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    Method for assembly of wafer probe
    1.
    发明专利
    Method for assembly of wafer probe 审中-公开
    WAFER探针组装方法

    公开(公告)号：JP2008122403A

    公开(公告)日：2008-05-29

    申请号：JP2007330626

    申请日：2007-12-21

    Applicant: Cascade Microtech Inc ,  カスケード マイクロテック インコーポレイテッドCascade Microtech,Incorporated

    Inventor： HAYDEN LEONARD ,  MARTIN JOHN ,  ANDREWS MIKE

    IPC: G01R1/073 ,  G01R31/26 ,  G01R1/06 ,  H01L21/66

    CPC classification number: G01R1/06772 ,  G01R1/07342 ,  Y10T29/49121 ,  Y10T29/49147 ,  Y10T29/49204 ,  Y10T29/49208

    Abstract: PROBLEM TO BE SOLVED: To provide a method for an assembly of many contact points type probe which is easy configuration in order to perform a high-frequency test of an integrated circuit or other microelectronics elements. SOLUTION: The probe assembly method includes (a) the process of forming a supporting member 14, (b) the process of preparing one-assembly consisting of a plurality of contact fingers 16 and the supporting members 14 in which the plurality of contact fingers 16 are maintained with a predetermined arrangement with the supporting tab 26 at the non-supporting state by the supporting part 14, (c) the process of attaching the plurality of the contact fingers 16 to the supporting part 14, and (d) the process of removing the supporting tab 26. COPYRIGHT: (C)2008,JPO&INPIT

    Abstract translation: 要解决的问题：提供一种用于组装许多接触点型探针的方法，其易于构造以执行集成电路或其它微电子元件的高频测试。 解决方案：探针组合方法包括（a）形成支撑构件14的过程，（b）制备由多个接触指16和支撑构件14组成的单组件的过程，其中多个 接触指状物16以预定的布置保持，支撑突片26由支撑部分14处于非支撑状态，（c）将多个接触指16附接到支撑部分14的过程，以及（d） 删除支撑片26的过程。版权所有（C）2008，JPO＆INPIT

    WAFER PROBE
    2.
    发明专利
    WAFER PROBE 审中-公开

    公开(公告)号：JP2002243761A

    公开(公告)日：2002-08-28

    申请号：JP2001369651

    申请日：2001-12-04

    Applicant: CASCADE MICROTECH INC

    Inventor： HAYDEN LEONARD ,  MARTIN JOHN ,  ANDREWS MIKE

    IPC: G01R31/26 ,  G01R1/06 ,  G01R1/073 ,  H01L21/66

    Abstract: PROBLEM TO BE SOLVED: To propose a multi-contact type probe easy to construct, used for high-frequency test of an integrated circuit or other microelectronic elements. SOLUTION: This probe is equipped with a substantially rigid support part and a multitude of contact fingers supported by and extending from the support part. The contact fingers are disposed as an integral assembly, thereby keeping the multitude of contact fingers in a prescribed arrangement when they are mounted on the support body.

    LINE-REFLECT-REFLECT MATCH CALIBRATION
    3.
    发明申请
    LINE-REFLECT-REFLECT MATCH CALIBRATION 审中-公开
    线反射匹配校准

    公开(公告)号：WO2008011035A2

    公开(公告)日：2008-01-24

    申请号：PCT/US2007016220

    申请日：2007-07-17

    Applicant: CASCADE MICROTECH INC ,  HAYDEN LEONARD

    Inventor： HAYDEN LEONARD

    IPC: G01R35/00

    CPC classification number: G01R27/32 ,  G01R35/005

    Abstract: A method of compensating a calibration for a vector network analyzer includes performing calibrations on at least a pair of ports to determine error terms associated with each port wherein at least one of the error terms is based upon selecting the reactance of the load standard from a set of potential values in a manner such that the reference reactance errors are reduced.

    Abstract translation: 补偿矢量网络分析仪的校准的方法包括在至少一对端口上执行校准以确定与每个端口相关联的误差项，其中至少一个误差项基于从一组中选择负载标准的电抗 的电位值，使得参考电抗误差减小。

    7.
    发明专利
    未知

    公开(公告)号：DE10393724B4

    公开(公告)日：2008-11-20

    申请号：DE10393724

    申请日：2003-10-28

    Applicant: CASCADE MICROTECH INC

    Inventor： HAYDEN LEONARD ,  RUMBAUGH SCOTT ,  ANDREWS MIKE

    IPC: G01R1/067 ,  G01R31/28 ,  H01L21/66

    Abstract: The apparatus has an impedance matching resistor (70) with a port coupled to a modulation signal port of a bias tee (64) to receive a signal part and another port. A signal contact tip selectively engages with a pad (46) of a device under test and connects to the latter port of the resistor. A termination resistor (74) linked to the signal port of another bias tee (66) terminates a signal path of a signal component.

    8.
    发明专利
    未知

    公开(公告)号：DE10393724T5

    公开(公告)日：2005-10-13

    申请号：DE10393724

    申请日：2003-10-28

    Applicant: CASCADE MICROTECH INC

    Inventor： HAYDEN LEONARD ,  RUMBAUGH SCOTT ,  ANDREWS MIKE

    IPC: G01R1/067 ,  G01R31/28 ,  H01L21/66 ,  G01R31/02

    Abstract: The apparatus has an impedance matching resistor (70) with a port coupled to a modulation signal port of a bias tee (64) to receive a signal part and another port. A signal contact tip selectively engages with a pad (46) of a device under test and connects to the latter port of the resistor. A termination resistor (74) linked to the signal port of another bias tee (66) terminates a signal path of a signal component.

    A PROBE FOR COMBINED SIGNALS
    9.
    发明专利
    A PROBE FOR COMBINED SIGNALS 未知

    公开(公告)号：AU2003288936A1

    公开(公告)日：2004-06-03

    申请号：AU2003288936

    申请日：2003-10-28

    Applicant: CASCADE MICROTECH INC

    Inventor： HAYDEN LEONARD ,  RUMBAUGH SCOTT ,  ANDREWS MIKE

    IPC: G01R1/067 ,  G01R31/28 ,  H01L21/66 ,  G01R31/02

    Abstract: The apparatus has an impedance matching resistor (70) with a port coupled to a modulation signal port of a bias tee (64) to receive a signal part and another port. A signal contact tip selectively engages with a pad (46) of a device under test and connects to the latter port of the resistor. A termination resistor (74) linked to the signal port of another bias tee (66) terminates a signal path of a signal component.

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