公开(公告)号：JPH01102302A

公开(公告)日：1989-04-20

申请号：JP22765088

申请日：1988-09-13

Applicant: IBM ,  LEITZ ERNST GMBH

Inventor： DUERIG URS THEODOR ,  FISCHER ULRICH CHRISTIAN ,  POHL WOLFGANG DIETER

IPC: G01B11/00 ,  G01B11/30 ,  G01Q10/00 ,  G01Q20/02 ,  G01Q60/18 ,  G01Q60/22 ,  G11B5/60 ,  G11B9/00 ,  G11B11/00 ,  G11B11/105 ,  G11B21/20

Abstract: PURPOSE: To improve sensitivity when changing distance to an optical energy and further an electrical quantity by coating a sensor with a continuous thin film in a condition so that a detection small piece is coated. CONSTITUTION: A sensor body is formed as a light waveguide of a laser beam 2 and has a light entrance side 3, an exit side 4 for light to be guided through a body 1, and a light exit side 10 for light to be diffracted within the body 1. A detection small piece 15 is arranged on a surface 5 of the body 1 between the entrance side 3 and the exit side 4 and operates as an antenna and is coated with a continuous thin film 16. Then, a surface 17 of a body M to be measured is measured by a measurement side 18, the gap of distance prescribed in reference to a reference side 14 is converted to the quantity of optical energy, and the quantity is converted to an electrical quantity by a detector means 11. Since the small piece 15 is coated with the thin metal film 16, incidence light can be properly separated from scattered light, thus improving antenna effect.

公开(公告)号：JPS6412201A

公开(公告)日：1989-01-17

申请号：JP12223288

申请日：1988-05-20

Applicant: IBM

Inventor： BEHA JOHANNES GEORG ,  BLACHA ARMIN UDO ,  CLAUBERG ROLF ,  MOELLER ROLF BERND GEORG ,  POHL WOLFGANG DIETER

IPC: H01J37/00 ,  G01B7/34 ,  G01N23/00 ,  G01N23/227 ,  G01N37/00 ,  G01Q10/00 ,  G01Q20/00 ,  G01Q20/02 ,  G01Q60/10 ,  G01Q60/12 ,  G01Q60/16

Abstract: PURPOSE: To realize femtosecond-order to picosecond-order time resolution and atomic-level space resolution by holding a tunnel chip at a tunnel distance above a sample and applying a tunnel voltage across the gap between the chip and sample, and then, supplying at least one pulsed laser. CONSTITUTION: A tunnel chip 1 is placed at a tunnel distance (namely, at about 1nm) above the surface 2 of a sample 3 to be investigated. A pulsed laser beam (pump beam) 4 is projected upon the surface 2 of the sample 3 from the chip 1 which is separated from the surface 2 by a distance by performing stroboscopic scanning. At every exciting pulse, thermoelectrons are generated at the place of collision and move in the sample 3. The dynamic response of a system including the material of the sample 3 and the electrons moving in the sample 3 is investigated by stroboscopic extraction. When another laser beam 5 is projected upon the surface 2 of the sample 3 near the tunnel chip 1 synchronously to the pump beam 4, the moving thermoelectrons are excited to a higher energy level.

公开(公告)号：AU599706B2

公开(公告)日：1990-07-26

申请号：AU7921187

申请日：1987-09-30

Applicant: IBM

Inventor： DUERIG URS THEODOR ,  GIMZEWSKI JAMES KAZIMIERZ ,  GRESCHNER JOHANN ,  POHL WOLFGANG DIETER ,  WOLTER OLAF

IPC: G01B7/34 ,  G01B7/00 ,  G01B21/30 ,  G01D5/04 ,  G01L1/00 ,  G01L1/04 ,  G01N13/00 ,  G01N23/00 ,  G01N37/00 ,  G01Q20/04 ,  G01Q40/00 ,  G01Q60/38 ,  G01Q70/14 ,  H01J37/26 ,  H01J37/28

公开(公告)号：BR8702319A

公开(公告)日：1988-02-17

申请号：BR8702319

申请日：1987-05-06

Applicant: IBM

Inventor： POHL WOLFGANG DIETER ,  DUERIG URS THEODOR ,  GIMZEWSKI JAMES KAZIMIERS

IPC: G01B7/34 ,  G01B21/30 ,  G01Q20/04 ,  G01Q80/00 ,  G11B9/00 ,  G11B9/08 ,  G11B9/14 ,  G11B17/34 ,  G11B19/20 ,  G11B21/00 ,  G11B25/04 ,  G11B5/127

