公开(公告)号：CN85109002A

公开(公告)日：1986-05-10

申请号：CN85109002

申请日：1985-10-29

Applicant: 株式会社名南制作所

Inventor： 岩本裕彦

IPC: G01B11/30

CPC classification number: G01N21/8986 ,  G01N2201/1085

Abstract: 一种胶合板表面缺陷探测头。它包括有：一遮光板，此遮光板以其前端与胶合板的一表面接触，并在它上面滑动；一光源，装置在遮光板的一侧；一光学纤维，装置在遮光板的另一侧。光学纤维是这样装置的：它的一端连同遮光板一起与胶合板表面相接触，并在它上面滑动，而它的另一端则对准一光探测器。

公开(公告)号：CN85109002B

公开(公告)日：1988-09-21

申请号：CN85109002

申请日：1985-10-29

Applicant: 株式会社名南制作所

Inventor： 岩本裕彦

IPC: G01N21/89

CPC classification number: G01N21/8986 ,  G01N2201/1085

Abstract: 一种胶合板表面缺陷探测头。它包括有：一遮光板，此遮光板以其前端与胶合板的一表面接触，并在它上面滑动；一光源，装置在遮光板的一侧；一光学纤维，装置在遮光板的另一侧。光学纤维是这样装置的；它的一端连同遮光板一起与胶合板表面相接触，并在它上面滑动，而它的另一端则对准一光探测器。

公开(公告)号：CN1696672A

公开(公告)日：2005-11-16

申请号：CN200510069673.3

申请日：2005-05-10

Applicant: 富士通株式会社

Inventor： 安藤护俊 ,  酒井觉

IPC: G01N21/88 ,  G01N21/55 ,  G01N21/84 ,  G01B11/30 ,  G01B5/28 ,  G06T7/00

CPC classification number: G01N21/896 ,  G01N2021/9513 ,  G01N2201/1085

Abstract: 一种根据表面发射的光的强度来检测材料表面的表面检测装置，包括：照射光到表面上的照射单元；和检测该表面反射的光的强度的检测单元。光的强度分布是越接近表面光强度越高。

公开(公告)号：US20050247895A1

公开(公告)日：2005-11-10

申请号：US11116175

申请日：2005-04-28

Applicant: Moritoshi Ando ,  Satoru Sakai

Inventor： Moritoshi Ando ,  Satoru Sakai

IPC: G01B11/30 ,  G01N21/86 ,  G01N21/88 ,  G01N21/89 ,  G01N21/896 ,  G01N21/95

CPC classification number: G01N21/896 ,  G01N2021/9513 ,  G01N2201/1085

Abstract: A surface inspecting apparatus that inspects a surface of a material based on an intensity of a reflected light from the surface includes an illuminating unit that illuminates a light on the surface; and a detecting unit that detects the intensity of the reflected light from the surface. The light has an intensity distribution in which an intensity of the light is higher approaching the surface.

Abstract translation: 基于来自表面的反射光的强度检查材料的表面的表面检查装置包括：照射表面上的光的照明单元; 以及检测单元，其检测来自表面的反射光的强度。 光具有强度分布，其中光的强度较高地接近表面。

公开(公告)号：US06587617B2

公开(公告)日：2003-07-01

申请号：US09791092

申请日：2001-02-22

Applicant: Zonh-Zen Ho

Inventor： Zonh-Zen Ho

IPC: G02B628

CPC classification number: G01N21/253 ,  G01N2201/1085 ,  G02B6/4249

Abstract: An apparatus and method for imaging biochip spots in which a linearly spaced array of micro-lenses has a set of optical fibers which are associated with each micro-lens to receive and transmit the image magnified by the micro-lens. The micro-lenses are spaced to that of the biochip spots so that the microlens array can be positioned over a selected group of biochip spots, one for each micro-lens. The microlens array can be translated to be over selected groups of biochip spots. A detector and user devise such as a computer and a screen are used to record and view the collected images.

