公开(公告)号：DE60330130D1

公开(公告)日：2009-12-31

申请号：DE60330130

申请日：2003-01-31

Applicant: ST MICROELECTRONICS SA

Inventor： GENDRIER PHILIPPE ,  DRAY CYRILLE ,  FOURNEL RICHARD ,  POIRIER SEBASTIEN ,  CASPAR DANIEL ,  CANDELIER PHILIPPE

IPC: H01L29/788 ,  H01L21/336 ,  H01L21/8247 ,  H01L27/115 ,  H01L29/792

Abstract: The semiconductor memory device comprises a transistor with floating gate (FG) and a control gate, where the regions of source (S), drain (D) and channel of the floating-gate transistor form the control gate, and the memory cell comprises a dielectric zone (ZTN) laid out between a part (P1) of the layer of gate material and an active semiconductor zone (RG1) electrically insulated from another active zone (RG2) incorporating the control gate. The dielectric zone forms a tunnel zone (ZTN) for transferring the charges stored in the floating gate at the time of erasing the memory cell. The capacitive value of tunnel zone (ZTN) is below or equal to 30% of the total capacitive value between the layer of gate material and the set of active zones of the memory cell. The transistor has a ring gate (FG), and the gate material comprises a linking part (PL) connecting the first part (P1) and the ring gate. The active zones (RG1,RG2) are electrically insulated by the p-n junctions polarized in reverse, and the two zones are electrically insulated on the surface by a region of shallow trench isolation (STI). A memory array comprises several memory cells, each memory cell is associated with an access transistor, and the access transistor partly surrounds the floating-gate transistor of the memory cell resulting in a memory array of reduced size and lower programming currents. The device comprises the polarization means possessing the states of programming, reading and erasing the memory cell, where the erasing is of type Fowler-Nordheim and applies a voltage on the first active zone which is much higher than that applied in the regions of source, drain and substrate of the transistor. The programming of type Fowler-Nordheim applies to the regions of source, drain and substrate of the transistor voltages which are much higher than those applied to the first active zone. In the reading state the difference between the drain/source voltages is limited to 1 V in absolute value. An integrated circuit comprises the device as claimed.

公开(公告)号：AT449424T

公开(公告)日：2009-12-15

申请号：AT03709915

申请日：2003-01-31

Applicant: ST MICROELECTRONICS SA

Inventor： GENDRIER PHILIPPE ,  DRAY CYRILLE ,  FOURNEL RICHARD ,  POIRIER SEBASTIEN ,  CASPAR DANIEL ,  CANDELIER PHILIPPE

IPC: H01L29/788 ,  H01L21/336 ,  H01L21/8247 ,  H01L27/115 ,  H01L29/792

Abstract: The semiconductor memory device comprises a transistor with floating gate (FG) and a control gate, where the regions of source (S), drain (D) and channel of the floating-gate transistor form the control gate, and the memory cell comprises a dielectric zone (ZTN) laid out between a part (P1) of the layer of gate material and an active semiconductor zone (RG1) electrically insulated from another active zone (RG2) incorporating the control gate. The dielectric zone forms a tunnel zone (ZTN) for transferring the charges stored in the floating gate at the time of erasing the memory cell. The capacitive value of tunnel zone (ZTN) is below or equal to 30% of the total capacitive value between the layer of gate material and the set of active zones of the memory cell. The transistor has a ring gate (FG), and the gate material comprises a linking part (PL) connecting the first part (P1) and the ring gate. The active zones (RG1,RG2) are electrically insulated by the p-n junctions polarized in reverse, and the two zones are electrically insulated on the surface by a region of shallow trench isolation (STI). A memory array comprises several memory cells, each memory cell is associated with an access transistor, and the access transistor partly surrounds the floating-gate transistor of the memory cell resulting in a memory array of reduced size and lower programming currents. The device comprises the polarization means possessing the states of programming, reading and erasing the memory cell, where the erasing is of type Fowler-Nordheim and applies a voltage on the first active zone which is much higher than that applied in the regions of source, drain and substrate of the transistor. The programming of type Fowler-Nordheim applies to the regions of source, drain and substrate of the transistor voltages which are much higher than those applied to the first active zone. In the reading state the difference between the drain/source voltages is limited to 1 V in absolute value. An integrated circuit comprises the device as claimed.