公开(公告)号：US06441378B1

公开(公告)日：2002-08-27

申请号：US09585852

申请日：2000-06-01

Applicant: Katsushige Tsuno ,  Eric Munro ,  John Rouse

Inventor： Katsushige Tsuno ,  Eric Munro ,  John Rouse

IPC: G21K108

CPC classification number: H01J49/463 ,  H01J37/05 ,  H01J2237/055 ,  H01J2237/057

Abstract: A compact magnetic energy filter having at least four magnetic fields to deflect the trajectory of an electron beam from the entrance window to the exit slit. A rotational symmetry axis is located midway between the second and third magnetic fields. The magnetic fields on the opposite sides of the rotational symmetry axis are opposite in polarity.

Abstract translation: 一种具有至少四个磁场以将电子束从入口窗口的轨迹偏转到出口狭缝的紧凑型磁能过滤器。 旋转对称轴位于第二和第三磁场之间的中间位置。 旋转对称轴的相对侧的磁场极性相反。

公开(公告)号：US20180114683A1

公开(公告)日：2018-04-26

申请号：US15408170

申请日：2017-01-17

Applicant: Honeywell International Inc.

Inventor： Daniel Youngner

IPC: H01J49/06 ,  B82Y10/00 ,  G21K1/00 ,  H01J49/46 ,  H01L29/94 ,  G06N99/00

CPC classification number: H01J49/06 ,  B82Y10/00 ,  G06N99/002 ,  G21K1/00 ,  H01J49/463 ,  H01L29/94

Abstract: Devices, systems, and methods for ion trapping with integrated electromagnets are described herein. One device includes a plurality of electrodes configured to trap an ion above a surface of the device, a medial coil and a plurality of peripheral coils, each positioned at a respective radial angle associated with the medial coil, wherein the medial coil is configured to generate a first magnetic field having a first orientation, and wherein the peripheral coils are configured to generate a second magnetic field having a second orientation that opposes the first orientation.

公开(公告)号：US20160372314A1

公开(公告)日：2016-12-22

申请号：US14742346

申请日：2015-06-17

Applicant: Honeywell International Inc.

Inventor： Daniel Youngner

IPC: H01J49/06

CPC classification number: H01J49/06 ,  B82Y10/00 ,  G06N99/002 ,  G21K1/00 ,  H01J49/463 ,  H01L29/94

Abstract: Devices, systems, and methods for ion trapping with integrated electromagnets are described herein. One device includes a plurality of electrodes configured to trap an ion above a surface of the device, a medial coil and a plurality of peripheral coils, each positioned at a respective radial angle associated with the medial coil, wherein the medial coil is configured to generate a first magnetic field having a first orientation, and wherein the peripheral coils are configured to generate a second magnetic field having a second orientation that opposes the first orientation.

Abstract translation: 本文描述了具有集成电磁体的离子捕获的装置，系统和方法。 一个装置包括多个电极，其被配置为在装置的表面上方捕获离子，内侧线圈和多个外围线圈，每个外围线圈以与内侧线圈相关联的相应的径向角度定位，其中内侧线圈被配置为产生 具有第一取向的第一磁场，并且其中所述外围线圈被配置为产生具有与所述第一取向相对的第二取向的第二磁场。

公开(公告)号：US06483110B1

公开(公告)日：2002-11-19

申请号：US09528151

申请日：2000-03-17

Applicant: Toshikatsu Kaneyama

Inventor： Toshikatsu Kaneyama

IPC: H01J4900

CPC classification number: H01J37/05 ,  H01J49/463

Abstract: There is disclosed an energy filter for use in an electron microscope, the energy filter having an electron passage that can be evacuated more reliably than heretofore. The filter can be designed compactly without increasing the polepiece gaps or the spaces to accommodate coils. The energy filter has an electron-deflecting magnet assembly. This assembly comprises a pair of opposite polepiece bases, a pair of spacers interposed between the polepiece bases, and a yoke mounted to side surfaces of the polepiece bases. Magnetic polepieces and coil grooves of a given width are formed in the opposite surfaces of the polepiece bases. Bulges forming shunts are formed outside the coil grooves in the polepiece bases. O-ring grooves are formed in the spacers on the sides of the polepiece bases around the coil grooves. Electron passage grooves are formed in the opposite surfaces of the spacers to form the electron passage.

