Measurement apparatus, measurement method, and computer readable medium

    公开(公告)号:US10982949B2

    公开(公告)日:2021-04-20

    申请号:US16697180

    申请日:2019-11-27

    Abstract: A measurement apparatus includes a detection unit to detect a first light intensity of a light obtained by making a first light having a first wavelength transmitted through a measurement object, a second light intensity of a light obtained by making a second light having a second wavelength transmitted through the object, the second wavelength having a lower rate of absorption by a material of the object than the first wavelength, and a third light intensity of a light obtained by making a third light having a third wavelength transmitted through the object, the third wavelength having a lower rate of absorption by the material of the object than the first wavelength and having a lower rate of absorption by the object containing a fluid than the second wavelength, and a calculation unit to calculate the thickness of the object by using the first, second, and third light intensities.

    VACUUM TUBE SUPPORT STRUCTURE
    2.
    发明申请

    公开(公告)号:US20240397602A1

    公开(公告)日:2024-11-28

    申请号:US18655734

    申请日:2024-05-06

    Abstract: A vacuum tube support structure includes a vacuum tube, a cover configured to cover the vacuum tube, and a support member configured to support the vacuum tube and the cover. The cover includes a fluid introduction port configured to allow a fluid to pass through the cover to introduce the fluid inside the cover and a fluid discharge port configured to allow the fluid to pass through the cover to discharge the fluid from inside the cover. The fluid introduced through the fluid introduction port contacts the vacuum tube and is discharged through the fluid discharge port.

    Signal detection device and optical characteristics measurement device

    公开(公告)号:US10345231B2

    公开(公告)日:2019-07-09

    申请号:US15822398

    申请日:2017-11-27

    Abstract: A signal detection device according to one aspect of the present invention includes a receiver configured to receive a signal including at least a first signal component modulated by a first frequency and a second signal component modulated by a second frequency, and a detector configured to generate, using a base signal, a first reference signal to be used for detecting the first signal component and a second reference signal to be used for detecting the second signal component, perform lock-in detection on the signal received by the receiver using the first reference signal to obtain a first detection signal, perform lock-in detection on the signal received by the receiver using the second reference signal to obtain two second detection signals having different phases from each other, and change at least one of a frequency and a phase of each of the first and second reference signals to set one of the two second detection signals to zero.

    Material property measuring apparatus
    4.
    发明授权
    Material property measuring apparatus 有权
    材料性能测量仪器

    公开(公告)号:US09170194B2

    公开(公告)日:2015-10-27

    申请号:US14388298

    申请日:2013-03-28

    Abstract: A material property measuring apparatus includes a radiation source irradiator configured to irradiate a measurement target material with radiation beams having n different wavelengths, a detector configured to detect intensities of radiation beams having the respective wavelengths after the irradiation of the measurement target material, and a processing unit configured to correct the detected intensity of the radiation beam having at least a part of the respective wavelengths using a correction coefficient in which rows and columns are respectively represented by a matrix of an order of n or less, and to calculate an index value indicating a property of the measurement target material on the basis of relative intensities of the radiation beams having the respective wavelengths after the correction.

    Abstract translation: 材料性质测量装置包括:辐射源照射器,被配置为用测量目标材料照射具有n个不同波长的辐射束;检测器,被配置为检测在测量目标材料照射后具有各个波长的辐射束的强度;以及处理 单元,被配置为使用校正系数校正具有至少一部分各个波长的辐射束的检测强度,其中行和列分别由n或更小的阶数的矩阵表示,并且计算指示 基于校正后具有各波长的辐射束的相对强度,测量目标材料的特性。

    Measurement device and measurement method for measuring a physical quantity of a sheet

    公开(公告)号:US11867636B2

    公开(公告)日:2024-01-09

    申请号:US16984185

    申请日:2020-08-04

    Abstract: A measurement device to measure a physical quantity of a measurement target having a sheet-like shape is provided, including: a first integrating sphere which is separated by a gap from a first surface of the measurement target, has a first opening facing the first surface, and is not provided with a light detector to detect an intensity of light; a second integrating sphere which is separated by a gap from a second surface of the measurement target, where the second surface is positioned opposite to the first surface, and has a second opening facing the first opening with the measurement target sandwiched therebetween; a light source to emit light into the first integrating sphere; a light detecting unit to detect an intensity of light inside the second integrating sphere; and a calculating unit to calculate the physical quantity of the measurement target based on the intensity of the detected light.

    Measuring device
    6.
    发明授权

    公开(公告)号:US10481082B2

    公开(公告)日:2019-11-19

    申请号:US16026759

    申请日:2018-07-03

    Abstract: A measuring device includes: an irradiator that irradiates electromagnetic waves to an inspection object; a light collector having a reflecting surface that guides, to a light-collecting surface, electromagnetic waves whose incident angle with respect to an incident end facing the inspection object is within a predetermined angle, among the electromagnetic waves that have been transmitted through the inspection object; and a detector that detects the electromagnetic waves guided to the light-collecting surface. The measuring device measures a characteristic of the inspection object based on the detected electromagnetic waves.

    MATERIAL PROPERTY MEASURING APPARATUS
    8.
    发明申请
    MATERIAL PROPERTY MEASURING APPARATUS 有权
    材料性能测量装置

    公开(公告)号:US20150090885A1

    公开(公告)日:2015-04-02

    申请号:US14388298

    申请日:2013-03-28

    Abstract: A material property measuring apparatus includes a radiation source irradiator configured to irradiate a measurement target material with radiation beams having n different wavelengths, a detector configured to detect intensities of radiation beams having the respective wavelengths after the irradiation of the measurement target material, and a processing unit configured to correct the detected intensity of the radiation beam having at least a part of the respective wavelengths using a correction coefficient in which rows and columns are respectively represented by a matrix of an order of n or less, and to calculate an index value indicating a property of the measurement target material on the basis of relative intensities of the radiation beams having the respective wavelengths after the correction.

    Abstract translation: 材料性质测量装置包括:辐射源照射器,被配置为用测量目标材料照射具有n个不同波长的辐射束;检测器,被配置为检测在测量目标材料照射后具有各个波长的辐射束的强度;以及处理 单元,被配置为使用校正系数校正具有至少一部分各个波长的辐射束的检测强度,其中行和列分别由n或更小的阶数的矩阵表示,并且计算指示 基于校正后具有各波长的辐射束的相对强度,测量目标材料的特性。

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