DEVICE FOR MANUFACTURING POLYSILICON USING HORIZONTAL REACTOR AND METHOD FOR MANUFACTURING SAME
    9.
    发明申请
    DEVICE FOR MANUFACTURING POLYSILICON USING HORIZONTAL REACTOR AND METHOD FOR MANUFACTURING SAME 审中-公开
    使用水平反应器制造多晶硅的装置及其制造方法

    公开(公告)号:US20170073234A1

    公开(公告)日:2017-03-16

    申请号:US15310716

    申请日:2015-05-11

    Applicant: LG CHEM, LTD.

    Abstract: The present invention relates to a polysilicon production apparatus. The apparatus includes: a horizontal reaction tube positioned in an insulated tube and having an inlet port through which gaseous raw materials including silicon-containing reactant gases and a reducing gas are supplied, an outlet port through which residual gases exit, a reaction surface with which the gaseous raw materials come into contact, and a plurality of bottom openings through which molten polysilicon produced by the reactions of the gaseous raw materials is discharged; one or more internal structures placed in the horizontal reaction tube to provide additional reaction surfaces; and first heating means adapted to heat the reaction surface of the horizontal reaction tube. The present invention also relates to a method for the production of polysilicon using the apparatus.

    Abstract translation: 多晶硅制造装置技术领域本发明涉及多晶硅制造装置。 该装置包括:卧式反应管,其设置在绝热管中,并具有入口,通过该入口供给含有硅的反应气体和还原气体的气态原料,残留气体通过该出口流出, 气态原料接触,通过气态原料的反应产生熔融多晶硅的多个底部开口被排出; 一个或多个内部结构放置在水平反应管中以提供附加的反应表面; 以及适于加热水平反应管的反应表面的第一加热装置。 本发明还涉及使用该装置生产多晶硅的方法。

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