Abstract translation: 公开了一种用于电子显微镜的能量过滤器，该能量过滤器具有比以前更可靠地抽真空的电子通道。 过滤器可以紧凑设计，而不会增加极靴间隙或容纳线圈的空间。 能量过滤器具有电子偏转磁体组件。 该组件包括一对相对的导杆底座，一对间隔件插入在极靴底座之间，一个轭架安装在极靴底座的侧面上。 具有给定宽度的磁极和线圈槽形成在极靴底座的相对表面中。 形成分流器的凸起形成在极靴基座中的线圈槽的外侧。 O形圈槽形成在线圈槽周围的极靴基座侧面的间隔件中。 电子通道槽形成在间隔物的相对表面上以形成电子通道。

公开(公告)号：US5689112A

公开(公告)日：1997-11-18

申请号：US631059

申请日：1996-04-12

Applicant: Harald A. Enge ,  William A. Lanford

Inventor： Harald A. Enge ,  William A. Lanford

IPC: G01Q90/00 ,  H01J37/252 ,  H01J49/44

CPC classification number: H01J49/463 ,  H01J37/252 ,  H01J2237/0225 ,  H01J2237/053 ,  H01J2237/1207

Abstract: Surface contamination of silicon wafers is detected by a combined beam-deflecting magnet and magnetic spectrometer system. Heavy ions are directed onto the surface of a silicon wafer through the beam-deflecting magnet, and ions back-scattered from contaminants in the surface of the wafer pass through the magnetic spectrometer onto a focal-plane detector. One or more Einzel lenses prevent ions back-scattered from the silicon in the wafer from reaching the detector.

Abstract translation: 通过组合的光束偏转磁体和磁谱仪系统检测硅晶片的表面污染。 重离子通过光束偏转磁体被引导到硅晶片的表面上，并且从晶片表面的污染物反向散射的离子通过磁性光谱仪进入焦平面检测器。 一个或多个Einzel透镜防止从晶片中的硅反向散射的离子到达检测器。

公开(公告)号：US10002751B2

公开(公告)日：2018-06-19

申请号：US15337016

申请日：2016-10-28

Applicant: NISSIN ION EQUIPMENT CO., LTD.

Inventor： Naoya Takahashi ,  Hideki Fujita ,  Yosuke Yoshimura ,  Shigeki Sakai

IPC: H01J37/30 ,  H01J49/42 ,  H01J49/06 ,  H01J37/317

CPC classification number: H01J49/421 ,  H01J37/3171 ,  H01J49/065 ,  H01J49/30 ,  H01J49/463

Abstract: An ion beam irradiation apparatus is provided. The apparatus includes an ion source, a mass separator, and an energy filter. The mass separator sorts dopant ions having a specific mass number and valence from an ion beam extracted from the ion source, and outputs the dopant ions. The energy filter is formed to define a beam passing region for allowing the ion beam to pass therethrough, and configured to have a given filter potential in response to application of a voltage thereto to separate passable ions capable of passing through the beam passing region and non-passable ions incapable of passing through the beam passing region, from each other by a difference in ion energy. The given filter potential is set such that the dopant ions are included in the passable ions, and a portion of unwanted ions which cannot be separated from the dopant ions by the mass separator are included in the non-passable ions.

公开(公告)号：US20170243730A1

公开(公告)日：2017-08-24

申请号：US15337016

申请日：2016-10-28

Applicant: NISSIN ION EQUIPMENT CO., LTD.

Inventor： Naoya TAKAHASHI ,  Hideki FUJITA ,  Yosuke YOSHIMURA ,  Shigeki SAKAI

IPC: H01J49/42 ,  H01J49/06

CPC classification number: H01J49/421 ,  H01J37/3171 ,  H01J49/065 ,  H01J49/30 ,  H01J49/463

Abstract: An ion beam irradiation apparatus is provided. The apparatus includes an ion source, a mass separator, and an energy filter. The mass separator sorts dopant ions having a specific mass number and valence from an ion beam extracted from the ion source, and outputs the dopant ions. The energy filter is formed to define a beam passing region for allowing the ion beam to pass therethrough, and configured to have a given filter potential in response to application of a voltage thereto to separate passable ions capable of passing through the beam passing region and non-passable ions incapable of passing through the beam passing region, from each other by a difference in ion energy. The given filter potential is set such that the dopant ions are included in the passable ions, and a portion of unwanted ions which cannot be separated from the dopant ions by the mass separator are included in the non-passable ions.

公开(公告)号：US09548191B2

公开(公告)日：2017-01-17

申请号：US14742346

申请日：2015-06-17

Applicant: Honeywell International Inc.

Inventor： Daniel Youngner

IPC: H01J49/06

CPC classification number: H01J49/06 ,  B82Y10/00 ,  G06N99/002 ,  G21K1/00 ,  H01J49/463 ,  H01L29/94

Abstract: Devices, systems, and methods for ion trapping with integrated electromagnets are described herein. One device includes a plurality of electrodes configured to trap an ion above a surface of the device, a medial coil and a plurality of peripheral coils, each positioned at a respective radial angle associated with the medial coil, wherein the medial coil is configured to generate a first magnetic field having a first orientation, and wherein the peripheral coils are configured to generate a second magnetic field having a second orientation that opposes the first orientation.

Abstract translation: 本文描述了具有集成电磁体的离子捕获的装置，系统和方法。 一个装置包括多个电极，其被配置为在装置的表面上方捕获离子，内侧线圈和多个外围线圈，每个外围线圈以与内侧线圈相关联的相应的径向角度定位，其中内侧线圈被配置为产生 具有第一取向的第一磁场，并且其中所述外围线圈被配置为产生具有与所述第一取向相对的第二取向的第二磁场。