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1.发明专利
公开(公告)号：JP2009037245A
公开(公告)日：2009-02-19
申请号：JP2008216969
申请日：2008-08-26
Applicant: Brewer Science Inc , ブルーワー サイエンス アイ エヌ シー.
Inventor： SHAO XIE , MEADOR JIM D , BHAVE MANDAR , KRISHNAMURTHY VANDANA , NOWAK KELLY A , FOWLER MICHELLE , DESHPANDE SHREERAM V
IPC: G03F7/11 , B32B7/02 , C08J3/24 , C09D5/00 , C09D7/12 , C09D105/00 , C09D133/00 , C09D161/20 , C09D163/00 , C09D167/00 , C09D171/00 , C09D179/08 , C09D201/00 , G03F7/004 , G03F7/09 , H01L21/027
CPC classification number: C08J3/241 , G03F7/091 , Y10S430/151
Abstract: PROBLEM TO BE SOLVED: To provide an anti-reflective coating composition that does not crosslink prior to a bake stage in microlithographic processes so as to solve problems of spin bowl incompatibility and stability of an anti-reflective coating. SOLUTION: The anti-reflective composition includes a polymer dissolved or dispersed in a solvent system, a crosslinking agent, a light attenuating compound and a strong acid. The polymer is selected from a group consisting of acrylic polymers, polyesters, epoxy novolacs, polysaccharides, polyethers, polyimides and mixtures thereof. The crosslinking agent is selected from a group consisting of amino resin and epoxy resin. The light attenuating compound is selected from a group consisting of phenolic compounds, carboxylic acid, phosphoric acid, cyano compounds, benzene, naphthalene and anthracene. The composition contains the strong acid by less than 1.0 mass% based upon the total mass of the composition taken as 100 mass%. COPYRIGHT: (C)2009,JPO&INPIT
Abstract translation: 要解决的问题：提供在微光刻工艺中在烘烤阶段之前不交联的抗反射涂料组合物，以解决纺丝碗不相容性和抗反射涂层的稳定性的问题。 抗反射组合物包括溶解或分散在溶剂体系中的聚合物，交联剂，光衰减化合物和强酸。 聚合物选自丙烯酸聚合物，聚酯，环氧酚醛清漆，多糖，聚醚，聚酰亚胺及其混合物。 交联剂选自氨基树脂和环氧树脂。 光衰减化合物选自酚类化合物，羧酸，磷酸，氰基化合物，苯，萘和蒽。 组合物以占组合物总质量的100质量％为基准，含有小于1.0质量％的强酸。 版权所有（C）2009，JPO＆INPIT
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Patent Agency Ranking2.发明专利
公开(公告)号：AU2003282554A8
公开(公告)日：2004-05-04
申请号：AU2003282554
申请日：2003-10-07
Applicant: BREWER SCIENCE INC
Inventor： BHAVE MANDAR , FOWLER MICHELLE , WINDSOR MICHELLE , NEEF CHARLES J
Abstract: Novel anti-reflective coatings comprising small molecules (e.g., less than about 5,000 g/mole) in lieu of high molecular weight polymers and methods of using those coatings are provided. In one embodiment, aromatic carboxylic acids are used as the chromophores, and the resulting compounds are blended with a crosslinking agent and an acid. Anti-reflective coating films prepared according to the invention exhibit improved properties compared to high molecular weight polymeric anti-reflective coating films. The small molecule anti-reflective coatings have high etch rates and good via fill properties. Photolithographic processes carried out with the inventive material result in freestanding, 110-nm profiles.
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3.发明专利
公开(公告)号：AU2003282554A1
公开(公告)日：2004-05-04
申请号：AU2003282554
申请日：2003-10-07
Applicant: BREWER SCIENCE INC
Inventor： FOWLER MICHELLE , WINDSOR MICHELLE , NEEF CHARLES J , BHAVE MANDAR
Abstract: Novel anti-reflective coatings comprising small molecules (e.g., less than about 5,000 g/mole) in lieu of high molecular weight polymers and methods of using those coatings are provided. In one embodiment, aromatic carboxylic acids are used as the chromophores, and the resulting compounds are blended with a crosslinking agent and an acid. Anti-reflective coating films prepared according to the invention exhibit improved properties compared to high molecular weight polymeric anti-reflective coating films. The small molecule anti-reflective coatings have high etch rates and good via fill properties. Photolithographic processes carried out with the inventive material result in freestanding, 110-nm profiles.