Abstract: The storage unit comprises an array of tunnel tips (13) arranged at tunneling distance from a storage medium (2) which is capable of permitting digital information to be written or read through variations of the tunneling current. Each tunnel tip (13) is supported on its own cantilever beam (12) extending across a cavity (14) formed in a common substrate (15). Each cantilever beam (12) as well as the bottom of each cavity (14) are covered with an electrically conducting layer (16, 18) enabling the distance between each one of the tunnel tips (13) and the surface of the storage medium (2) to be electrostatically controlled. The storage medium (2) is attached to the free end of a piezoceramic bender, the end in operation performing a circular motion so that each tunnel tip (13) scans its associated area of the storage medium (2) along a circular track.

公开(公告)号：DE3679319D1

公开(公告)日：1991-06-20

申请号：DE3679319

申请日：1986-05-27

Applicant: IBM

Inventor： POHL WOLFGANG DIETER ,  DUERIG URS THEODOR ,  GIMZEWSKI JAMES KAZIMIERZ

IPC: G01B7/34 ,  G01B21/30 ,  G01Q20/04 ,  G01Q80/00 ,  G11B9/00 ,  G11B9/08 ,  G11B9/14 ,  G11B17/34 ,  G11B19/20 ,  G11B21/00 ,  G11B25/04

Abstract: The storage unit comprises an array of tunnel tips (13) arranged at tunneling distance from a storage medium (2) which is capable of permitting digital information to be written or read through variations of the tunneling current. Each tunnel tip (13) is supported on its own cantilever beam (12) extending across a cavity (14) formed in a common substrate (15). Each cantilever beam (12) as well as the bottom of each cavity (14) are covered with an electrically conducting layer (16, 18) enabling the distance between each one of the tunnel tips (13) and the surface of the storage medium (2) to be electrostatically controlled. The storage medium (2) is attached to the free end of a piezoceramic bender, the end in operation performing a circular motion so that each tunnel tip (13) scans its associated area of the storage medium (2) along a circular track.

公开(公告)号：AU7325787A

公开(公告)日：1987-12-03

申请号：AU7325787

申请日：1987-05-21

Applicant: IBM

Inventor： POHL WOLFGANG DIETER ,  DUERIG URS THEODOR ,  GIMZEWSKI JAMES KAZIMIERZ

IPC: G01B7/34 ,  G01B21/30 ,  G01Q20/04 ,  G01Q80/00 ,  G11B9/00 ,  G11B9/08 ,  G11B9/14 ,  G11B17/34 ,  G11B19/20 ,  G11B21/00 ,  G11B25/04

Abstract: The storage unit comprises an array of tunnel tips (13) arranged at tunneling distance from a storage medium (2) which is capable of permitting digital information to be written or read through variations of the tunneling current. Each tunnel tip (13) is supported on its own cantilever beam (12) extending across a cavity (14) formed in a common substrate (15). Each cantilever beam (12) as well as the bottom of each cavity (14) are covered with an electrically conducting layer (16, 18) enabling the distance between each one of the tunnel tips (13) and the surface of the storage medium (2) to be electrostatically controlled. The storage medium (2) is attached to the free end of a piezoceramic bender, the end in operation performing a circular motion so that each tunnel tip (13) scans its associated area of the storage medium (2) along a circular track.

公开(公告)号：DE3772573D1

公开(公告)日：1991-10-02

申请号：DE3772573

申请日：1987-09-25

Applicant: IBM ,  LEICA INDUSTRIEVERWALTUNG

Inventor： DUERIG URS THEODOR ,  FISCHER ULRICH CHRISTIAN ,  POHL WOLFGANG DIETER

IPC: G01B11/00 ,  G01B11/30 ,  G01Q10/00 ,  G01Q20/02 ,  G01Q60/18 ,  G01Q60/22 ,  G11B5/60 ,  G11B9/00 ,  G11B11/00 ,  G11B11/105 ,  G11B21/20 ,  G02B21/00 ,  G11B7/09

Abstract: The surface scanning sensor comprises an optical sensor body (1), rectangular in cross section, which is transparent to laser light (2) and is formed as a waveguide for that light. An upper surface boundary (6) and a lower surface boundary (5) are parallel to each other. A light exit (10) is provided for light diffracted within the sensor, located in the middle of the upper surface (6). A photo detector (11) converts the light so diffracted, into an electrical signal. Opposite the light exit (10) is positioned a reference (14) where a 'detection particle' (15) is located. It is formed as a sphere with a diameter which is less than half the wavelength of the laser light source, though other circular or conical shapes may be used. The detection particle constitutes an antenna and is manufactured from a dielectric material which is coated with a thin layer of metal (16) along with an area of the sensor body. A measurement body whose surface (17) is to be measured at a site (18) opposite the sensor antenna is positioned within the wavelength of the laser light. The sensor produces an electrical output from its photodetector whichis proportional to the distance between the target surface and the antenna. When combined with a movement control system the sensor may be used to accurately map surface deformations of the target.

