公开(公告)号：US20040256543A1

公开(公告)日：2004-12-23

申请号：US10866112

申请日：2004-06-14

Applicant: ASMO CO., LTD.

Inventor： Hidenori Ishihara

IPC: G02B006/36 ,  G01J001/42 ,  G01J005/08

CPC classification number: G01L1/243 ,  E05F15/42 ,  E05F15/43 ,  E05F2015/434

Abstract: A pressure-sensitive sensor which is a load detecting device of the present invention is structured to include: an optical fiber of a predetermined length; a light-emitting element, disposed at a longitudinal direction one end side of the optical fiber, for emitting light and making the light incident from one end of the optical fiber; a light-receiving element, disposed at a longitudinal direction other end side of the optical fiber, for receiving light which has passed through the optical fiber and outputting a signal corresponding to an amount of received light; and a power source wire for light-emission and a ground wire for light-emission which are wound around an outer periphery of the optical fiber, and are formed in spiral forms along the outer periphery, and are connected to the light-emitting element. The power source wire for light-emission, which forms a spiral form at the outer periphery of the optical fiber, functions as a pressure element and improves sensitivity of the pressure-sensitive sensor.

Abstract translation: 作为本发明的负载检测装置的压敏传感器被构造成包括：预定长度的光纤; 发光元件，其设置在所述光纤的长度方向的一端侧，用于发光并使从所述光纤的一端入射的光; 光接收元件，其设置在所述光纤的长度方向的另一端侧，用于接收已经通过所述光纤的光并输出与​​所接收的光量对应的信号; 以及用于发光的电源线和用于发光的接地线，其缠绕在光纤的外周，并且沿着外周形成为螺旋形，并且连接到发光元件。 在光纤外周形成螺旋形的发光用电源线用作压力元件，提高压敏传感器的灵敏度。

公开(公告)号：US20040195518A1

公开(公告)日：2004-10-07

申请号：US10622348

申请日：2003-07-19

Inventor： Gou-Chung Chi ,  Iinn-Kong Sheu ,  Meng-Che Chen ,  Min-Lum Lee

IPC: G01J001/42

CPC classification number: G01J1/429 ,  H01L31/03529 ,  H01L31/1035 ,  H01L31/184 ,  Y02E10/544 ,  Y02P70/521

Abstract: The present invention relates to an ultraviolet detector and manufacture method thereof, in which a buffer layer is formed on a baseplate and a P-type GaN layer is formed on the baseplate by using epitaxial method. By availing ion-distribution-and-vegetation technology, a first N-type GaN layer is vegetated and invested in the P-type GaN layer by distributing and vegetating Sinull ions in that layer, and a second N-type GaN layer having a thicker ion concentration is invested in the N-type GaN layer. Finally, an annular and a circular metallic layer are formed between the P-type GaN layer and the first N-type GaN layer as well as inside the second N-type GaN layer, respectively, to serve for respective ohmic contact layers. The present invention is characterized in that an incident light can project upon a depletion layer of the GaN planar structure to have the detection efficiency significantly improved.

Abstract translation: 紫外检测器及其制造方法技术领域本发明涉及一种紫外线检测器及其制造方法，其中缓冲层形成在基板上，并且通过外延法在基板上形成P型GaN层。 通过利用离子分布和植被技术，通过在该层中分布和植被Si +离子将第一N型GaN层植被并投入P型GaN层，并且将第二N型GaN层 在N型GaN层中投入较厚的离子浓度。 最后，在P型GaN层和第一N型GaN层之间以及第二N型GaN层内分别形成环状和圆形的金属层，以用于各自的欧姆接触层。 本发明的特征在于入射光可以突出在GaN平面结构的耗尽层上，从而显着提高检测效率。

