公开(公告)号：EP0822415B1

公开(公告)日：2003-03-26

申请号：EP96830438.6

申请日：1996-07-31

Applicant: STMicroelectronics S.r.l.

Inventor： Ferrari, Paolo ,  Foroni, Mario ,  Vigna, Benedetto ,  Villa, Flavio

IPC: G01P15/00 ,  G01P15/08 ,  G01P15/125

CPC classification number: G01P15/0802 ,  G01P15/125 ,  G01P2015/0814

公开(公告)号：EP0822579B1

公开(公告)日：2004-07-21

申请号：EP96830437.8

申请日：1996-07-31

Applicant: STMicroelectronics S.r.l.

Inventor： Foroni, Mario ,  Ferrari, Paolo ,  Vigna, Benedetto ,  Villa, Flavio

IPC: H01L21/00 ,  H01L21/762 ,  H01L21/764

CPC classification number: B81C1/00246 ,  B81B2203/0315 ,  B81B2203/033 ,  B81C2201/0109 ,  B81C2203/0728 ,  B81C2203/075 ,  G01L9/0042 ,  G01P15/0802 ,  H01L21/764

公开(公告)号：EP0911606A1

公开(公告)日：1999-04-28

申请号：EP97830537.3

申请日：1997-10-23

Applicant: STMicroelectronics S.r.l.

Inventor： Ferrari, Paolo ,  Vigna, Benedetto ,  Foroni, Mario ,  Ferrera, Marco ,  Montanini, Pietro

IPC: G01C19/56

CPC classification number: G01C19/574 ,  G01C19/5769 ,  G01P15/0802 ,  H01L21/76202 ,  H01L21/764

Abstract: The angular speed sensor comprises a pair of mobile masses (2a, 2b) which are formed in the epitaxial layer (37) and are anchored to one another and to the remainder of the device by anchorage elements; the mobile masses are symmetrical with one another, and have mobile excitation electrodes (6a) which are intercalated with respective fixed excitation electrodes (7a 1 , 7a 2 ) and mobile detection electrodes (6b) which are intercalated with fixed detection electrodes (7b 1 , 7b 2 ). The mobile and fixed excitation electrodes extend in a first direction and the mobile and fixed detection electrodes extend in a second direction which is perpendicular to the first direction and is disposed on a single plane parallel to the surface of the device.

Abstract translation: 角速度传感器包括一对移动质量块（2a，2b），它们形成在外延层（37）中，并通过锚定元件相互锚定并固定到装置的其余部分; 移动质量彼此对称，并且具有插入有固定的检测电极（7b1,7b2）的固定激励电极（7a1,7a2）和移动检测电极（6b）的移动激励电极（6a）。 移动和固定激励电极沿第一方向延伸，并且移动和固定检测电极在垂直于第一方向的第二方向上延伸并且设置在平行于装置表面的单个平面上。