公开(公告)号：DE3772563D1

公开(公告)日：1991-10-02

申请号：DE3772563

申请日：1987-06-22

Applicant: IBM

Inventor： BEHA JOHANNES GEORG ,  BLACHA ARMIN UDO ,  CLAUBERG ROLF ,  MOELLER ROLF BERND GEORG ,  POHL WOLFGANG DIETER

IPC: H01J37/00 ,  G01B7/34 ,  G01N23/00 ,  G01N23/227 ,  G01N37/00 ,  G01Q10/00 ,  G01Q20/00 ,  G01Q20/02 ,  G01Q60/10 ,  G01Q60/12 ,  G01Q60/16 ,  G01N27/00 ,  G01R31/28

Abstract: The tunnel tip (20) of a scanning tunnelling microscope is positioned at tunnel distance with respect to the surface of the sample (27) to be investigated. A predetermined electrical potential is applied across the gap between tunnel tip (20) and sample (27). The tunnelling current is gated by a pulsed laser beam (26) directed at the tunnelling region and/or at the tip (20). Hot electrons in the sample are excited by a laser beam to an energy first below the work-function and caused to travel within the sample. A second laser gates the current in accordance with the pulse patterns. Alternatively, a laser beam changes the resistance of a photoconductive layer (23) arranged between the electrode (22) and associated electronics (24,25).

公开(公告)号：AU585449B2

公开(公告)日：1989-06-15

申请号：AU7325787

申请日：1987-05-21

Applicant: IBM

Inventor： POHL WOLFGANG DIETER ,  DUERIG URS THEODOR ,  GIMZEWSKI JAMES KAZIMIERZ

IPC: G01B7/34 ,  G01B21/30 ,  G01Q20/04 ,  G01Q80/00 ,  G11B9/00 ,  G11B9/08 ,  G11B9/14 ,  G11B17/34 ,  G11B19/20 ,  G11B21/00 ,  G11B25/04 ,  H01J37/20 ,  H01J37/28 ,  H01J37/285

Abstract: The storage unit comprises an array of tunnel tips (13) arranged at tunneling distance from a storage medium (2) which is capable of permitting digital information to be written or read through variations of the tunneling current. Each tunnel tip (13) is supported on its own cantilever beam (12) extending across a cavity (14) formed in a common substrate (15). Each cantilever beam (12) as well as the bottom of each cavity (14) are covered with an electrically conducting layer (16, 18) enabling the distance between each one of the tunnel tips (13) and the surface of the storage medium (2) to be electrostatically controlled. The storage medium (2) is attached to the free end of a piezoceramic bender, the end in operation performing a circular motion so that each tunnel tip (13) scans its associated area of the storage medium (2) along a circular track.

公开(公告)号：MX168548B

公开(公告)日：1993-05-31

申请号：MX621087

申请日：1987-04-24

Applicant: IBM

Inventor： POHL WOLFGANG DIETER ,  DUERIG URS THEODOR ,  GIMZEWSKI JAMES KAZIMIERZ

IPC: G01B7/34 ,  G01B21/30 ,  G01Q20/04 ,  G01Q80/00 ,  G11B9/00 ,  G11B9/08 ,  G11B9/14 ,  G11B17/34 ,  G11B19/20 ,  G11B21/00 ,  G11B25/04

Abstract: The storage unit comprises an array of tunnel tips (13) arranged at tunneling distance from a storage medium (2) which is capable of permitting digital information to be written or read through variations of the tunneling current. Each tunnel tip (13) is supported on its own cantilever beam (12) extending across a cavity (14) formed in a common substrate (15). Each cantilever beam (12) as well as the bottom of each cavity (14) are covered with an electrically conducting layer (16, 18) enabling the distance between each one of the tunnel tips (13) and the surface of the storage medium (2) to be electrostatically controlled. The storage medium (2) is attached to the free end of a piezoceramic bender, the end in operation performing a circular motion so that each tunnel tip (13) scans its associated area of the storage medium (2) along a circular track.