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公开(公告)号：KR101682060B1
公开(公告)日：2016-12-02
申请号：KR1020150175999
申请日：2015-12-10
Applicant: 한국표준과학연구원
Abstract: 본발명은레벨교정장치및 이를이용한레벨교정방법에관한것으로서, 스타프의수직방향의긴 이동거리없이도레벨교정에필요한스타프의거리별및 높이별이동을확보할수 있고, 이를통해, 레벨을교정하는데필요한공간과구조를대폭적으로축소할수 있도록하는것을목적으로한다. 이러한목적을달성하기위하여본 발명은, 교정기준점의레벨본체에서측정된교정기준점과스타프간의수평거리및 표고차를이용하여레벨의거리측정오차와표고차측정오차를교정하는레벨교정장치에있어서, 스타프가교정기준점에대해길이방향으로수평하게배치될수 있도록, 스타프를지지하는제 1캐리지와; 제 1캐리지에수평하게지지된스타프의눈금이미지를수직하게전환시킨후, 교정기준점의레벨본체에반사시켜, 교정기준점과스타프간 수평거리와표고차를측정할수 있게하는펜타미러와; 스타프를교정기준점에대해거리별로이동시키면서교정기준점과스타프간 수평거리와표고차가거리별로측정될수 있도록, 제 1캐리지와광학계를교정기준점에대해수평이동시키는수평이동수단을구비한다.
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公开(公告)号：KR101554203B1
公开(公告)日：2015-09-21
申请号：KR1020130078753
申请日：2013-07-05
Applicant: 한국표준과학연구원
IPC: G01B11/06
Abstract: 본발명은두께측정장치및 두께측정방법을제공하는것이다. 이두께측정장치는제1 파장및 제2 파장의레이저빔을순차적으로투명기판의제1 위치에조사하는파장가변레이저; 상기투명기판을투과한투과빔을검출하는광 검출기;및제1 파장의제1 투과빔의세기와상기제2 파장의제2 투과빔의세기를이용한리자주그래프에서회전각, 상기제1 위치에서상기투명기판의내부반사에의한이웃한레이들(rays) 사이의광 경로의차이(the difference in optical path length), 또는상기제1 위치에서상기투명기판의내부반사에의한이웃한레이들(rays) 사이의위상차이를추출하는처리부를포함한다.
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公开(公告)号：KR101533997B1
公开(公告)日：2015-07-06
申请号：KR1020140011965
申请日：2014-02-03
Applicant: 한국표준과학연구원
Abstract: 본발명은다층구조측정장치및 그측정방법을제공한다. 상기다층구조측정장치는광원; 상기광원의출력광을제공받아평행광을제공하는시준렌즈; 상기시준렌즈를통과한입사광을제공받아다층구조의시료에제공하고상기시료로부터반사된샘플광을투과시키는광분할기; 상기광분할기가제공하는상기입사광을집속시키어상기시료에제공하고가변초점거리를가지는유체렌즈부; 상기광분할기를투과한상기샘플광을집속시키는집속렌즈; 상기집속렌즈의초점거리에배치된핀홀; 상기핀홀의후단에배치되는광검출기; 및상기유체렌즈부의초점거리를가변하기위하여상기유체렌즈부의내부에유체를제공하는유체량조절부를포함한다.
Abstract translation: 本发明提供一种使用流体透镜测量多层结构的装置及其方法。 用于测量多层结构的装置包括：光源; 接收光源的输出光以提供水平光的准直透镜; 接收通过准直透镜的入射光的分光器，以提供多层结构的样本，并使得从样品反射的样品光能够穿透; 允许由分光器提供的入射光聚焦以提供给样品并具有可变焦距的流体透镜单元; 使透过分光器的样品光聚焦的聚焦透镜; 设置在聚焦透镜的焦距中的针孔; 设置在销孔的后端的光检测器; 以及流体量控制单元，其向所述流体透镜的内部提供流体，以使得所述流体透镜单元的焦距变化。
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公开(公告)号：KR1020140110178A
公开(公告)日：2014-09-17
申请号：KR1020130023174
申请日：2013-03-05
Applicant: 한국표준과학연구원
Abstract: The present invention provides a spectrum domain interface device and a spectrum domain interface device. The spectrum domain interface device comprises: a laser light source oscillating in a constant frequency band at constant longitudinal mode frequency intervals; a fiber-ferrule resonator for making light received from the laser light source penetrate selected longitudinal modes having a free spectral range greater than the longitudinal mode frequency intervals; an interferometer for making interference light having a light path difference caused by different light paths from the light received from the fiber-ferrule resonator; a spectrum analyzer for resolving and analyzing the interference light received from the interferometer according to frequencies; and a signal processing part for extracting the spectrum cycle of an interference signal according to the frequencies using the interference signal of the spectrum analyzer, and the light path difference received from the interferometer using the spectrum cycle.