公开(公告)号：US07286224B2

公开(公告)日：2007-10-23

申请号：US11018759

申请日：2004-12-21

Applicant: Douglas N. Curry ,  Richard H. Bruce

Inventor： Douglas N. Curry ,  Richard H. Bruce

IPC: G01N21/64 ,  G01N21/25 ,  G01J3/24 ,  A61B5/00 ,  G01N21/76

CPC classification number: G01N21/6456 ,  G01N15/1468 ,  G01N2201/1085

Abstract: An apparatus images a surface. An imager stage linearly translates the surface in a first direction. A light path has a first end defining an input aperture perpendicular to the first direction and parallel to the surface, and a second end defining an output aperture. A plurality of radiation beams linearly scan and interact in time-multiplexed alternating turns with the surface below the input aperture to produce a time-multiplexed light signal that is collected by the input aperture and transmitted by the light path to the output aperture. A photodetector arrangement detects the light signal at the output aperture. A processor processes the detected time-multiplexed light.

Abstract translation: 装置对表面进行成像。 成像器台沿第一方向线性平移表面。 光路具有限定垂直于第一方向并平行于表面的输入孔的第一端，以及限定输出孔的第二端。 多个辐射束在时间多路复用的交替匝中线性扫描并与输入孔下方的表面相互作用，以产生由输入孔收集并由光路传输到输出孔的时间复用光信号。 光电检测器装置检测输出孔处的光信号。 处理器处理检测到的时间复用光。

公开(公告)号：US07280261B2

公开(公告)日：2007-10-09

申请号：US11017440

申请日：2004-12-20

Applicant: Douglas N. Curry ,  Richard H. Bruce ,  Robert T. Krivacic

Inventor： Douglas N. Curry ,  Richard H. Bruce ,  Robert T. Krivacic

IPC: G02B26/08

CPC classification number: G01N21/6456 ,  G01N21/6428 ,  G01N2021/6484 ,  G01N2201/1085

Abstract: An apparatus images a surface. An imager stage has a planar surface for supporting a sample. A fiber optic bundle has a first end of parallel first fiber ends that are arranged to define an input aperture for viewing the sample on the imager stage. A distal bundle end is arranged to define an output aperture disposed away from the imager stage. A scanning radiation source scans a radiation beam along a path that is perpendicular to the sample on the imager stage. The input aperture of the fiber optic bundle receives a light signal that is produced by the radiation source scan of the imager stage sample. The light signal is transmitted to the bundle output aperture. A photodetector detects the light signal at the distal bundle end, and a processor processes the detected light.

Abstract translation: 装置对表面进行成像。 成像器台具有用于支撑样品的平坦表面。 光纤束具有平行的第一光纤端的第一端，其布置成限定用于观察成像器台上的样品的输入孔。 远侧束端布置成限定远离成像器台布置的输出孔。 扫描辐射源沿着与成像器台上的样品垂直的路径扫描辐射束。 光纤束的输入孔径接收由成像器台样品的辐射源扫描产生的光信号。 光信号被传输到束输出孔径。 光电检测器检测远侧束端处的光信号，并且处理器处理检测到的光。

公开(公告)号：US20020136491A1

公开(公告)日：2002-09-26

申请号：US09791092

申请日：2001-02-22

Inventor： Zonh-Zen Ho

IPC: G02B006/32

CPC classification number: G01N21/253 ,  G01N2201/1085 ,  G02B6/4249

Abstract: An apparatus and method for imaging biochip spots in which a linearly spaced array of micro-lenses has a set of optical fibers which are associated with each micro-lens to receive and transmit the image magnified by the micro-lens. The micro-lenses are spaced to that of the biochip spots so that the microlens array can be positioned over a selected group of biochip spots, one for each micro-lens. The microlens array can be translated to be over selected groups of biochip spots. A detector and user devise such as a computer and a screen are used to record and view the collected images.

