(公告)号：US11686637B2

公开(公告)日：2023-06-27

申请号：US17583392

申请日：2022-01-25

Applicant: XI'AN JIAOTONG UNIVERSITY

Inventor： Xudong Fang ,  Ziyan Fang ,  Chen Wu ,  Hao Sun ,  Libo Zhao ,  Bian Tian ,  Zhuangde Jiang ,  Wubin Deng ,  Bonan Gao ,  Junxia Wu ,  Songli Wang ,  Nan Zhu

IPC: G01L9/00 ,  B81B7/02

CPC classification number: G01L9/005 ,  B81B7/02 ,  G01L9/0054 ,  B81B2201/0264 ,  B81B2201/0278

Abstract: A silicon carbide-based micro-electro-mechanical system (MEMS) combined temperature-pressure sensor chip and a preparation thereof. The chip includes a peripheric pressure-measuring unit and a center temperature-measuring unit. The pressure-measuring unit includes a silicon carbide substrate with a raised island and a pressure sensitive diaphragm formed by etching the back of the substrate. The raised island and the pressure-sensitive diaphragm constitute a membrane-island structure. Four piezoresistive strips are arranged symmetrically along a circumferential direction of a root of the pressure-sensitive diaphragm and between the raised island and the pressure-sensitive diaphragm. The temperature-measuring unit includes the raised island and a thin-film thermocouple arranged thereon.

公开(公告)号：US12279531B2

公开(公告)日：2025-04-15

申请号：US18487880

申请日：2023-10-16

Applicant: Xi'an Jiaotong University

Inventor： Zhongkai Zhang ,  Jiaming Lei ,  Le Li ,  Shuimin Li ,  Bian Tian ,  Libo Zhao ,  Zhuangde Jiang

IPC: H10N10/17 ,  H10N10/01 ,  H10N10/82 ,  H10N19/00 ,  G01K7/02

Abstract: An alginate hydrogel-based thin-film heat flux sensor for billet crystallizer includes an alginate hydrogel substrate. The alginate hydrogel substrate is configured in a U-shaped planar structure. The U-shaped planar structure includes a first side and a second side, and the first side is longer than the second side. An inner surface of the alginate hydrogel substrate is provided with a first film thermocouple and a second film thermocouple. The first film thermocouple is in crosslinking connection with the second film thermocouple.

公开(公告)号：US11598676B2

公开(公告)日：2023-03-07

申请号：US17848314

申请日：2022-06-23

Applicant: XI'AN JIAOTONG UNIVERSITY

Inventor： Zhongkai Zhang ,  Bian Tian ,  Bingfei Zhang ,  Jiangjiang Liu ,  Zhaojun Liu ,  Libo Zhao

IPC: G01K7/00 ,  G01K7/02

Abstract: Provided herein is a tungsten-rhenium composite thin film thermocouple based on a surface micropillar array with gas holes. A tungsten-rhenium thin film thermocouple is arranged on a surface of a flat alumina ceramic substrate. Two tails of the tungsten-rhenium thin film thermocouple are respectively connected to a lead wire. A surface of the tungsten-rhenium thin film thermocouple is arrayed with a plurality of micron alumina micropillars to form an alumina micropillar array. Air is filled between the micron alumina micropillars to form the gas holes. The flat alumina ceramic substrate, the tungsten-rhenium thin film thermocouple and the alumina micropillar array form a three-layered laminated structure.

公开(公告)号：US11171276B2

公开(公告)日：2021-11-09

申请号：US17118504

申请日：2020-12-10

Applicant: Xi'an Jiaotong University

Inventor： Bian Tian ,  Zhongkai Zhang ,  Yan Liu ,  Zhaojun Liu ,  Jiangjiang Liu ,  Cunfeng Wang ,  Peng Shi ,  Qijing Lin ,  Zhuangde Jiang

IPC: G01K7/02 ,  H01L35/12 ,  H01L35/04 ,  H01L35/32

Abstract: A thin-film thermocouple probe includes a columnar substrate, a tungsten-26% rhenium film and an indium oxide (In2O3) film. A side surface of the columnar substrate is provided with a first straight groove and a second straight groove. The tungsten-26% rhenium film is arranged on a front end surface of the columnar substrate and in the first straight groove. The indium oxide film is arranged on the front end surface of the columnar substrate and in the second straight groove. The indium oxide film on the front end surface of the columnar substrate is connected to the tungsten-26% rhenium film on the front end surface of the columnar substrate. A first metal lead wire is connected to the tungsten-26% rhenium film, and a second metal lead wire is connected to the indium oxide film. A method of preparing the thin-film thermocouple probe is provided.

公开(公告)号：US20180294395A1

公开(公告)日：2018-10-11

申请号：US15762819

申请日：2016-10-18

Applicant: XI'AN JIAOTONG UNIVERSITY

Inventor： Peng Shi ,  Wei Ren ,  Dan Liu ,  Ming Liu ,  Bian Tian ,  Zhuangde Jiang

IPC: H01L35/14 ,  C04B35/50 ,  G01K7/02 ,  H01L35/32 ,  H01L35/34

Abstract: A doped lanthanum chromate thin-film thermocouple includes two thermodes (1, 2) arranged on a ceramic substrate (3), wherein: the two thermodes (1, 2) are overlapped with each other; both of the thermodes (1, 2) are made of doped lanthanum chromate thin film; at least one doping element selected from a group consisting of Mg, Ca, Sr, Ba, Co, Cu, Sm, Fe, Ni and V is doped in each lanthanum chromate thin film; and the lanthanum chromate thin films adopted by the two thermodes (1, 2) are doped with in different doping elements or with a same doping element of different contents. A method for preparing the doped lanthanum chromate thin-film thermocouple is also provided.