Abstract translation: 本发明提供一种频域接口装置和频域接口装置。 频域接口装置包括：以恒定的纵向频率间隔在恒定频带振荡的激光光源; 用于使从激光光源接收的光的光纤套圈谐振器穿透具有大于纵向模式频率间隔的自由光谱范围的所选纵向模式; 干涉仪，用于产生具有由从光纤套圈谐振器接收的光的不同光路引起的光路差的干涉光; 频谱分析仪，用于根据频率解析和分析从干涉仪接收的干涉光; 以及信号处理部，用于使用频谱分析仪的干扰信号，根据频率提取干扰信号的频谱周期，以及使用频谱周期从干涉仪接收的光路差。
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公开(公告)号：KR1020140101489A
公开(公告)日：2014-08-20
申请号：KR1020130014369
申请日：2013-02-08
Applicant: 한국표준과학연구원
Abstract: Provided in the present invention are a spectrum domain interference apparatus and a spectrum domain interference method. The spectrum domain interference apparatus comprises: a laser source which emits light with a fixed longitudinal mode frequency width in a fixed frequency band; a fiber Bragg grating filter which receives the light from the laser source in order to penetrate longitudinal modes selected by a free spectral range (FSR) larger than the longitudinal mode frequency width; an interferometer which receives light from the fiber Bragg grating filter in order to provide interference light with an optical path difference due to different optical paths; a spectrum analyzer which receives the interference light from the interferometer in order to decompose and measure the interference light according to frequencies; and a signal processing unit which extracts a spectral cycle of an interference signal according to frequencies using the interference signal of the spectrum analyzer, and extracts an optical path difference provided by the interferometer using the spectral cycle.
Abstract translation: 本发明提供的是频域干扰装置和频域干扰方法。 频域干扰装置包括：以固定频带中的固定纵模频率发射光的激光源; 光纤布拉格光栅滤波器，其接收来自激光源的光，以穿透由大于纵向模式频率宽度的自由光谱范围（FSR）选择的纵向模式; 干涉仪，其从光纤布拉格光栅滤波器接收光，以便由于不同的光路而提供具有光程差的干涉光; 频谱分析仪，其接收来自干涉仪的干涉光，以便根据频率分解和测量干涉光; 以及信号处理单元，其使用频谱分析仪的干扰信号，根据频率提取干扰信号的频谱周期，并且使用频谱周期提取由干涉仪提供的光程差。
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Patent Agency Ranking
公开(公告)号：KR1020140096938A
公开(公告)日：2014-08-06
申请号：KR1020130025964
申请日：2013-03-12
Applicant: 한국표준과학연구원
IPC: G01B11/06
Abstract: A transparent substrate monitoring device and a transparent substrate monitoring method are provided. According to an embodiment of the present invention, the transparent substrate monitoring device comprises a light emitting part for irradiating light; a double slit arranged on a plane defined by first and second directions crossing the progress direction of the incident light, and having first and second slits making the light penetrate while being separated from each other in a first direction; a light detecting part for measuring an interference pattern formed on a screen by a first light penetrating the first slit via the first position of a transparent substrate arranged between the light emitting part and the double slit and a second light penetrating the second slit via the second position of the transparent substrate, or for measuring the position movement of the interference pattern; and a signal processing part for calculating optical phase difference or optical path difference based on the first and second positions by receiving signals from the light detecting part.
Abstract translation: 提供了透明基板监视装置和透明基板监视方法。 根据本发明的实施例，透明基板监视装置包括用于照射光的发光部分; 布置在与穿过入射光的行进方向的第一和第二方向限定的平面上的双狭缝，并且具有使第一和第二狭缝在第一方向彼此分离的同时穿透; 光检测部分，用于经由布置在发光部分和双缝隙之间的透明基板的第一位置穿过第一狭缝的第一光量测量在屏幕上形成的干涉图案;以及第二光线，经由第二光通过第二狭缝 透明基板的位置，或用于测量干涉图案的位置移动; 以及信号处理部分，用于通过从光检测部分接收信号来基于第一和第二位置计算光学相位差或光程差。
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公开(公告)号：KR101361625B1
公开(公告)日：2014-02-12
申请号：KR1020120062074
申请日：2012-06-11
Applicant: 한국표준과학연구원
Abstract: 본 발명은 위치 측정 장치 및 위치 측정 방법을 제공한다. 이 위치 측정 방법은 증분형 스케일(incremental scale)에서 반사 또는 투과된 광을 상기 증분형 스케일의 한 주기 내에 60도의 위상차를 가지고 감지하여 측정신호를 생성하는 단계, 감지된 측정 신호를 기본 공간 주파수(fundamental spatial frequency)의 1차 정현파 및 3차 정현파의 합으로 표시하는 단계, 및 측정 신호를 이용하여 1차 정현파의 위상을 추출하는 단계를 포함한다.