公开(公告)号：US20040099794A1

公开(公告)日：2004-05-27

申请号：US10276988

申请日：2002-11-21

Inventor： Marcus Egbert Kole

IPC: H01J040/14 ,  G01J001/42 ,  G01J005/08

CPC classification number: G02B6/4225 ,  G01D5/268 ,  G02B6/4246

Abstract: A receiving device for cooperation with an optical fiber is provided with a sensor (3). The sensor (3) comprises two or more distinct sensor elements (4a, . . . , 4d) delivering an output signal with a strength that depends on the intensity applied to the sensor element (4a, . . . , 4d). A greatest dimension (a) of the sensor element (4a, . . . , 4d) is at most equal to half the diameter of a diffraction-limited spot (5) of the beam (2) exiting the optic fiber (1) at the location of the sensor elements (4a, . . . , 4d). A diametrical dimension (c) of the part of the sensor (3) provided with sensor elements (4a, . . . , 4d) is greater than the diameter of the beam (2) exiting from the optical fiber (1). Means (15) are present for determining the strength of the output signal from each sensor element (4a, . . . , 4d).

Abstract translation: 用于与光纤协作的接收设备设置有传感器（3）。 传感器（3）包括两个或更多个不同的传感器元件（4a，...，4d），输出信号的强度取决于施加到传感器元件（4a，...，4d）的强度。 传感器元件（4a，...，4d）的最大尺寸（a）至多等于离开光纤（1）的光束（2）的衍射限制光斑（5）的直径的一半， 传感器元件（4a，...，4d）的位置。 设置有传感器元件（4a，...，4d）的传感器（3）的部分的直径尺寸（c）大于从光纤（1）出射的光束（2）的直径。 存在用于确定来自每个传感器元件（4a，...，4d）的输出信号的强度的装置（15）。

公开(公告)号：US20040032580A1

公开(公告)日：2004-02-19

申请号：US10429948

申请日：2003-05-06

Inventor： Michel Piche ,  Guy Rousseau

IPC: G01J001/42

CPC classification number: G01J11/00 ,  G01J1/42

Abstract: There is described a method of characterizing a short laser pulse, the method comprising the steps of obtaining root-mean-square widths of the pulse through second order moments of the pulse; obtaining a spectral width of the pulse using the root-mean-square widths; obtaining a root-mean square temporal width of the pulse; and defining a Pulse Quality Factor proportional to a product of the spectral width and the temporal width. This approach does not require complete characterization of laser pulses and eliminates the need of any assumption to interpret autocorrelation traces. The method can be applied to pulses of arbitrary shape.

Abstract translation: 描述了表征短激光脉冲的方法，该方法包括以下步骤：通过脉冲的二阶矩获得脉冲的均方根宽度; 使用均方根宽度获得脉冲的光谱宽度; 获得脉冲的均方根时间宽度; 并且定义与光谱宽度和时间宽度的乘积成比例的脉冲质量因子。 这种方法不需要激光脉冲的完整表征，也不需要任何解释自相关曲线的假设。 该方法可以应用于任意形状的脉冲。

公开(公告)号：US20030218128A1

公开(公告)日：2003-11-27

申请号：US10154983

申请日：2002-05-24

Inventor： Christopher R. Schulz

IPC: G01J001/42

CPC classification number: G01J1/429 ,  C02F2201/326

Abstract: A tubular holder for an actinometric monitoring element for monitoring the irradiance of ultraviolet light within a liquid to be treated for microorganism control. The holder extends into the interior of a vessel or a pipeline that carries a fluid to be treated by exposure to ultraviolet light. A transparent end cap is carried at the end of the holder that is within the vessel or pipeline. Positioned within the holder is an actinometric monitoring element that can be either a transparent container for an actinometric solution or a photocell, each for sensing the irradiance of ultraviolet light emitted by light sources positioned within the vessel or pipeline. The holder is removably received in a sleeve that extends through the wall of the vessel or pipeline.

