公开(公告)号：WO2011028807A3

公开(公告)日：2011-06-16

申请号：PCT/US2010047539

申请日：2010-09-01

Applicant: KLA TENCOR CORP ,  KANDEL DANIEL ,  LEVINSKI VLADIMIR ,  SVIZHER ALEXANDER ,  SELIGSON JOEL ,  HILL ANDREW ,  BACHAR OHAD ,  MANASSEN AMNON ,  CHUANG YUNG-HO ALEX ,  SELA ILAN ,  MARKOWITZ MOSHE ,  NEGRI DARIA ,  ROTEM EFRAIM

Inventor： KANDEL DANIEL ,  LEVINSKI VLADIMIR ,  SVIZHER ALEXANDER ,  SELIGSON JOEL ,  HILL ANDREW ,  BACHAR OHAD ,  MANASSEN AMNON ,  CHUANG YUNG-HO ALEX ,  SELA ILAN ,  MARKOWITZ MOSHE ,  NEGRI DARIA ,  ROTEM EFRAIM

IPC: H01L21/66

CPC classification number: G01N21/47 ,  G01B11/02 ,  G01B11/0641 ,  G01B2210/56 ,  G01N21/211 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/4792 ,  G01N2201/06113 ,  G01N2201/105 ,  G03F7/70625 ,  G03F7/70633

Abstract: Various metrology systems and methods are provided.

Abstract translation: 提供了各种计量系统和方法。

公开(公告)号：SG178432A1

公开(公告)日：2012-04-27

申请号：SG2012010575

申请日：2010-09-01

Applicant: KLA TENCOR CORP

Inventor： KANDEL DANIEL ,  LEVINSKI VLADIMIR ,  SVIZHER ALEXANDER ,  SELIGSON JOEL ,  HILL ANDREW ,  BACHAR OHAD ,  MANASSEN AMNON ,  CHUANG YUNG-HO ALEX ,  SELA ILAN ,  MARKOWITZ MOSHE ,  NEGRI DARIA ,  ROTEM EFRAIM

Abstract: Various metrology systems and methods are provided.

公开(公告)号：EP2474027A4

公开(公告)日：2013-03-20

申请号：EP10814430

申请日：2010-09-01

Applicant: KLA TENCOR CORP

Inventor： KANDEL DANIEL ,  LEVINSKI VLADIMIR ,  SVIZHER ALEXANDER ,  SELIGSON JOEL ,  HILL ANDREW ,  BACHAR OHAD ,  MANASSEN AMNON ,  CHUANG YUNG-HO ALEX ,  SELA ILAN ,  MARKOWITZ MOSHE ,  NEGRI DARIA ,  ROTEM EFRAIM

IPC: G01N21/956

CPC classification number: G01N21/47 ,  G01B11/02 ,  G01B11/0641 ,  G01B2210/56 ,  G01N21/211 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/4792 ,  G01N2201/06113 ,  G01N2201/105 ,  G03F7/70625 ,  G03F7/70633

Abstract: Various metrology systems and methods are provided.

公开(公告)号：EP2959503A4

公开(公告)日：2016-10-26

申请号：EP14753960

申请日：2014-02-21

Applicant: KLA TENCOR CORP

Inventor： BRADY GREGORY ,  SHCHEGROV ANDREI V ,  ROTTER LAWRENCE D ,  SHAUGHNESSY DERRICK ,  SHCEMELININ ANATOLY ,  BEZEL ILYA ,  ARAIN MUZAMMIL ,  VASILIEV ANATOLY ,  ALLEN JAMES ,  SHULEPOV OLEG ,  HILL ANDREW ,  BACHAR OHAD ,  MARKOWITZ MOSHE ,  ISH-SHALOM YARON ,  SELA ILAN ,  MANASSEN AMNON ,  SVIZHER ALEXANDER ,  KHOKHLOV MAXIM ,  ABRAMOV AVI ,  TSIBULEVSKY OLEG ,  KANDEL DANIEL ,  GHINOVKER MARK

IPC: H01L21/66 ,  F21V13/00 ,  F21V13/08 ,  F21V13/12 ,  G02B6/293 ,  G02B6/35

CPC classification number: G01J3/10 ,  F21V13/00 ,  F21V13/08 ,  F21V13/12 ,  G01J3/0218 ,  G01J3/12 ,  G02B6/29332 ,  G02B6/29362 ,  G02B6/29388 ,  G02B6/29395 ,  G02B6/3508 ,  G02B6/353 ,  H01J65/04

Abstract: The disclosure is directed to systems for providing illumination to a measurement head for optical metrology. In some embodiments of the disclosure, illumination beams from a plurality of illumination sources are combined to deliver illumination at one or more selected wavelengths to the measurement head. In some embodiments of the disclosure, intensity and/or spatial coherence of illumination delivered to the measurement head is controlled. In some embodiments of the disclosure, illumination at one or more selected wavelengths is delivered from a broadband illumination source configured for providing illumination at a continuous range of wavelengths.

Abstract translation: 用于向用于光学测量的测量头提供照明的系统被配置为组合来自多个照明源的照明光束以将一个或多个所选波长的照明传送到测量头。 控制传递到测量头的照明的强度和/或空间相干性。 在一个或多个所选波长的照明从配置成在连续波长范围内提供照明的宽带照明源传送。