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公开(公告)号：KR1020130107108A
公开(公告)日：2013-10-01
申请号：KR1020120028938
申请日：2012-03-21
Applicant: 한국표준과학연구원
Abstract: PURPOSE: A thickness change measuring device and a thickness change measuring method are provided to precisely measure a change in the thickness of a target object and to measures a thickness change aspect of the whole surface of the target object. CONSTITUTION: A thickness change measuring device includes a light emitting unit (10), a double slit (30), a target object (20), a light position detecting unit (40), and a signal processing unit. The double slit includes a first opening (31) and a second opening (32) which are separated in a direction across a light progressing direction and transmits the lights. The target object is arranged between the light emitting unit and the double slit, thereby transmitting the lights. The light position detecting unit receives coherent lights formed by the lights transmitted through the first and second openings, thereby detecting a position change of coherent patterns. The signal processing unit receives signals from the light position detecting unit, thereby measuring a change in the thickness of the target object. [Reference numerals] (10) Light emitting unit; (80) Processing unit; (90) Transfer control unit; (91) Driving unit
Abstract translation: 目的：提供厚度变化测量装置和厚度变化测量方法，以精确地测量目标物体的厚度变化并测量目标物体的整个表面的厚度变化方面。 构成：厚度变化测量装置包括发光单元（10），双缝（30），目标物体（20），光位置检测单元（40）和信号处理单元。 双缝包括沿着光进行方向分离的第一开口（31）和第二开口（32），并且透光。 目标物体被布置在发光单元和双缝之间，从而传输光。 光位置检测单元接收由透过第一和第二开口的光形成的相干光，从而检测相干图案的位置变化。 信号处理单元从光位置检测单元接收信号，从而测量目标物体的厚度变化。 （附图标记）（10）发光单元; （80）处理单元; （90）转移控制单元; （91）驾驶单位
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公开(公告)号：KR1020120043519A
公开(公告)日：2012-05-04
申请号：KR1020100104855
申请日：2010-10-26
Applicant: 한국표준과학연구원
Abstract: PURPOSE: A visibility enhanced interferometer is provided to improve the visibility because a reflected light signal is amplified to an auxiliary light source applied an injection locking method without a phase information change and becomes similar to a reference light signal. CONSTITUTION: A visibility enhanced interferometer comprises a main optical source unit(20), a light splitting unit(30), a reference surface reflection unit(40), a measuring surface reflection unit(50), and an optical detecting unit(60). The main optical source unit projects short wavelength light. The light splitting unit divides a light signal into two. The reference and measuring surface reflection units respectively reflect the light signals divided by the light splitting unit to each measuring surface of measuring objects. The light detecting unit observes the interference by gathering the reflected lights from the reference and measuring surface reflection units. The auxiliary light source unit amplifies weak reflected light so that the visibility is uniformly maintained.
Abstract translation: 目的：提供可见度增强型干涉仪以提高可见度，因为反射光信号被放大到辅助光源，而辅助光源则采用注入锁定方法而不会产生相位信息变化，并变得类似于参考光信号。 构成：可见度增强型干涉仪包括主光源单元（20），分光单元（30），参考表面反射单元（40），测量表面反射单元（50）和光学检测单元（60） 。 主光源单元投射短波长光。 光分离单元将光信号分为两个。 参考和测量表面反射单元分别将由光分离单元划分的光信号反映到测量对象的每个测量表面。 光检测单元通过从参考和测量表面反射单元收集反射光来观察干扰。 辅助光源单元放大弱反射光，使得能见度被均匀地保持。
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公开(公告)号：KR101135142B1
公开(公告)日：2012-04-16
申请号：KR1020100107832
申请日：2010-11-01
Applicant: 한국표준과학연구원
Abstract: PURPOSE: An apparatus of measuring surface vibration using an injection locked laser is provided to accurately measure a surface oscillation of a measurement sample by amplifying a weak optical signal scattered from a measurement sample by using an injection locked laser. CONSTITUTION: An optical signal generator(10) irradiates a measurement sample(40) with an optical signal. The optical signal generator comprises a first laser unit(11), a beam splitter(12), a first detector(13), and a first light chopper(14). An optical signal amplification unit(20) amplifies a weak optical signal scattered from the measurement sample having an uneven surface. The optical signal amplification unit amplifies the optical signal scattered from the measurement sample through an injection locked laser. An optical signal analysis unit(30) analyzes an optical signal amplified in the optical signal amplification unit and measures the surface oscillation of the measurement sample.
Abstract translation: 目的：提供一种使用注射锁定激光测量表面振动的装置，通过使用注射锁定激光器放大从测量样本散射的弱光信号来精确测量测量样品的表面振荡。 构成：光信号发生器（10）用光信号照射测量样品（40）。 光信号发生器包括第一激光单元（11），分束器（12），第一检测器（13）和第一光斩波器（14）。 光信号放大单元（20）放大从具有不平坦表面的测量样品散射的弱光信号。 光信号放大单元通过注入锁定的激光放大从测量样本散射的光信号。 光信号分析单元（30）分析在光信号放大单元中放大的光信号，并测量测量样品的表面振荡。
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