公开(公告)号：EP0724177A3

公开(公告)日：1997-12-29

申请号：EP95119050

申请日：1995-12-04

Applicant: IBM

Inventor： DOANY FUAD ELIAS ,  FLAGELLO DONIS GEORGE ,  ROSENBULTH ALAN EDWARD

IPC: G02F1/13 ,  G02B27/28 ,  G02F1/1335 ,  G02F1/13357 ,  G03B21/00 ,  H04N9/31

CPC classification number: H04N9/3114 ,  G02B27/283 ,  G02F2001/133622

公开(公告)号：DE69528446D1

公开(公告)日：2002-11-07

申请号：DE69528446

申请日：1995-12-04

Applicant: IBM

Inventor： DOANY FUAD ELIAS ,  FLAGELLO DONIS GEORGE ,  ROSENBULTH ALAN EDWARD

IPC: G02F1/13 ,  G02B27/28 ,  G02F1/1335 ,  G02F1/13357 ,  G03B21/00 ,  H04N9/31

Abstract: The projection display comprises two reflective liquid crystal light valves positioned and aligned relative to each other on two adjacent surfaces of a polarizing beam splitter cube. Illumination is introduced through a third face of the cube, and a projection lens images the two light valves through a fourth surface of the polarizing beam splitter cube. Colour-sequential and alternating polarization states are provided by a colour filter wheel or cage containing individual facets of dichroic or colour glass filters, such that as the wheel or cage rotates, the filters change and produce sequential red, green and blue outputs. In addition, the polarization of adjacent colours is alternated by adding a polarizing film onto each colour filter.

公开(公告)号：DE69528446T2

公开(公告)日：2003-05-15

申请号：DE69528446

申请日：1995-12-04

Applicant: IBM

Inventor： DOANY FUAD ELIAS ,  FLAGELLO DONIS GEORGE ,  ROSENBULTH ALAN EDWARD

IPC: G02F1/13 ,  G02B27/28 ,  G02F1/1335 ,  G02F1/13357 ,  G03B21/00 ,  H04N9/31

Abstract: The projection display comprises two reflective liquid crystal light valves positioned and aligned relative to each other on two adjacent surfaces of a polarizing beam splitter cube. Illumination is introduced through a third face of the cube, and a projection lens images the two light valves through a fourth surface of the polarizing beam splitter cube. Colour-sequential and alternating polarization states are provided by a colour filter wheel or cage containing individual facets of dichroic or colour glass filters, such that as the wheel or cage rotates, the filters change and produce sequential red, green and blue outputs. In addition, the polarization of adjacent colours is alternated by adding a polarizing film onto each colour filter.

公开(公告)号：DE3785322D1

公开(公告)日：1993-05-13

申请号：DE3785322

申请日：1987-12-23

Applicant: IBM

Inventor： FLAGELLO DONIS GEORGE ,  SHAW JANE MARGARET ,  WITMAN DAVID FRANK

IPC: G03F1/00 ,  G03F1/54 ,  H01L21/027

Abstract: A multi-layer structure that includes a transparent dielectric substrate, a layer of a nickel-containing steel alloy, and a layer of copper and/or chromium. The structure is used as multi-density photomasks for example. The process for fabricating multi-layer structure, like a multi-density photomask comprises: a) providing a transparent dielectric substrate having a steel layer and a layer of a metal, like of copper, thereon with the layer of said steel is deposited on top of said layer of a metal or vice versa; b) providing a layer of photoresist material on top of the structure provided in step (a); c) exposing and developing said layer of photoresist material; d) selectively etching exposed portion of said metal or said steel; e) selectively etching exposed portion of said metal or said steel not etched in step (d); f) exposing and developing photoresist on the said layer of said metal or said steel etched in step (d); g) selectively etching exposed portion of said metal or said steel of step (f); and h) removing the photoresist. t

公开(公告)号：DE69304503D1

公开(公告)日：1996-10-10

申请号：DE69304503

申请日：1993-12-13

Applicant: IBM

Inventor： BAILEY FREDERIC DENIS ,  BUCHANAN DOUGLAS ANDREW ,  CALLEGARI ALESSANDRO CESARE ,  CLEARFIELD HOWARD MARC ,  DOANY FUAD ELIAS ,  FLAGELLO DONIS GEORGE ,  HOVEL HAROLD JOHN ,  LATULIPE DOUGLAS CHARLES ,  LUSTIG NAFTALI ELIAHU ,  POMERENE ANDREW THOMAS STEWART ,  PURUSHOTHAMAN SAMPATH ,  SCHERPEREEL CHRISTOPHER MICHAE ,  SEEGER DAVID EARLE ,  SHAW JANE MARGARET