Abstract translation: 一种用于监测用于微生物控制的待处理液体内的紫外线的辐照度的放射性监测元件的管状保持器。 保持器延伸到通过暴露于紫外线下而承载要处理的流体的容器或管道的内部。 透明端盖在容器或管道内的支架的末端承载。 定位在保持器内的是一种放射性监测元件，其可以是用于光电子解决方案的透明容器或光电池，每个用于感测位于容器或管道内的光源发出的紫外线的辐照度。 保持器可移除地容纳在延伸穿过容器或管道的壁的套筒中。

公开(公告)号：US20030193030A1

公开(公告)日：2003-10-16

申请号：US10123491

申请日：2002-04-15

Inventor： William C. Fricke ,  Michael Ganopoulos

IPC: G01J001/42

CPC classification number: G01J1/4257 ,  G01J1/429 ,  G01J1/58 ,  G01S3/781 ,  G01S3/783

Abstract: A position sensor for ultraviolet beams includes a beam positioning member for directing an ultraviolet beam along a path; a downconverter member for converting the beam to visible light; a position sensing member for sensing position of visible light thereon; and relay optics for directing the visible light to the position sensing member; wherein the position sensing member is communicated with the beam positioning member for conveying information regarding position of the visible light to the beam positioning member.

Abstract translation: 用于紫外线束的位置传感器包括用于沿着路径引导紫外线的光束定位部件; 用于将光束转换成可见光的下变频部件; 用于检测其上的可见光的位置的位置检测构件; 以及用于将可见光引导到位置感测构件的中继光学器件; 其中所述位置检测构件与所述光束定位构件连通，用于将关于所述可见光的位置的信息传送到所述光束定位构件。

公开(公告)号：US20030146391A1

公开(公告)日：2003-08-07

申请号：US10357899

申请日：2003-02-04

Applicant: XTREME technologies GmbH

Inventor： Juergen Kleinschmidt ,  Uwe Stamm

IPC: G01J001/42

CPC classification number: G21K1/10 ,  G01J1/429 ,  G03F7/70558 ,  G03F7/7085

Abstract: The invention is directed to an arrangement for monitoring the energy radiated by an EUV radiation source with respect to energy variations acting in an illumination beam path, particularly for controlling the dose stability in EUV lithography for chip fabrication in semiconductor technology. The object of the invention, to find a novel possibility for detecting variations in the radiation emitted by EUV sources which allows fluctuations in pulse energy as well as spatial fluctuations acting in the illumination beam path to be detected, is met according to the invention in a radiation source having a plasma column emitting extreme ultraviolet radiation in that a detection beam path is separated from the illumination beam path with respect to the plasma column and has an energy monitoring unit for measuring pulse energy, so that the illumination beam path is not impaired by the energy measurement, and the detection beam path is matched to the illumination beam path with respect to bundle extension and optical losses.

Abstract translation: 本发明涉及一种用于监测由EUV辐射源辐射的能量相对于在照明光束路径中作用的能量变化的装置，特别是用于控制用于半导体技术中的芯片制造的EUV光刻中的剂量稳定性。 本发明的目的是为了发现一种用于检测由EUV源发射的辐射的变化的新型可能性，其允许脉冲能量的波动以及在待检测的照明光束路径中作用的空间波动，根据本发明，在 辐射源具有发射极紫外辐射的等离子体柱，因为检测光束路径相对于等离子体柱与照明光束路径分离，并且具有用于测量脉冲能量的能量监视单元，使得照明光束路径不受 能量测量和检测光束路径相对于束延伸和光损耗与照明光束路径匹配。

公开(公告)号：US20030111590A1

公开(公告)日：2003-06-19

申请号：US10359355

申请日：2003-02-05

Inventor： Philip E. Mattison

IPC: G01J001/42

CPC classification number: H04N5/37455

Abstract: Under an embodiment, a system includes an array of analog photocells; a first plurality of shift cells, each shift cell in the first plurality of shift cells being coupled to a corresponding analog photocell; and a second plurality of shift cells, each shift cell in the second plurality of shift cells being coupled to a corresponding shift cell in the first plurality of shift cells; and a differential operational amplifier having a first input coupled to a terminating output of the first plurality of shift cells and a second input coupled to a terminating output of the second plurality of shift cells.

