PRODUCT CONTAINING NOBLE METAL ALLOY AND PRODUCING METHOD THEREFOR

    公开(公告)号:JP2001158926A

    公开(公告)日:2001-06-12

    申请号:JP2000316101

    申请日:2000-10-17

    Abstract: PROBLEM TO BE SOLVED: To produce an element having an electric contact formed from an alloy having improved wear resistance. SOLUTION: The alloy is particularly useful for a microrelay formed by an MEMS technique. In one executing mode, sufficient precipitation hardening improves its wear resistance, but, the alloy is selected so as to maintain the electrical conductivity to the level lower than that in which the precipitation is reduced to a degree which is not allowable. As the alloy, at least one among rhodium, platinum, palladium, gold and ruthenium is contained. This is attained by an alloying material which has extremely limited solid solution properties in noble metal lattices, e.g. a solid solution degree lower than 4 wt.% or does not have solid solution properties. In a second executing mode, the alloy contains noble metal lattices 50 and dispersive particles 52 insoluble in the lattices, and these dispersive particles provide similar strengthening mechanisms.

    PACKAGE HAVING CAVITY FOR HOUSING MEMS

    公开(公告)号:JP2001185635A

    公开(公告)日:2001-07-06

    申请号:JP2000314634

    申请日:2000-10-16

    Abstract: PROBLEM TO BE SOLVED: To provide a package technology for sealing an MEMS device hermetically so that the MEMS device can be built in a CMOS circuit. SOLUTION: The inventive package technology can be employed for packaging an MEMS device according to a conventional CMOS package technology. The invention also provides means for controlling the operational environment of the MEMS device. In the inventive package, a protected cavity is provided around an MEMS device fabricated by a flip-chip bonding process. According to one embodiment, a firewall is formed on a first substrate around the MEMS device which is sealed in a cavity bounded by the firewall. Subsequently, another substrate is flip-chip bonded to the first substrate holding the MEMS device.

    DOUBLE MICROELECTRONIC MACHINE ACTUATOR DEVICE

    公开(公告)号:JP2001179699A

    公开(公告)日:2001-07-03

    申请号:JP2000315660

    申请日:2000-10-16

    Abstract: PROBLEM TO BE SOLVED: To provide a microelectronic machine actuator device capable of double operation. SOLUTION: This device comprises a first substrate 12, a first operation electrode 20 formed on the first substrate 12, a second substrate 52 formed spacially from the first substrate, a second operation electrode 54 formed in a position on the second substrate spaced from the first operation electrode, and a micromachine 14 arranged between the first operation electrode 20 and the second operation electrode 54. It is featured by that the first electrode applies electrostatic attraction to the micromachine in accordance with a voltage selectively applied to the first operation electrode for moving the micromachine to a first position in a direction of the first substrate, and the second operation electrode applies electrostatic attraction to the micromachine in accordance with a voltage selectively applied to the second operation electrode for moving the micromachine to a second position in a direction of the second substrate.

    HYBRID INTEGRATED CIRCUIT
    4.
    发明专利

    公开(公告)号:JP2001198897A

    公开(公告)日:2001-07-24

    申请号:JP2000314632

    申请日:2000-10-16

    Abstract: PROBLEM TO BE SOLVED: To provide a hybrid integrated circuit having a MEMS relay flip-chip bonded to a CMOS chip. SOLUTION: The CMOS chip is bonded to a MEMS microrelay to form a rigid electric connection between the chips, whereby highly integral electric transmission through the hybrid integrated circuit can be formed. If a delay of signal propagation between the CMOS chip and the MEMS chip is greatly reduced, the hybrid integrated circuit can be used in high band width applications.

