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公开(公告)号:WO2004107401A3
公开(公告)日:2005-03-31
申请号:PCT/US2004012806
申请日:2004-04-26
Applicant: CASCADE MICROTECH INC , GLEASON K REED , LESHER TIM , ANDREWS MIKE , MARTIN JOHN
Inventor: GLEASON K REED , LESHER TIM , ANDREWS MIKE , MARTIN JOHN
CPC classification number: G01R1/07342 , G01R1/06738 , G01R1/06772
Abstract: A probe measurement system for measuring the electrical characteristics of integrated circuits at high frequencies include a coaxial cable (40) for supporting and electrically connected to a microstrip probe having a dielectric substrate (88), an elongated conductor (92), a conductive member (90) electrically connected to a ground signal support by a second side of the substrate (88) and wherein the conductive member is under a majority of the length of an elongate conductor located on a first side of the substrate, a conductive path (94) between the first and second side of the substrate (88), and a contact electrically connected to the conductive path for making contact with a device under test.
Abstract translation: 用于测量高频集成电路的电特性的探针测量系统包括用于支撑并电连接到具有电介质基片(88)的微带探针的同轴电缆(40),细长导体(92),导电部件 90),其由所述基板(88)的第二侧电连接到接地信号支撑件,并且其中所述导电构件位于位于所述基板的第一侧上的细长导体的长度的大部分,导电路径(94) 在基板(88)的第一和第二侧之间,以及电连接到导电路径以便与被测器件接触的触点。
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公开(公告)号:WO2004107400A2
公开(公告)日:2004-12-09
申请号:PCT/US2004012248
申请日:2004-04-22
Applicant: CASCADE MICROTECH INC , STEWART CRAIG , LORD ANTHONY , SPENCER JEFF , BURCHAM TERRY , MCMANN PETER , JONES RODD , DUNKLEE JOHN , LESHER TIM , NEWTON DAVID
Inventor: STEWART CRAIG , LORD ANTHONY , SPENCER JEFF , BURCHAM TERRY , MCMANN PETER , JONES RODD , DUNKLEE JOHN , LESHER TIM , NEWTON DAVID
CPC classification number: G01R31/2887
Abstract: A chuck includes a conductive element that contacts a device under test in a location on the chuck.
Abstract translation: 卡盘包括在卡盘上的位置接触被测设备的导电元件。
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公开(公告)号:WO03100445A2
公开(公告)日:2003-12-04
申请号:PCT/US0316322
申请日:2003-05-23
Applicant: CASCADE MICROTECH INC , GLEASON K REED
Inventor: LESHER TIM , ANDREWS MIKE , MARTIN JOHN , DUNKLEE JOHN , HAYDEN LEONARD , SAFWAT AMR M E , STRID ERIC
CPC classification number: G01R1/06772 , G01R1/06711 , G01R1/06755 , G01R1/06777
Abstract: A probe measurement system (40-43, 90, 80, 85, 90, 94) for measuring the electrical characteristics of integrated circuits or other microelectronic devices at high frequencies.
Abstract translation: 用于测量高频下集成电路或其他微电子器件的电气特性的探针测量系统(40-43,90,80,85,90,94)。
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公开(公告)号:AU2003233659A1
公开(公告)日:2003-12-12
申请号:AU2003233659
申请日:2003-05-23
Applicant: CASCADE MICROTECH INC
Inventor: STRID ERIC , LESHER TIM , ANDREWS MIKE , MARTIN JOHN , DUNKLEE JOHN , HAYDEN LEONARD , SAFWAT AMR M E
Abstract: A probe measurement system for measuring the electrical characteristics of integrated circuits or other microelectronic devices at high frequencies.
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公开(公告)号:EP1509776A4
公开(公告)日:2010-08-18
申请号:EP03729099
申请日:2003-05-23
Applicant: CASCADE MICROTECH INC
Inventor: LESHER TIM , ANDREWS MIKE , MARTIN JOHN , DUNKLEE JOHN , HAYDEN LEONARD , SAFWAT AMR M E , STRID ERIC
CPC classification number: G01R1/06772 , G01R1/06711 , G01R1/06755 , G01R1/06777
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公开(公告)号:EP1627235A4
公开(公告)日:2010-08-18
申请号:EP04785615
申请日:2004-04-26
Applicant: CASCADE MICROTECH INC
Inventor: GLEASON K REED , LESHER TIM , ANDREWS MIKE , MARTIN JOHN
CPC classification number: G01R1/07342 , G01R1/06738 , G01R1/06772
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