IPC: G03F1/08 ,  C01B31/06 ,  C08J7/06 ,  C23C8/26 ,  C23C8/50 ,  C23C16/26 ,  C23C16/27 ,  C23C16/50 ,  C30B29/04 ,  G02B1/10 ,  G11B5/255 ,  H01L21/31 ,  H01L21/314

Abstract: The present invention relates to an improved method of depositing a diamond-like carbon film onto a substrate by low temperature plasma-enhanced chemical vapor deposition (PECVD) from a hydrocarbon/helium plasma. More specifically, the diamond-like carbon films of the present invention are deposited onto the substrate by employing acetylene which is heavily diluted with helium as the plasma gas. The films formed using the process of the present invention are characterized as being amorphous and having dielectric strengths comparable to those normally observed for diamond films. More importantly, however is that the films produced herein are thermally stable, optically transparent, absorbent in the ultraviolet range and hard thus making them extremely desirable for a wide variety of applications.

公开(公告)号：DE3784961D1

公开(公告)日：1993-04-29

申请号：DE3784961

申请日：1987-04-01

Applicant: IBM

Inventor： FLAGELLO DONIS GEORGE ,  WILCZYNSKI JANUSZ STANISLAW ,  WITMAN DAVID FRANK

IPC: H01L23/522 ,  H01L21/48 ,  H01L21/768 ,  H05K3/00 ,  H05K3/40 ,  H05K3/46 ,  H01L21/02 ,  H01L21/90 ,  H01L23/52

公开(公告)号：DE69304503T2

公开(公告)日：1997-03-20

申请号：DE69304503

申请日：1993-12-13

Applicant: IBM

Inventor： BAILEY FREDERIC DENIS ,  BUCHANAN DOUGLAS ANDREW ,  CALLEGARI ALESSANDRO CESARE ,  CLEARFIELD HOWARD MARC ,  DOANY FUAD ELIAS ,  FLAGELLO DONIS GEORGE ,  HOVEL HAROLD JOHN ,  LATULIPE DOUGLAS CHARLES ,  LUSTIG NAFTALI ELIAHU ,  POMERENE ANDREW THOMAS STEWART ,  PURUSHOTHAMAN SAMPATH ,  SCHERPEREEL CHRISTOPHER MICHAE ,  SEEGER DAVID EARLE ,  SHAW JANE MARGARET

IPC: G03F1/08 ,  C01B31/06 ,  C08J7/06 ,  C23C8/26 ,  C23C8/50 ,  C23C16/26 ,  C23C16/27 ,  C23C16/50 ,  C30B29/04 ,  G02B1/10 ,  G11B5/255 ,  H01L21/31 ,  H01L21/314

Abstract: The present invention relates to an improved method of depositing a diamond-like carbon film onto a substrate by low temperature plasma-enhanced chemical vapor deposition (PECVD) from a hydrocarbon/helium plasma. More specifically, the diamond-like carbon films of the present invention are deposited onto the substrate by employing acetylene which is heavily diluted with helium as the plasma gas. The films formed using the process of the present invention are characterized as being amorphous and having dielectric strengths comparable to those normally observed for diamond films. More importantly, however is that the films produced herein are thermally stable, optically transparent, absorbent in the ultraviolet range and hard thus making them extremely desirable for a wide variety of applications.

公开(公告)号：DE3785322T2

公开(公告)日：1993-10-28

申请号：DE3785322

申请日：1987-12-23

Applicant: IBM

Inventor： FLAGELLO DONIS GEORGE ,  SHAW JANE MARGARET ,  WITMAN DAVID FRANK

IPC: G03F1/00 ,  G03F1/54 ,  H01L21/027

Abstract: A multi-layer structure that includes a transparent dielectric substrate, a layer of a nickel-containing steel alloy, and a layer of copper and/or chromium. The structure is used as multi-density photomasks for example. The process for fabricating multi-layer structure, like a multi-density photomask comprises: a) providing a transparent dielectric substrate having a steel layer and a layer of a metal, like of copper, thereon with the layer of said steel is deposited on top of said layer of a metal or vice versa; b) providing a layer of photoresist material on top of the structure provided in step (a); c) exposing and developing said layer of photoresist material; d) selectively etching exposed portion of said metal or said steel; e) selectively etching exposed portion of said metal or said steel not etched in step (d); f) exposing and developing photoresist on the said layer of said metal or said steel etched in step (d); g) selectively etching exposed portion of said metal or said steel of step (f); and h) removing the photoresist. t