Abstract translation: 用于成像生物芯片斑点的装置和方法，其中线性间隔的微透镜阵列具有与每个微透镜相关联的一组光纤，以接收和透射由微透镜放大的图像。 微透镜与生物芯片斑点间隔开，使得微透镜阵列可以位于所选择的一组生物芯片斑点上，每个微透镜一个。 微透镜阵列可以被翻译成选定的生物芯片点组。 使用诸如计算机和屏幕的检测器和用户设备来记录和查看所收集的图像。

公开(公告)号：WO1992001923A1

公开(公告)日：1992-02-06

申请号：PCT/US1991001445

申请日：1991-03-01

Applicant: TENCOR INSTRUMENTS

Inventor： TENCOR INSTRUMENTS ,  PECEN, Jiri ,  DRINKWATER, Jim

IPC: G01N21/47

CPC classification number: G01N21/94 ,  G01N2021/4742 ,  G01N2021/8861 ,  G01N2021/8864 ,  G01N2201/1085

Abstract: A particle imager and method for imaging particles on surfaces of substrates (19). A reflective suface (17) is scanned by a collimated light beam (57) and particles on the surface are detected by the scattered light caused by the particles. During a scan path (81) the intensity of the scattered light is measured forming intensity traces (91) and location addresses for the detected particles. Data from each scan path is stored in memory. A three-dimensional surface map (95) is formed from the data stored in memory. The intensity traces for a particle (71) when combined together in the surface map form an intensity profile (97, 99, 101) or signature of the particle. These signatures may then be compared to known particle signatures to determine characteristics of the detected particle.

Abstract translation: 一种用于在基板（19）的表面上成像颗粒的颗粒成像器和方法。 通过准直光束（57）扫描反射面（17），并且通过由颗粒引起的散射光来检测表面上的颗粒。 在扫描路径（81）期间，测量散射光的强度，形成强度迹线（91）和检测到的粒子的位置地址。 来自每个扫描路径的数据被存储在存储器中。 从存储在存储器中的数据形成三维表面图（95）。 当在表面图中组合在一起时，颗粒（71）的强度迹线形成强度分布（97,99,101）或颗粒的特征。 然后将这些签名与已知的粒子特征进行比较，以确定检测到的粒子的特征。

公开(公告)号：WO2010007617A2

公开(公告)日：2010-01-21

申请号：PCT/IL2009000684

申请日：2009-07-09

Applicant: BRIGHTVIEW SYSTEMS LTD ,  FINAROV MOSHE

Inventor： FINAROV MOSHE

IPC: G01N21/95 ,  G01N21/31

CPC classification number: G01N21/8422 ,  G01N21/31 ,  G01N21/6489 ,  G01N21/8901 ,  G01N2021/3568 ,  G01N2021/8908 ,  G01N2201/0826 ,  G01N2201/0833 ,  G01N2201/1085

Abstract: Photovoltaic thin film quality control is obtained where the thin film is supported by a support and a section of the film is illuminated by a polychromatic illumination source. The source forms on the thin film a continuous illuminated line. Discrete sampled points located on the illuminated line are imaged onto a two dimensional optical switch. A concordance look-up-table between the coordinates of the above sampled points on the thin film and their coordinates on the two dimensional optical switch are generated. The spectral composition of the illumination reflected by the sampled points is determined and photovoltaic thin film parameters applicable to the quality control are derived from the spectral composition of reflected or transmitted by the photovoltaic thin film illumination.

Abstract translation: 获得光电薄膜质量控制，其中薄膜由支撑体支撑并且膜的一部分被多色照明源照射。 源在薄膜上形成连续的照明线。 位于照明线上的离散采样点成像到二维光学开关上。 产生薄膜上面的采样点的坐标与二维光开关上的坐标之间的一致性查找表。 确定由采样点反射的照明的光谱组成，并且适用于质量控制的光电薄膜参数是从光电薄膜照射反射或透射的光谱组成得出的。