Abstract translation: 在一个实施例中，系统包括模拟光电管阵列; 第一多个移位单元，第一多个移位单元中的每个移位单元耦合到相应的模拟光电管; 和第二多个移位单元，所述第二多个移位单元中的每个移位单元耦合到所述第一多个移位单元中的相应移位单元; 以及差分运算放大器，其具有耦合到所述第一多个移位单元的终端输出的第一输入和耦合到所述第二多个移位单元的终端输出的第二输入。

公开(公告)号：US20030094564A1

公开(公告)日：2003-05-22

申请号：US09990609

申请日：2001-11-21

Inventor： Edward Verdonk ,  David A. King ,  Richard D. Pering ,  Richard J. Pittaro ,  Shahida Rana ,  Frederick A. Stawitcke

IPC: G01J001/42

CPC classification number: G01N21/6452 ,  G01N21/645 ,  G01N2021/6463 ,  G01N2021/6482

Abstract: The present invention is directed to a micromirror optical multiplexer for directing light to an array of sensors. The micromirror optical multiplexer directs light from one or more sources onto multiple, coplanar sensors for the purpose of exciting fluorescence. The micromirror optical multiplexer includes at least one light source and a micromirror array having a top face and up to four side faces. Pivotable mirrors of the micromirror array are arranged in a multiple row, multiple column format on the top face. In addition, each of the side faces of the micromirror array has at least one row of pivotable mirrors. By pivoting one side face mirror and one top face mirror, a light source entering at one comer of the micromirror array can be directed to exit near normal incidence anywhere on the bottom of the device.

Abstract translation: 本发明涉及一种用于将光引导到传感器阵列的微镜光学多路复用器。 微镜光复用器将来自一个或多个源的光引导到多个共面传感器上，以激发荧光。 微镜光复用器包括至少一个光源和具有顶面和多达四个侧面的微镜阵列。 微镜阵列的透视镜在顶面以多列，多列格式排列。 此外，微镜阵列的每个侧面具有至少一排可枢转镜。 通过枢转一个侧面反射镜和一个顶面反射镜，进入微镜阵列的一个角落处的光源可以指向在装置底部的任何地方的正常入射附近出射。

公开(公告)号：US20030035102A1

公开(公告)日：2003-02-20

申请号：US09930131

申请日：2001-08-16

Inventor： Chris Dimas ,  John Kuta

IPC: G01J001/42

CPC classification number: G01J1/04 ,  G01J1/0266 ,  G01J1/0271 ,  G01J1/0407 ,  G01J1/0411

Abstract: A system and method for measuring radiation. In one embodiment, a radiometer includes an inlet port, a light sensor operatively coupled to the inlet port, and a direction sensor adapted to detect the orientation of the inlet port. In another aspect, a radiometer has a base, a housing pivotally mounted to the base, an aperture in the housing, a radiation sensor in communication with the aperture, and a direction sensor adapted to detect the orientation of the housing relative to the base. In yet another aspect, a radiometer has a housing including at least one aperture, and a radiation sensor adapted to detect the irradiance and direction of origin of radiation entering the aperture. A method is disclosed for detecting the irradiance of radiant energy from a source in at least two dimensions. The method involves the steps of providing a radiometer of the present invention and positioning the radiometer in the path of radiant energy emitted from the source.

Abstract translation: 辐射测量系统和方法。 在一个实施例中，辐射计包括入口端口，可操作地耦合到入口端口的光传感器，以及适于检测入口端口的取向的方向传感器。 在另一方面，辐射计具有基座，枢转地安装到基座的壳体，壳体中的孔，与孔连通的辐射传感器，以及适于检测壳体相对于基座的取向的方向传感器。 在另一方面，辐射计具有包括至少一个孔的壳体和适于检测进入孔的辐射源和辐射方向的辐射传感器。 公开了一种用于在至少两个维度中检测来自源的辐射能的辐照度的方法。 该方法包括提供本发明的辐射计的步骤，并将辐射计定位在从源发射的辐射能的路径中。