公开(公告)号：WO1992001923A1

公开(公告)日：1992-02-06

申请号：PCT/US1991001445

申请日：1991-03-01

Applicant: TENCOR INSTRUMENTS

Inventor： TENCOR INSTRUMENTS ,  PECEN, Jiri ,  DRINKWATER, Jim

IPC: G01N21/47

CPC classification number: G01N21/94 ,  G01N2021/4742 ,  G01N2021/8861 ,  G01N2021/8864 ,  G01N2201/1085

Abstract: A particle imager and method for imaging particles on surfaces of substrates (19). A reflective suface (17) is scanned by a collimated light beam (57) and particles on the surface are detected by the scattered light caused by the particles. During a scan path (81) the intensity of the scattered light is measured forming intensity traces (91) and location addresses for the detected particles. Data from each scan path is stored in memory. A three-dimensional surface map (95) is formed from the data stored in memory. The intensity traces for a particle (71) when combined together in the surface map form an intensity profile (97, 99, 101) or signature of the particle. These signatures may then be compared to known particle signatures to determine characteristics of the detected particle.

Abstract translation: 一种用于在基板（19）的表面上成像颗粒的颗粒成像器和方法。 通过准直光束（57）扫描反射面（17），并且通过由颗粒引起的散射光来检测表面上的颗粒。 在扫描路径（81）期间，测量散射光的强度，形成强度迹线（91）和检测到的粒子的位置地址。 来自每个扫描路径的数据被存储在存储器中。 从存储在存储器中的数据形成三维表面图（95）。 当在表面图中组合在一起时，颗粒（71）的强度迹线形成强度分布（97,99,101）或颗粒的特征。 然后将这些签名与已知的粒子特征进行比较，以确定检测到的粒子的特征。