公开(公告)号：WO2011008478A2

公开(公告)日：2011-01-20

申请号：PCT/US2010040063

申请日：2010-06-25

Applicant: KLA TENCOR CORP ,  ROTTER LAWRENCE D ,  WANG DAVID Y ,  SHAUGHNESSY DERRICK ,  SENKO MARK

Inventor： ROTTER LAWRENCE D ,  WANG DAVID Y ,  SHAUGHNESSY DERRICK ,  SENKO MARK

IPC: G01N25/72 ,  G01N21/63 ,  H01L21/66

CPC classification number: G01N21/1717 ,  G01N2021/1731 ,  G01N2021/1761

Abstract: A device and methods for performing a photothermal measurement and relaxation compensation of a sample are disclosed. The device may include a probe beam source, a pump beam source, a sample, and a detector array. A method may include adjusting an intensity modulated pump beam power, adjusting a probe beam power to increase a response measurement location temperature and increase a modulated optical reflectance signal, directing the intensity modulated pump beam and the probe beam along a measurement path to a response measurement location on a sample for periodically exciting a region on the sample, detecting a reflected portion of the probe beam, and calculating an implantation dose.

Abstract translation: 公开了一种用于对样品进行光热测量和松弛补偿的装置和方法。 该装置可以包括探测光束源，泵浦光束源，样本和检测器阵列。 方法可以包括调整强度调制的泵浦光束功率，调整探测光束功率以增加响应测量位置温度并增加经调制的光反射信号，将强度调制的泵浦光束和探测光束沿测量路径引导到响应测量 样品上的位置，用于周期性地激发样品上的区域，检测探测光束的反射部分，以及计算植入剂量。

公开(公告)号：EP2766693A4

公开(公告)日：2015-08-19

申请号：EP12839434

申请日：2012-10-11

Applicant: KLA TENCOR CORP

Inventor： SHCHEGROV ANDREI V ,  ROTTER LAWRENCE D ,  WANG DAVID Y ,  VELDMAN ANDREI ,  PETERLINZ KEVIN ,  BRADY GREGORY ,  SHAUGHNESSY DERRICK

IPC: G01B11/06 ,  G03F7/20

CPC classification number: G01N21/211 ,  G01B11/0616 ,  G01N21/4738 ,  G01N21/55 ,  G01N2021/213 ,  G03F7/70608 ,  G03F7/70625 ,  G03F7/70633

公开(公告)号：EP2959503A4

公开(公告)日：2016-10-26

申请号：EP14753960

申请日：2014-02-21

Applicant: KLA TENCOR CORP

Inventor： BRADY GREGORY ,  SHCHEGROV ANDREI V ,  ROTTER LAWRENCE D ,  SHAUGHNESSY DERRICK ,  SHCEMELININ ANATOLY ,  BEZEL ILYA ,  ARAIN MUZAMMIL ,  VASILIEV ANATOLY ,  ALLEN JAMES ,  SHULEPOV OLEG ,  HILL ANDREW ,  BACHAR OHAD ,  MARKOWITZ MOSHE ,  ISH-SHALOM YARON ,  SELA ILAN ,  MANASSEN AMNON ,  SVIZHER ALEXANDER ,  KHOKHLOV MAXIM ,  ABRAMOV AVI ,  TSIBULEVSKY OLEG ,  KANDEL DANIEL ,  GHINOVKER MARK

IPC: H01L21/66 ,  F21V13/00 ,  F21V13/08 ,  F21V13/12 ,  G02B6/293 ,  G02B6/35

CPC classification number: G01J3/10 ,  F21V13/00 ,  F21V13/08 ,  F21V13/12 ,  G01J3/0218 ,  G01J3/12 ,  G02B6/29332 ,  G02B6/29362 ,  G02B6/29388 ,  G02B6/29395 ,  G02B6/3508 ,  G02B6/353 ,  H01J65/04

Abstract: The disclosure is directed to systems for providing illumination to a measurement head for optical metrology. In some embodiments of the disclosure, illumination beams from a plurality of illumination sources are combined to deliver illumination at one or more selected wavelengths to the measurement head. In some embodiments of the disclosure, intensity and/or spatial coherence of illumination delivered to the measurement head is controlled. In some embodiments of the disclosure, illumination at one or more selected wavelengths is delivered from a broadband illumination source configured for providing illumination at a continuous range of wavelengths.

Abstract translation: 用于向用于光学测量的测量头提供照明的系统被配置为组合来自多个照明源的照明光束以将一个或多个所选波长的照明传送到测量头。 控制传递到测量头的照明的强度和/或空间相干性。 在一个或多个所选波长的照明从配置成在连续波长范围内提供照明的宽带照明源传送。