2.
    发明专利
    未知

    公开(公告)号:DE1943300A1

    公开(公告)日:1970-03-12

    申请号:DE1943300

    申请日:1969-08-26

    Applicant: IBM

    Abstract: 1,263,127. Integrated circuits. INTERNATIONAL BUSINESS MACHINES CORP. 19 Aug., 1969 [5 Sept., 1968], No. 41319/69. Heading H1K. An individual isolation wall surrounding each component in an I.C. is produced by diffusing a first region of the opposite conductivity type into a substrate, depositing a first epitaxial layer of the same conductivity type as the substrate, diffusing a frame region of the opposite conductivity type through the layer to contact the first region, depositing a second epitaxial layer, and diffusing a second frame region through this layer to contact the first frame region. An N--type Si wafer (10) is thermally oxidized and the oxide photolithographically processed to provide openings into which an impurity is diffused to form P-type isolation regions (12), Fig. 2a (not shown). The surface is reoxidized and all the oxide removed and an N--type epitaxial layer (16) is deposited by the hydrogen reduction of SiCl 4 , Fig. 2b (not shown). The surface is oxide masked and impurities are diffused-in to form an annular P-type region (18), Fig. 2c (not shown), and an N + -type subcollector region 20, Fig. 2d (not shown). A second N--type epitaxial layer 22 is then deposited and a P-type annular region 28, and N + -type collector contact region 24, a P-type base region 26 and an N + -type emitter region 32 are formed by diffusion. During subsequent epitaxial growth and diffusion steps the impurities in P-type regions 12 and 18 and in N-type region 20 diffuse into the overlying layers so that the transistor is completely surrounded by a P-type isolation region and the region 24 contacts the sub-collector region 20. The N + -type collector contact region 24 and the emitter region 32 may be doped with phosphorus. The base region 26 may be formed simultaneously with the P-type isolation region 28. A low resistance cross-over may be provided in the wafer by forming a P-type "column" simultaneously with the three isolation region diffusions, conductive tracks in one direction passing over the "column" on an insulating layer while a track extending at right angles to the first direction is broken and has its ends in contact with spaced parts of the top of the "column" which completes the circuits, Fig. 3 (not shown).

Patent Agency Ranking