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4.发明申请BOTTOM ANTI-REFLECTIVE COATINGS DERIVED FROM SMALL CORE MOLECULES WITH MULTIPLE EPOXY MOIETIES 审中-公开从具有多种环氧基团的小核分子衍生的底部抗反射涂层
公开(公告)号：WO2004034435A3
公开(公告)日：2005-07-28
申请号：PCT/US0332091
申请日：2003-10-07
Applicant: BREWER SCIENCE INC
Inventor： NEEF CHARLES J , BHAVE MANDAR , FOWLER MICHELLE , WINDSOR MICHELLE
CPC classification number: G03F7/091 , C09B69/00 , Y10S430/111 , Y10T428/31511 , Y10T428/31515
Abstract: Novel anti-reflective coatings comprising small molecules (e.g., less than about 5,000 g/mole) in lieu of high molecular weight polymers and methods of using those coatings are provided. In one embodiment, aromatic carboxylic acids are used as the chromophores, and the resulting compounds are blended with a crosslinking agent and an acid. Anti-reflective coating films prepared according to the invention exhibit improved properties compared to high molecular weight polymeric anti-reflective coating films. The small molecule anti-reflective coatings have high etch rates and good via fill properties. Photolithographic processes carried out with the inventive material result in freestanding, 110-nm profiles.
Abstract translation: 提供了包含小分子（例如小于约5,000g / mol）代替高分子量聚合物的新型抗反射涂层以及使用这些涂层的方法。 在一个实施方案中，使用芳族羧酸作为发色团，并将所得化合物与交联剂和酸共混。 与高分子量聚合物抗反射涂膜相比，根据本发明制备的抗反射涂膜显示出改进的性能。 小分子抗反射涂层具有高蚀刻速率和良好的通孔填充性能。 使用本发明材料进行的光刻工艺产生独立的110nm轮廓。
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5.发明公开ANTI-REFLECTIVE COATING COMPOSITION WITH IMPROVED SPIN BOWL COMPATIBILITY 审中-公开具有改善的相容SPIN水库防反射涂层的成分
公开(公告)号：EP1392508A4
公开(公告)日：2006-06-07
申请号：EP02762137
申请日：2002-04-15
Applicant: BREWER SCIENCE INC
Inventor： SHAO XIE , MEADOR JIM D , BHAVE MANDAR , KRISHNAMURTHY VANDANA , NOWAK KELLY A , FOWLER MICHELLE , DESHPANDE SHREERAM V
IPC: G03F7/11 , B32B7/02 , C08J3/24 , C09D5/00 , C09D7/12 , C09D105/00 , C09D133/00 , C09D161/20 , C09D163/00 , C09D167/00 , C09D171/00 , C09D179/08 , C09D201/00 , G03F7/004 , G03F7/09 , H01L21/027 , B32B27/36 , G03C1/492
CPC classification number: C08J3/241 , G03F7/091 , Y10S430/151
Abstract: Anti-reflective compositions and methods of using those compositions to form circuits are provided. The compositions comprise a polymer dissolved or dispersed in a solvent system. In one embodiment, the compositions comprise less than about 0.3% by weight of a strong acid. In another embodiment, the weight ratio of strong acid to weak acid in the composition is from about 0:100 to about 25:75. Examples of preferred weak acid compounds include phenolic compounds (e.g., Bisphenol S, Bisphenol A, alpha-cyano-4-hydroxycinnamic acid), carboxylic acids (e.g., acetic acid), phosphoric acid, and cyano compounds. The polymer and other ingredients are preferably physically mixed in a solvent system. The resulting compositions are spin bowl compatible (i.e., they do not crosslink prior to the bake stages of the microlithographic processes or during storage at room temperature).
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6.发明公开BOTTOM ANTI-REFLECTIVE COATINGS DERIVED FROM SMALL CORE MOLECULES WITH MULTIPLE EPOXY MOIETIES 有权来自核心分子的底部抗反射涂层多重环氧树脂涂层
公开(公告)号：EP1573785A4
公开(公告)日：2010-11-10
申请号：EP03774743
申请日：2003-10-07
Applicant: BREWER SCIENCE INC
Inventor： NEEF CHARLES J , BHAVE MANDAR , FOWLER MICHELLE , WINDSOR MICHELLE
CPC classification number: G03F7/091 , C09B69/00 , Y10S430/111 , Y10T428/31511 , Y10T428/31515
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