    DRIVE MECHANISM FOR DEVICE WITH MOVABLE ELECTRODE AND FIXED ELECTRODE

    公开(公告)号:JP2001176369A

    公开(公告)日:2001-06-29

    申请号:JP2000314633

    申请日:2000-10-16

    Abstract: PROBLEM TO BE SOLVED: To provide a drive mechanism that can maintain a switching condition without power consumption. SOLUTION: This device has a movable electrode 12 which has a first electric contact point 20 and a fixed electrode 28 which has a second electric contact point 18. It is composed of a latching magnetic material 14 arranged on one of the movable electrode and the fixed electrode, electric conductors 10 arranged separately from the latching magnetic material, and a second magnetic material 16 arranged on the other of the movable electrode and the fixed electrode separately from the latching magnetic material. By exposing the latching magnetic material 14 to the exterior magnetic field formed by feeding a current into the electric conductors 10, a change in the magnetization direction of the latching magnetic material is caused, and the changed magnetization direction is maintained in the latching magnetic material 14 even after that its exposure to the formed exterior magnetic field has ended.

    DUAL MOTION ELECTROSTATIC ACTUATOR DESIGN FOR MEMS MICRO-RELAY

    公开(公告)号:CA2323189A1

    公开(公告)日:2001-04-15

    申请号:CA2323189

    申请日:2000-10-13

    Abstract: A dual micro-electromechanical actuator for providing dual actuation to a micromachine. The actuator includes a first substrate upon which a first actuating electrode is formed. A second substrate located proximate to but spaced from the first substrate supports a second actuating electrode. A micromachine device, such as a thin membrane, plate or cantilever, is disposed between the actuating electrodes. When one of the actuating electrodes is selectively activated by applying a voltage thereto, an electrostatic attraction force is produced which causes movement of the micromachine in the direction of the activated actuating electrode.

    NON-VOLATILE MEMS MICRO-RELAYS USING MAGNETIC ACTUATORS

    公开(公告)号:CA2323025A1

    公开(公告)日:2001-04-15

    申请号:CA2323025

    申请日:2000-10-06

    Abstract: An actuation device employing square-loop latchable magnetic material having a magnetization direction (polarization) capable of being changed in response to exposure to an external magnetic field is disclosed. The magnetic field i s created by a conductor assembly with non-solenoid configuration. Once the magnetization direction of the material is so changed, the external magnetic field is no longer required to maintain the new magnetization direction. The latchable magnetic material is disposed on the mobile electrode of a switching device, and another magnetic material is disposed in spaced relation to the latchable magnetic material on a stationary electrode or surface. By applying an electrical current to a conductor assembly arranged proximate the latchable material, a magnetic field is created about the latchable magnetic material, to change the magnetization direction and thereby enable the attraction or repulsion of another magnetic material located on t he stationary electrode. The resulting relative displacement of the mobile and stationary electrodes effects the selective connection or disconnection of electrical contacts carried on or associated with the respective electrodes of the actuation device without requiring additional power in order to maintain the switched state of theele ctrodes.

    10.
    发明专利
    未知

    公开(公告)号:DE60016692D1

    公开(公告)日:2005-01-20

    申请号:DE60016692

    申请日:2000-10-09

    Abstract: An actuation device employing square-loop latchable magnetic material (14, 16) having a magnetization direction (polarization) capable of being changed in response to exposure to an external magnetic field is disclosed. The magnetic field is created by a conductor assembly with non-solenoid configuration. Once the magnetization direction of the material is so changed, the external magnetic field is no longer required to maintain the new magnetization direction. The latchable magnetic material (14) is disposed on the mobile electrode (20) of a switching device, and another magnetic material (16) is disposed in spaced relation to the latchable magnetic material on a stationary electrode or surface (28). By applying an electrical current to a conductor assembly arranged proximate the latchable material, a magnetic field is created about the latchable magnetic material, to change the magnetization direction and thereby enable the attraction or repulsion of another magnetic material located on the stationary electrode. The resulting relative displacement of the mobile (20) and stationary (18) electrodes effects the selective connection or disconnection of electrical contacts carried on or associated with the respective electrodes of the actuation device without requiring additional power in order to maintain the switched state of the electrodes.

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