公开(公告)号：JP2000026163A

公开(公告)日：2000-01-25

申请号：JP5559399

申请日：1999-03-03

Applicant: IBM

Inventor： DAVID LAWRENCE DANIEL ,  KNICKERBOCKER SARAH HUFFSMITH

IPC: H05K1/03 ,  C04B35/00 ,  C04B35/495 ,  C04B35/628 ,  H01L23/15

Abstract: PROBLEM TO BE SOLVED: To obtain a ceramic material having a low dielectric constant, a coefft. of thermal expansion equal to that of silicon and high mechanical strength by forming a substrate using ceramic particles coated with borosilicate glass having a specified compsn. by a sol-gel process and a binder and sintering the substrate. SOLUTION: Ceramic particles are uniformly coated with a borosilicate glass by a sol-gel process. The compsn. of the glass consists of 10-30 wt.% B2O3,

公开(公告)号：DE68915354D1

公开(公告)日：1994-06-23

申请号：DE68915354

申请日：1989-06-08

Applicant: IBM

Inventor： HERRON LESTER WYNN ,  KNICKERBOCKER SARAH HUFFSMITH ,  KUMAR ANANDA HOSAKERE ,  NMN NATARAJAN GOVINDARAJAN ,  REDDY SRINIVASA S N

IPC: C04B35/64 ,  B32B18/00 ,  C04B35/634 ,  C04B35/638 ,  H01L21/48 ,  H05K3/46 ,  C04B35/00

Abstract: There is disclosed the enhancement of the removal of carbon from multilayer ceramic substrate laminate during the sintering thereof. A multilayer ceramic substrate laminate having metallic lines and vias is provided with a reducible metal oxide in close proximity to the substrate laminate. The multilayer ceramic substrate laminate contains a polymeric binder which upon heating depolymerizes into carbon. The substrate laminate is sintered in an atmosphere which is reducing with respect to the reducible metal oxide and which is oxidizing with respect to the carbon.

公开(公告)号：DE68915354T2

公开(公告)日：1994-11-24

申请号：DE68915354

申请日：1989-06-08

Applicant: IBM

Inventor： HERRON LESTER WYNN ,  KNICKERBOCKER SARAH HUFFSMITH ,  KUMAR ANANDA HOSAKERE ,  NMN NATARAJAN GOVINDARAJAN ,  REDDY SRINIVASA S N

IPC: C04B35/64 ,  B32B18/00 ,  C04B35/634 ,  C04B35/638 ,  H01L21/48 ,  H05K3/46 ,  C04B35/00

Abstract: There is disclosed the enhancement of the removal of carbon from multilayer ceramic substrate laminate during the sintering thereof. A multilayer ceramic substrate laminate having metallic lines and vias is provided with a reducible metal oxide in close proximity to the substrate laminate. The multilayer ceramic substrate laminate contains a polymeric binder which upon heating depolymerizes into carbon. The substrate laminate is sintered in an atmosphere which is reducing with respect to the reducible metal oxide and which is oxidizing with respect to the carbon.